JPS6166347U - - Google Patents

Info

Publication number
JPS6166347U
JPS6166347U JP1984149952U JP14995284U JPS6166347U JP S6166347 U JPS6166347 U JP S6166347U JP 1984149952 U JP1984149952 U JP 1984149952U JP 14995284 U JP14995284 U JP 14995284U JP S6166347 U JPS6166347 U JP S6166347U
Authority
JP
Japan
Prior art keywords
compound
container
compound vapor
guide hole
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149952U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149952U priority Critical patent/JPS6166347U/ja
Publication of JPS6166347U publication Critical patent/JPS6166347U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984149952U 1984-10-03 1984-10-03 Pending JPS6166347U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149952U JPS6166347U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149952U JPS6166347U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS6166347U true JPS6166347U (enrdf_load_stackoverflow) 1986-05-07

Family

ID=30708116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149952U Pending JPS6166347U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6166347U (enrdf_load_stackoverflow)

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