JPS6166346U - - Google Patents

Info

Publication number
JPS6166346U
JPS6166346U JP1984149951U JP14995184U JPS6166346U JP S6166346 U JPS6166346 U JP S6166346U JP 1984149951 U JP1984149951 U JP 1984149951U JP 14995184 U JP14995184 U JP 14995184U JP S6166346 U JPS6166346 U JP S6166346U
Authority
JP
Japan
Prior art keywords
ion beam
mask
reticle
cassette
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149951U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149951U priority Critical patent/JPS6166346U/ja
Publication of JPS6166346U publication Critical patent/JPS6166346U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984149951U 1984-10-03 1984-10-03 Pending JPS6166346U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149951U JPS6166346U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149951U JPS6166346U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Publications (1)

Publication Number Publication Date
JPS6166346U true JPS6166346U (enrdf_load_stackoverflow) 1986-05-07

Family

ID=30708115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149951U Pending JPS6166346U (enrdf_load_stackoverflow) 1984-10-03 1984-10-03

Country Status (1)

Country Link
JP (1) JPS6166346U (enrdf_load_stackoverflow)

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