JPS6112396B2 - - Google Patents
Info
- Publication number
- JPS6112396B2 JPS6112396B2 JP51161007A JP16100776A JPS6112396B2 JP S6112396 B2 JPS6112396 B2 JP S6112396B2 JP 51161007 A JP51161007 A JP 51161007A JP 16100776 A JP16100776 A JP 16100776A JP S6112396 B2 JPS6112396 B2 JP S6112396B2
- Authority
- JP
- Japan
- Prior art keywords
- floating gate
- voltage
- injector
- gate
- semiconductor memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007667 floating Methods 0.000 claims description 39
- 239000003990 capacitor Substances 0.000 claims description 22
- 238000002347 injection Methods 0.000 claims description 20
- 239000007924 injection Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 230000005684 electric field Effects 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 4
- 210000004027 cell Anatomy 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000007334 memory performance Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 210000000352 storage cell Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0705—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type
- H01L27/0727—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors
- H01L27/0733—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common comprising components of the field effect type in combination with diodes, or capacitors or resistors in combination with capacitors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7886—Hot carrier produced by avalanche breakdown of a PN junction, e.g. FAMOS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/60—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the control gate being a doped region, e.g. single-poly memory cell
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/644,982 US4037242A (en) | 1975-12-29 | 1975-12-29 | Dual injector, floating gate MOS electrically alterable, non-volatile semiconductor memory device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5283074A JPS5283074A (en) | 1977-07-11 |
| JPS6112396B2 true JPS6112396B2 (ko) | 1986-04-08 |
Family
ID=24587168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16100776A Granted JPS5283074A (en) | 1975-12-29 | 1976-12-27 | Semiconductor memory |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4037242A (ko) |
| JP (1) | JPS5283074A (ko) |
| CA (1) | CA1095171A (ko) |
| DE (1) | DE2659296A1 (ko) |
| FR (1) | FR2337403A1 (ko) |
| GB (1) | GB1530717A (ko) |
| NL (1) | NL7614537A (ko) |
Families Citing this family (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2368784A1 (fr) * | 1976-10-20 | 1978-05-19 | Texas Instruments France | Cellule de memoire a grille flottante a double injection |
| GB1575741A (en) * | 1977-01-17 | 1980-09-24 | Philips Electronic Associated | Integrated circuits |
| JPS5931990B2 (ja) * | 1977-04-30 | 1984-08-06 | 株式会社東芝 | 不揮発性メモリ素子 |
| US4132904A (en) * | 1977-07-28 | 1979-01-02 | Hughes Aircraft Company | Volatile/non-volatile logic latch circuit |
| US4128773A (en) * | 1977-11-07 | 1978-12-05 | Hughes Aircraft Company | Volatile/non-volatile logic latch circuit |
| US4305083A (en) * | 1978-09-19 | 1981-12-08 | Texas Instruments Incorporated | Single junction charge injector floating gate memory cell |
| US4274012A (en) * | 1979-01-24 | 1981-06-16 | Xicor, Inc. | Substrate coupled floating gate memory cell |
| US4314265A (en) * | 1979-01-24 | 1982-02-02 | Xicor, Inc. | Dense nonvolatile electrically-alterable memory devices with four layer electrodes |
| FR2510260A1 (fr) * | 1981-07-24 | 1983-01-28 | Suisse Fond Rech Microtech | Dispositif semiconducteur sensible aux ions |
| DE3141390A1 (de) * | 1981-10-19 | 1983-04-28 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Floating-gate-speicherzelle, bei der das schreiben und loeschen durch injektion heisser ladungstraeger erfolgt |
| US4432075A (en) * | 1981-12-04 | 1984-02-14 | Hebrew University Of Jerusalem | Electrically programmable non-volatile memory |
| DE3275790D1 (en) * | 1982-09-15 | 1987-04-23 | Itt Ind Gmbh Deutsche | Cmos memory cell with floating memory gate |
| JPS59155968A (ja) * | 1983-02-25 | 1984-09-05 | Toshiba Corp | 半導体記憶装置 |
| JPS59161873A (ja) * | 1983-03-07 | 1984-09-12 | Agency Of Ind Science & Technol | 半導体不揮発性メモリ |
| EP0215064A1 (en) * | 1985-03-08 | 1987-03-25 | Ncr Corporation | Floating gate nonvolatile field effect memory device |
| IT1199828B (it) * | 1986-12-22 | 1989-01-05 | Sgs Microelettronica Spa | Cella di memoria eeprom a singolo livello di polisilicio scrivibile e cancellabile bit a bit |
| USRE37308E1 (en) * | 1986-12-22 | 2001-08-07 | Stmicroelectronics S.R.L. | EEPROM memory cell with a single level of polysilicon programmable and erasable bit by bit |
| US4924278A (en) * | 1987-06-19 | 1990-05-08 | Advanced Micro Devices, Inc. | EEPROM using a merged source and control gate |
| JP2705106B2 (ja) * | 1988-05-25 | 1998-01-26 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| US5216269A (en) * | 1989-03-31 | 1993-06-01 | U.S. Philips Corp. | Electrically-programmable semiconductor memories with buried injector region |
| DE4020007C2 (de) * | 1989-06-22 | 1994-09-29 | Nippon Telegraph & Telephone | Nichtflüchtiger Speicher |
| US5060195A (en) * | 1989-12-29 | 1991-10-22 | Texas Instruments Incorporated | Hot electron programmable, tunnel electron erasable contactless EEPROM |
| US5640346A (en) * | 1992-03-03 | 1997-06-17 | Harris Corporation | Electrically programmable memory cell |
| US5780341A (en) * | 1996-12-06 | 1998-07-14 | Halo Lsi Design & Device Technology, Inc. | Low voltage EEPROM/NVRAM transistors and making method |
| US5889704A (en) * | 1997-02-26 | 1999-03-30 | Lucent Technologies Inc. | Load and leave memory cell |
| US6404006B2 (en) | 1998-12-01 | 2002-06-11 | Vantis Corporation | EEPROM cell with tunneling across entire separated channels |
| US6214666B1 (en) | 1998-12-18 | 2001-04-10 | Vantis Corporation | Method of forming a non-volatile memory device |
| US6232631B1 (en) | 1998-12-21 | 2001-05-15 | Vantis Corporation | Floating gate memory cell structure with programming mechanism outside the read path |
| US6282123B1 (en) | 1998-12-21 | 2001-08-28 | Lattice Semiconductor Corporation | Method of fabricating, programming, and erasing a dual pocket two sided program/erase non-volatile memory cell |
| US6294810B1 (en) | 1998-12-22 | 2001-09-25 | Vantis Corporation | EEPROM cell with tunneling at separate edge and channel regions |
| US6294809B1 (en) | 1998-12-28 | 2001-09-25 | Vantis Corporation | Avalanche programmed floating gate memory cell structure with program element in polysilicon |
| US6215700B1 (en) | 1999-01-07 | 2001-04-10 | Vantis Corporation | PMOS avalanche programmed floating gate memory cell structure |
| US6294811B1 (en) | 1999-02-05 | 2001-09-25 | Vantis Corporation | Two transistor EEPROM cell |
| US20040021170A1 (en) * | 1999-03-24 | 2004-02-05 | Caywood John M. | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
| US6534816B1 (en) | 1999-03-24 | 2003-03-18 | John M. Caywood | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
| US6384451B1 (en) | 1999-03-24 | 2002-05-07 | John Caywood | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
| US6326663B1 (en) * | 1999-03-26 | 2001-12-04 | Vantis Corporation | Avalanche injection EEPROM memory cell with P-type control gate |
| US6172392B1 (en) * | 1999-03-29 | 2001-01-09 | Vantis Corporation | Boron doped silicon capacitor plate |
| US6424000B1 (en) | 1999-05-11 | 2002-07-23 | Vantis Corporation | Floating gate memory apparatus and method for selected programming thereof |
| US6583012B1 (en) | 2001-02-13 | 2003-06-24 | Advanced Micro Devices, Inc. | Semiconductor devices utilizing differently composed metal-based in-laid gate electrodes |
| US20040206999A1 (en) * | 2002-05-09 | 2004-10-21 | Impinj, Inc., A Delaware Corporation | Metal dielectric semiconductor floating gate variable capacitor |
| US6909389B1 (en) | 2002-06-14 | 2005-06-21 | Impinj, Inc. | Method and apparatus for calibration of an array of scaled electronic circuit elements |
| US7257033B2 (en) * | 2005-03-17 | 2007-08-14 | Impinj, Inc. | Inverter non-volatile memory cell and array system |
| US7715236B2 (en) * | 2005-03-30 | 2010-05-11 | Virage Logic Corporation | Fault tolerant non volatile memories and methods |
| US7679957B2 (en) * | 2005-03-31 | 2010-03-16 | Virage Logic Corporation | Redundant non-volatile memory cell |
| JP4622902B2 (ja) * | 2006-03-17 | 2011-02-02 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
| US7719896B1 (en) | 2007-04-24 | 2010-05-18 | Virage Logic Corporation | Configurable single bit/dual bits memory |
| US7920423B1 (en) | 2007-07-31 | 2011-04-05 | Synopsys, Inc. | Non volatile memory circuit with tailored reliability |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3886583A (en) * | 1971-07-01 | 1975-05-27 | Motorola Inc | Insulated gate-field-effect transistor |
| US3740731A (en) * | 1971-08-02 | 1973-06-19 | Texas Instruments Inc | One transistor dynamic memory cell |
| US3882469A (en) * | 1971-11-30 | 1975-05-06 | Texas Instruments Inc | Non-volatile variable threshold memory cell |
| US3868187A (en) * | 1972-08-31 | 1975-02-25 | Tokyo Shibaura Electric Co | Avalanche injection type mos memory |
| US3893146A (en) * | 1973-12-26 | 1975-07-01 | Teletype Corp | Semiconductor capacitor structure and memory cell, and method of making |
-
1975
- 1975-12-29 US US05/644,982 patent/US4037242A/en not_active Expired - Lifetime
-
1976
- 1976-11-29 CA CA266,827A patent/CA1095171A/en not_active Expired
- 1976-12-10 GB GB51704/76A patent/GB1530717A/en not_active Expired
- 1976-12-27 JP JP16100776A patent/JPS5283074A/ja active Granted
- 1976-12-29 FR FR7639467A patent/FR2337403A1/fr active Granted
- 1976-12-29 NL NL7614537A patent/NL7614537A/xx not_active Application Discontinuation
- 1976-12-29 DE DE19762659296 patent/DE2659296A1/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| FR2337403B1 (ko) | 1983-02-04 |
| JPS5283074A (en) | 1977-07-11 |
| DE2659296A1 (de) | 1977-07-07 |
| GB1530717A (en) | 1978-11-01 |
| CA1095171A (en) | 1981-02-03 |
| FR2337403A1 (fr) | 1977-07-29 |
| US4037242A (en) | 1977-07-19 |
| NL7614537A (nl) | 1977-07-01 |
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