JPS6166352U - - Google Patents
Info
- Publication number
- JPS6166352U JPS6166352U JP1984149957U JP14995784U JPS6166352U JP S6166352 U JPS6166352 U JP S6166352U JP 1984149957 U JP1984149957 U JP 1984149957U JP 14995784 U JP14995784 U JP 14995784U JP S6166352 U JPS6166352 U JP S6166352U
- Authority
- JP
- Japan
- Prior art keywords
- container
- compound
- compound vapor
- guide hole
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 13
- 238000005507 spraying Methods 0.000 claims description 4
- 235000002597 Solanum melongena Nutrition 0.000 claims 1
- 244000061458 Solanum melongena Species 0.000 claims 1
- 238000007664 blowing Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の化合物蒸気吹付け装置の実施
例を示す図、第２図は従来の化合物蒸気吹付け装
置を示す図である。
１……化合物、２……容器、３……化合物蒸気
案内孔、４……プランジヤー、５……ロツド、６
……駆動体、７……ヒーター、８……ノズル、９
……熱電対、１０……弁受け、１１……保持体、
１２……真空容器、１３……Ｏリング、１４……
フイードスルー、１５……熱ガイド体。
FIG. 1 is a diagram showing an embodiment of the compound vapor spraying device of the present invention, and FIG. 2 is a diagram showing a conventional compound vapor spraying device. DESCRIPTION OF SYMBOLS 1... Compound, 2... Container, 3... Compound vapor guide hole, 4... Plunger, 5... Rod, 6
...Driver, 7...Heater, 8...Nozzle, 9
... thermocouple, 10 ... valve holder, 11 ... holding body,
12...Vacuum container, 13...O ring, 14...
Feed through, 15...Heat guide body.
Claims (1)
ビーム照射および化合物蒸気吹付けによつて炭化
膜等のパターン膜を形成させるマスクリペア装置
に用いる化合物蒸気吹付け装置において、化合物
を収納するための筒状をなす容器と、前記容器内
に設けられた化合物収納孔および化合物蒸気案内
孔と、前記容器内に形成されると共に前記化合物
蒸気案内孔に連結された細管状のノズルと、前記
化合物収納孔と前記ノズルとの連絡を開状態また
は閉状態とするためのバルブ体と、前記容器を保
持するための保持体と、前記バルブ体を作動させ
るために前記保持体に設けられた駆動体と、前記
容器の外周に設けられたヒーターと、前記容器の
先端近傍と前記保持体との間であつて前記容器の
外周装置に設けられた熱ガイド体より構成される
ことを特徴とするマスクリペア装置用化合物蒸気
吹付け装置。 In a compound vapor spraying device used in a mask repair device that forms a patterned film such as a carbonized film at the white spot defect location of a mask or reticle by ion beam irradiation and compound vapor spraying, a cylindrical shape for storing a compound is used. an eggplant container, a compound storage hole and a compound vapor guide hole provided in the container, a thin tube-shaped nozzle formed in the container and connected to the compound vapor guide hole, and the compound storage hole and the compound vapor guide hole. A valve body for opening or closing communication with a nozzle, a holding body for holding the container, a driving body provided on the holding body for operating the valve body, and the container. A compound for a mask repair device, comprising: a heater provided on the outer periphery of the container; and a heat guide member provided on the outer periphery of the container between the vicinity of the tip of the container and the holder. Steam blowing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149957U JPS6166352U (en) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149957U JPS6166352U (en) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166352U true JPS6166352U (en) | 1986-05-07 |
Family
ID=30708121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149957U Pending JPS6166352U (en) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166352U (en) |
-
1984
- 1984-10-03 JP JP1984149957U patent/JPS6166352U/ja active Pending