JPS6169269U - - Google Patents

Info

Publication number
JPS6169269U
JPS6169269U JP1984152769U JP15276984U JPS6169269U JP S6169269 U JPS6169269 U JP S6169269U JP 1984152769 U JP1984152769 U JP 1984152769U JP 15276984 U JP15276984 U JP 15276984U JP S6169269 U JPS6169269 U JP S6169269U
Authority
JP
Japan
Prior art keywords
compound
guide hole
compound vapor
container
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984152769U
Other languages
English (en)
Japanese (ja)
Other versions
JPS646506Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984152769U priority Critical patent/JPS646506Y2/ja
Publication of JPS6169269U publication Critical patent/JPS6169269U/ja
Application granted granted Critical
Publication of JPS646506Y2 publication Critical patent/JPS646506Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984152769U 1984-10-09 1984-10-09 Expired JPS646506Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984152769U JPS646506Y2 (enrdf_load_stackoverflow) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984152769U JPS646506Y2 (enrdf_load_stackoverflow) 1984-10-09 1984-10-09

Publications (2)

Publication Number Publication Date
JPS6169269U true JPS6169269U (enrdf_load_stackoverflow) 1986-05-12
JPS646506Y2 JPS646506Y2 (enrdf_load_stackoverflow) 1989-02-20

Family

ID=30710818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984152769U Expired JPS646506Y2 (enrdf_load_stackoverflow) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS646506Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS646506Y2 (enrdf_load_stackoverflow) 1989-02-20

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