JPH0474592B2 - - Google Patents

Info

Publication number
JPH0474592B2
JPH0474592B2 JP59244347A JP24434784A JPH0474592B2 JP H0474592 B2 JPH0474592 B2 JP H0474592B2 JP 59244347 A JP59244347 A JP 59244347A JP 24434784 A JP24434784 A JP 24434784A JP H0474592 B2 JPH0474592 B2 JP H0474592B2
Authority
JP
Japan
Prior art keywords
bellows
annular
thin plate
gate valve
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59244347A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61124778A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP24434784A priority Critical patent/JPS61124778A/ja
Publication of JPS61124778A publication Critical patent/JPS61124778A/ja
Publication of JPH0474592B2 publication Critical patent/JPH0474592B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP24434784A 1984-11-21 1984-11-21 真空用バルブのシ−ル方法 Granted JPS61124778A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24434784A JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24434784A JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Publications (2)

Publication Number Publication Date
JPS61124778A JPS61124778A (ja) 1986-06-12
JPH0474592B2 true JPH0474592B2 (enrdf_load_stackoverflow) 1992-11-26

Family

ID=17117345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24434784A Granted JPS61124778A (ja) 1984-11-21 1984-11-21 真空用バルブのシ−ル方法

Country Status (1)

Country Link
JP (1) JPS61124778A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102138033B (zh) * 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
KR101425811B1 (ko) * 2013-02-15 2014-08-05 (주)시스콤 고속 압력제어와 파티클 발생을 극소화한 구조를 지닌 역압대응 진자식 게이트 밸브

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114065A (en) * 1980-12-29 1982-07-15 Osaka Shinku Kiki Seisakusho:Kk Gate valve

Also Published As

Publication number Publication date
JPS61124778A (ja) 1986-06-12

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