JPS61126255U - - Google Patents

Info

Publication number
JPS61126255U
JPS61126255U JP1984149956U JP14995684U JPS61126255U JP S61126255 U JPS61126255 U JP S61126255U JP 1984149956 U JP1984149956 U JP 1984149956U JP 14995684 U JP14995684 U JP 14995684U JP S61126255 U JPS61126255 U JP S61126255U
Authority
JP
Japan
Prior art keywords
compound
compound vapor
container
nozzle
guide hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149956U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149956U priority Critical patent/JPS61126255U/ja
Publication of JPS61126255U publication Critical patent/JPS61126255U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984149956U 1984-10-03 1984-10-03 Pending JPS61126255U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149956U JPS61126255U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149956U JPS61126255U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS61126255U true JPS61126255U (enrdf_load_stackoverflow) 1986-08-08

Family

ID=30708120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149956U Pending JPS61126255U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS61126255U (enrdf_load_stackoverflow)

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