JPH0326960U - - Google Patents

Info

Publication number
JPH0326960U
JPH0326960U JP8824889U JP8824889U JPH0326960U JP H0326960 U JPH0326960 U JP H0326960U JP 8824889 U JP8824889 U JP 8824889U JP 8824889 U JP8824889 U JP 8824889U JP H0326960 U JPH0326960 U JP H0326960U
Authority
JP
Japan
Prior art keywords
case
nozzle
gas introduction
gas
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8824889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0724774Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989088248U priority Critical patent/JPH0724774Y2/ja
Publication of JPH0326960U publication Critical patent/JPH0326960U/ja
Application granted granted Critical
Publication of JPH0724774Y2 publication Critical patent/JPH0724774Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989088248U 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構 Expired - Lifetime JPH0724774Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989088248U JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989088248U JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Publications (2)

Publication Number Publication Date
JPH0326960U true JPH0326960U (enrdf_load_stackoverflow) 1991-03-19
JPH0724774Y2 JPH0724774Y2 (ja) 1995-06-05

Family

ID=31637872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989088248U Expired - Lifetime JPH0724774Y2 (ja) 1989-07-27 1989-07-27 集束イオンビーム装置用ガス導入機構

Country Status (1)

Country Link
JP (1) JPH0724774Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521338Y1 (enrdf_load_stackoverflow) * 1969-02-03 1970-08-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521338Y1 (enrdf_load_stackoverflow) * 1969-02-03 1970-08-25

Also Published As

Publication number Publication date
JPH0724774Y2 (ja) 1995-06-05

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