JPS6166350U - - Google Patents

Info

Publication number
JPS6166350U
JPS6166350U JP1984149955U JP14995584U JPS6166350U JP S6166350 U JPS6166350 U JP S6166350U JP 1984149955 U JP1984149955 U JP 1984149955U JP 14995584 U JP14995584 U JP 14995584U JP S6166350 U JPS6166350 U JP S6166350U
Authority
JP
Japan
Prior art keywords
compound vapor
compound
container
mask repair
repair device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984149955U
Other languages
English (en)
Japanese (ja)
Other versions
JPS646505Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149955U priority Critical patent/JPS646505Y2/ja
Publication of JPS6166350U publication Critical patent/JPS6166350U/ja
Application granted granted Critical
Publication of JPS646505Y2 publication Critical patent/JPS646505Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984149955U 1984-10-03 1984-10-03 Expired JPS646505Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149955U JPS646505Y2 (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149955U JPS646505Y2 (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (2)

Publication Number Publication Date
JPS6166350U true JPS6166350U (enrdf_load_stackoverflow) 1986-05-07
JPS646505Y2 JPS646505Y2 (enrdf_load_stackoverflow) 1989-02-20

Family

ID=30708119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149955U Expired JPS646505Y2 (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS646505Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS646505Y2 (enrdf_load_stackoverflow) 1989-02-20

Similar Documents

Publication Publication Date Title
JPS6166350U (enrdf_load_stackoverflow)
JPS6169269U (enrdf_load_stackoverflow)
JPS6166347U (enrdf_load_stackoverflow)
JPS61126255U (enrdf_load_stackoverflow)
JPS6433149U (enrdf_load_stackoverflow)
JPS6166935U (enrdf_load_stackoverflow)
JPH0297744U (enrdf_load_stackoverflow)
JPS6240897U (enrdf_load_stackoverflow)
JPS614349U (ja) 反射電子検出器を具備する電子顕微鏡
JPS6348200U (enrdf_load_stackoverflow)
JPS6091268U (ja) スプレ−ガン
JPS5985688U (ja) レ−ザ溶接用ノズル装置
JPS6326999U (enrdf_load_stackoverflow)
JPH03107881U (enrdf_load_stackoverflow)
JPS62120316U (enrdf_load_stackoverflow)
JPS6259168U (enrdf_load_stackoverflow)
JPS6327010U (enrdf_load_stackoverflow)
JPS60113367U (ja) 蒸着用坩堝
JPS62158752U (enrdf_load_stackoverflow)
JPS6437067U (enrdf_load_stackoverflow)
JPH0353816U (enrdf_load_stackoverflow)
JPH0436211U (enrdf_load_stackoverflow)
JPS6387759U (enrdf_load_stackoverflow)
JPH0481145U (enrdf_load_stackoverflow)
JPH02110318U (enrdf_load_stackoverflow)