JPS646505Y2 - - Google Patents
Info
- Publication number
- JPS646505Y2 JPS646505Y2 JP1984149955U JP14995584U JPS646505Y2 JP S646505 Y2 JPS646505 Y2 JP S646505Y2 JP 1984149955 U JP1984149955 U JP 1984149955U JP 14995584 U JP14995584 U JP 14995584U JP S646505 Y2 JPS646505 Y2 JP S646505Y2
- Authority
- JP
- Japan
- Prior art keywords
- compound
- compound vapor
- container
- heater
- mask repair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000001875 compounds Chemical class 0.000 claims description 67
- 238000005507 spraying Methods 0.000 claims description 24
- 238000010884 ion-beam technique Methods 0.000 claims description 12
- 230000007547 defect Effects 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229940125904 compound 1 Drugs 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149955U JPS646505Y2 (enrdf_load_stackoverflow) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149955U JPS646505Y2 (enrdf_load_stackoverflow) | 1984-10-03 | 1984-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166350U JPS6166350U (enrdf_load_stackoverflow) | 1986-05-07 |
| JPS646505Y2 true JPS646505Y2 (enrdf_load_stackoverflow) | 1989-02-20 |
Family
ID=30708119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149955U Expired JPS646505Y2 (enrdf_load_stackoverflow) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646505Y2 (enrdf_load_stackoverflow) |
-
1984
- 1984-10-03 JP JP1984149955U patent/JPS646505Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6166350U (enrdf_load_stackoverflow) | 1986-05-07 |
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