DE2954658C2 - - Google Patents
Info
- Publication number
- DE2954658C2 DE2954658C2 DE19792954658 DE2954658A DE2954658C2 DE 2954658 C2 DE2954658 C2 DE 2954658C2 DE 19792954658 DE19792954658 DE 19792954658 DE 2954658 A DE2954658 A DE 2954658A DE 2954658 C2 DE2954658 C2 DE 2954658C2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- metal
- posts
- deposited
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 40
- 239000002184 metal Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 18
- 238000002844 melting Methods 0.000 claims description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000003801 milling Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 238000003486 chemical etching Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 16
- 239000011888 foil Substances 0.000 description 12
- 238000001556 precipitation Methods 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 239000011148 porous material Substances 0.000 description 4
- 239000003870 refractory metal Substances 0.000 description 4
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 2
- 229910001863 barium hydroxide Inorganic materials 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052614 beryl Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/28—Dispenser-type cathodes, e.g. L-cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Solid Thermionic Cathode (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US96486778A | 1978-11-30 | 1978-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2954658C2 true DE2954658C2 (enrdf_load_stackoverflow) | 1991-01-17 |
Family
ID=25509102
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792954658 Expired - Lifetime DE2954658C2 (enrdf_load_stackoverflow) | 1978-11-30 | 1979-11-28 | |
| DE19792947919 Granted DE2947919A1 (de) | 1978-11-30 | 1979-11-28 | Vorratskathode, verfahren zu ihrer herstellung sowie pille dafuer |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19792947919 Granted DE2947919A1 (de) | 1978-11-30 | 1979-11-28 | Vorratskathode, verfahren zu ihrer herstellung sowie pille dafuer |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5576538A (enrdf_load_stackoverflow) |
| CA (1) | CA1150763A (enrdf_load_stackoverflow) |
| DE (2) | DE2954658C2 (enrdf_load_stackoverflow) |
| GB (2) | GB2043991B (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56118242A (en) * | 1980-02-23 | 1981-09-17 | New Japan Radio Co Ltd | Thermion emission cathode |
| JPS56130057A (en) * | 1980-03-18 | 1981-10-12 | Matsushita Electric Ind Co Ltd | Hot cathode |
| JPS587740A (ja) * | 1981-06-30 | 1983-01-17 | インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン | カソード用の電子放出層を形成する方法 |
| DE3374738D1 (en) * | 1982-10-12 | 1988-01-07 | Hughes Aircraft Co | Method for fabricating a dispenser-reservoir housing for a dispenser cathode |
| DE4114856A1 (de) * | 1991-05-07 | 1992-11-12 | Licentia Gmbh | Vorratskathode und verfahren zu deren herstellung |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4101800A (en) * | 1977-07-06 | 1978-07-18 | The United States Of America As Represented By The Secretary Of The Navy | Controlled-porosity dispenser cathode |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2881512A (en) * | 1954-06-16 | 1959-04-14 | Cie Generale De Telegraphite S | Composition for sintered barium cathodes |
| DE1071849B (enrdf_load_stackoverflow) * | 1955-02-05 | 1959-12-24 | ||
| BE550302A (enrdf_load_stackoverflow) * | 1955-08-15 | |||
| US2874077A (en) * | 1957-10-23 | 1959-02-17 | Rauland Corp | Thermionic cathodes |
| US3159461A (en) * | 1958-10-20 | 1964-12-01 | Bell Telephone Labor Inc | Thermionic cathode |
| NL108689C (enrdf_load_stackoverflow) * | 1959-01-23 | 1900-01-01 | ||
| US3243638A (en) * | 1962-10-31 | 1966-03-29 | Gen Electric | Dispenser cathode |
| DE2010479C3 (de) * | 1970-03-05 | 1973-11-22 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Metallkapillar Kathode mit gegen Luftfeuchtigkeit geschütztem porösem Emissionsstofftrager |
-
1979
- 1979-11-20 GB GB7940153A patent/GB2043991B/en not_active Expired
- 1979-11-20 GB GB8210616A patent/GB2100502B/en not_active Expired
- 1979-11-21 CA CA000340306A patent/CA1150763A/en not_active Expired
- 1979-11-28 DE DE19792954658 patent/DE2954658C2/de not_active Expired - Lifetime
- 1979-11-28 DE DE19792947919 patent/DE2947919A1/de active Granted
- 1979-11-30 JP JP15449979A patent/JPS5576538A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4101800A (en) * | 1977-07-06 | 1978-07-18 | The United States Of America As Represented By The Secretary Of The Navy | Controlled-porosity dispenser cathode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5576538A (en) | 1980-06-09 |
| DE2947919C2 (enrdf_load_stackoverflow) | 1991-06-20 |
| GB2100502B (en) | 1983-08-03 |
| GB2043991A (en) | 1980-10-08 |
| DE2947919A1 (de) | 1980-06-12 |
| GB2043991B (en) | 1983-05-11 |
| JPH028413B2 (enrdf_load_stackoverflow) | 1990-02-23 |
| GB2100502A (en) | 1982-12-22 |
| CA1150763A (en) | 1983-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| Q172 | Divided out of (supplement): |
Ref document number: 2947919 Ref country code: DE |
|
| 8110 | Request for examination paragraph 44 | ||
| 8128 | New person/name/address of the agent |
Representative=s name: BLUMBACH, P., DIPL.-ING., 6200 WIESBADEN WESER, W. |
|
| AC | Divided out of |
Ref country code: DE Ref document number: 2947919 Format of ref document f/p: P |
|
| D2 | Grant after examination | ||
| AC | Divided out of |
Ref country code: DE Ref document number: 2947919 Format of ref document f/p: P |
|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |