JPS6221180Y2 - - Google Patents

Info

Publication number
JPS6221180Y2
JPS6221180Y2 JP19413881U JP19413881U JPS6221180Y2 JP S6221180 Y2 JPS6221180 Y2 JP S6221180Y2 JP 19413881 U JP19413881 U JP 19413881U JP 19413881 U JP19413881 U JP 19413881U JP S6221180 Y2 JPS6221180 Y2 JP S6221180Y2
Authority
JP
Japan
Prior art keywords
gate valve
annular
valve
bellows
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19413881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58102879U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19413881U priority Critical patent/JPS58102879U/ja
Publication of JPS58102879U publication Critical patent/JPS58102879U/ja
Application granted granted Critical
Publication of JPS6221180Y2 publication Critical patent/JPS6221180Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP19413881U 1981-12-30 1981-12-30 真空用ゲ−トバルブ Granted JPS58102879U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19413881U JPS58102879U (ja) 1981-12-30 1981-12-30 真空用ゲ−トバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19413881U JPS58102879U (ja) 1981-12-30 1981-12-30 真空用ゲ−トバルブ

Publications (2)

Publication Number Publication Date
JPS58102879U JPS58102879U (ja) 1983-07-13
JPS6221180Y2 true JPS6221180Y2 (enrdf_load_stackoverflow) 1987-05-29

Family

ID=30107466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19413881U Granted JPS58102879U (ja) 1981-12-30 1981-12-30 真空用ゲ−トバルブ

Country Status (1)

Country Link
JP (1) JPS58102879U (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522195B2 (ja) * 2003-09-01 2010-08-11 株式会社アルバック 半導体製造装置用の切換え弁
JP6900348B2 (ja) * 2018-05-23 2021-07-07 株式会社鷺宮製作所 溶接構造および弁装置
JP7137385B2 (ja) * 2018-07-17 2022-09-14 株式会社荏原製作所 ゲートバルブ
JP7324018B2 (ja) * 2019-03-19 2023-08-09 株式会社鷺宮製作所 溶接構造

Also Published As

Publication number Publication date
JPS58102879U (ja) 1983-07-13

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