JPS61124778A - 真空用バルブのシ−ル方法 - Google Patents

真空用バルブのシ−ル方法

Info

Publication number
JPS61124778A
JPS61124778A JP24434784A JP24434784A JPS61124778A JP S61124778 A JPS61124778 A JP S61124778A JP 24434784 A JP24434784 A JP 24434784A JP 24434784 A JP24434784 A JP 24434784A JP S61124778 A JPS61124778 A JP S61124778A
Authority
JP
Japan
Prior art keywords
annular
bellows
thin plate
mirror
sealing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24434784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474592B2 (enrdf_load_stackoverflow
Inventor
Kenzaburo Sugizaki
憲三郎 杉崎
Mutsuo Onoda
小野田　睦朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Bellows Co Ltd
Fuji Seiko Co Ltd
Original Assignee
Fuji Bellows Co Ltd
Fuji Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Bellows Co Ltd, Fuji Seiko Co Ltd filed Critical Fuji Bellows Co Ltd
Priority to JP24434784A priority Critical patent/JPS61124778A/ja
Publication of JPS61124778A publication Critical patent/JPS61124778A/ja
Publication of JPH0474592B2 publication Critical patent/JPH0474592B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP24434784A 1984-11-21 1984-11-21 真空用バルブのシ−ル方法 Granted JPS61124778A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24434784A JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24434784A JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Publications (2)

Publication Number Publication Date
JPS61124778A true JPS61124778A (ja) 1986-06-12
JPH0474592B2 JPH0474592B2 (enrdf_load_stackoverflow) 1992-11-26

Family

ID=17117345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24434784A Granted JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Country Status (1)

Country Link
JP (1) JPS61124778A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010025257A3 (en) * 2008-08-28 2010-05-20 Applied Materials, Inc. Slotted tssl door to couple o-ring with moving mating part
KR101425811B1 (ko) * 2013-02-15 2014-08-05 (주)시스콤 고속 압력제어와 파티클 발생을 극소화한 구조를 지닌 역압대응 진자식 게이트 밸브

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114065A (en) * 1980-12-29 1982-07-15 Osaka Shinku Kiki Seisakusho:Kk Gate valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114065A (en) * 1980-12-29 1982-07-15 Osaka Shinku Kiki Seisakusho:Kk Gate valve

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010025257A3 (en) * 2008-08-28 2010-05-20 Applied Materials, Inc. Slotted tssl door to couple o-ring with moving mating part
CN102138033A (zh) * 2008-08-28 2011-07-27 应用材料股份有限公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
US8567756B2 (en) 2008-08-28 2013-10-29 Applied Materials, Inc. Slit valve door able to compensate for chamber deflection
CN103939628B (zh) * 2008-08-28 2016-05-18 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
US10453718B2 (en) 2008-08-28 2019-10-22 Applied Materials, Inc. Slit valve door with moving mating part
KR101425811B1 (ko) * 2013-02-15 2014-08-05 (주)시스콤 고속 압력제어와 파티클 발생을 극소화한 구조를 지닌 역압대응 진자식 게이트 밸브

Also Published As

Publication number Publication date
JPH0474592B2 (enrdf_load_stackoverflow) 1992-11-26

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