JPS6166352U - - Google Patents

Info

Publication number
JPS6166352U
JPS6166352U JP1984149957U JP14995784U JPS6166352U JP S6166352 U JPS6166352 U JP S6166352U JP 1984149957 U JP1984149957 U JP 1984149957U JP 14995784 U JP14995784 U JP 14995784U JP S6166352 U JPS6166352 U JP S6166352U
Authority
JP
Japan
Prior art keywords
container
compound
compound vapor
guide hole
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149957U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149957U priority Critical patent/JPS6166352U/ja
Publication of JPS6166352U publication Critical patent/JPS6166352U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984149957U 1984-10-03 1984-10-03 Pending JPS6166352U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149957U JPS6166352U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149957U JPS6166352U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS6166352U true JPS6166352U (enrdf_load_stackoverflow) 1986-05-07

Family

ID=30708121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149957U Pending JPS6166352U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6166352U (enrdf_load_stackoverflow)

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