JPS61126255U - - Google Patents
Info
- Publication number
- JPS61126255U JPS61126255U JP1984149956U JP14995684U JPS61126255U JP S61126255 U JPS61126255 U JP S61126255U JP 1984149956 U JP1984149956 U JP 1984149956U JP 14995684 U JP14995684 U JP 14995684U JP S61126255 U JPS61126255 U JP S61126255U
- Authority
- JP
- Japan
- Prior art keywords
- compound
- compound vapor
- container
- nozzle
- guide hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 19
- 238000005507 spraying Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 235000002597 Solanum melongena Nutrition 0.000 claims 1
- 244000061458 Solanum melongena Species 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案にかかるマスクリペア装置用化
合物蒸気吹付け装置の全体図、第２図はイオンビ
ーム、マスクおよび化合物蒸気吹付け装置の位置
関係を示す図、第３図は化合物蒸気の吹付け位置
決めの方法を説明するための参考図。第４図ａ，
ｂ，ｃ，ｄは本考案のマスクリペア装置用化合物
蒸気吹付け装置の実施例を示す図、第５図は従来
の化合物蒸気吹付け装置の断面図である。
１……化合物、２……容器、３……化合物蒸気
案内孔、４……プランジヤー、５……ロツド、６
……駆動体、７……ヒーター、８……ノズル、９
……熱電対、１０……弁受け、１１……保持体、
１２……真空容器、１３……Ｏリング、１４……
フイードスルー、１５……イオンビーム、１６…
…化合物蒸気吹付け装置のノズル近傍、１７……
化合物分子、１８……パターン膜形成位置、１９
……位置決め治具、２０……検出棒、２１……検
出棒２０の先端、２２……位置決め治具１９の先
端、２３……領域。
Fig. 1 is an overall view of the compound vapor spraying device for mask repair equipment according to the present invention, Fig. 2 is a diagram showing the positional relationship of the ion beam, mask, and compound vapor spraying device, and Fig. 3 is a diagram showing the positional relationship of the compound vapor spraying device for mask repair equipment. A reference diagram for explaining the mounting positioning method. Figure 4a,
b, c, and d are views showing an embodiment of the compound vapor spraying device for a mask repair device of the present invention, and FIG. 5 is a sectional view of a conventional compound vapor spraying device. DESCRIPTION OF SYMBOLS 1... Compound, 2... Container, 3... Compound vapor guide hole, 4... Plunger, 5... Rod, 6
...Driver, 7...Heater, 8...Nozzle, 9
... thermocouple, 10 ... valve holder, 11 ... holding body,
12...Vacuum container, 13...O ring, 14...
Feed through, 15...Ion beam, 16...
...Near the nozzle of the compound vapor spraying device, 17...
Compound molecule, 18...Pattern film formation position, 19
... positioning jig, 20 ... detection rod, 21 ... tip of detection rod 20, 22 ... tip of positioning jig 19, 23 ... area.
補正 昭６１．２．２７
図面の簡単な説明を次のように補正する。
明細書第１１頁第１１行目の「参考」を削除し
ます。Amendment February 27, 1981 The brief description of the drawing is amended as follows. Delete "Reference" on page 11, line 11 of the statement.
Claims (1)
ビーム照射および化合物蒸気吹付けによつて炭化
膜等のパターン膜を形成させるマスクリペア装置
に用いる化合物蒸気吹付け装置において、化合物
を収納するための筒状をなす容器と、前記容器内
に設けられた化合物収納孔および化合物蒸気案内
孔と、前記容器内に形成されると共に前記化合物
蒸気案内孔に連結された細管状のノズルと、前記
化合物収納孔と前記ノズルとの連絡を開状態また
は閉状態とするためのバルブ体と、前記容器を保
持するための保持体と、前記バルブ体を作動させ
るために前記保持体に設けられた駆動体と、前記
容器の外周に設けられたヒーターと、前記ノズル
の上部に先端を尖状にした針金状の検出棒を装着
して、前記検出棒の尖状先端に前記イオンビーム
を照射し、二次荷電粒子を測定することによつて
化合物蒸気の吹付け位置をモニターできる様な構
造としたことを特徴とするマスクリペア装置用化
合物蒸気吹付け装置。 In a compound vapor spraying device used in a mask repair device that forms a patterned film such as a carbonized film at the white spot defect location of a mask or reticle by ion beam irradiation and compound vapor spraying, a cylindrical shape for storing a compound is used. an eggplant container, a compound storage hole and a compound vapor guide hole provided in the container, a thin tube-shaped nozzle formed in the container and connected to the compound vapor guide hole, and the compound storage hole and the compound vapor guide hole. A valve body for opening or closing communication with a nozzle, a holding body for holding the container, a driving body provided on the holding body for operating the valve body, and the container. A heater provided on the outer periphery of the nozzle and a wire-shaped detection rod with a pointed tip are attached to the top of the nozzle, and the ion beam is irradiated to the pointed tip of the detection rod to generate secondary charged particles. A compound vapor spraying device for a mask repair device, characterized in that it has a structure that allows the spraying position of the compound vapor to be monitored by measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149956U JPS61126255U (en) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149956U JPS61126255U (en) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61126255U true JPS61126255U (en) | 1986-08-08 |
Family
ID=30708120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149956U Pending JPS61126255U (en) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61126255U (en) |
-
1984
- 1984-10-03 JP JP1984149956U patent/JPS61126255U/ja active Pending