JPS61117391U - - Google Patents

Info

Publication number
JPS61117391U
JPS61117391U JP1985000912U JP91285U JPS61117391U JP S61117391 U JPS61117391 U JP S61117391U JP 1985000912 U JP1985000912 U JP 1985000912U JP 91285 U JP91285 U JP 91285U JP S61117391 U JPS61117391 U JP S61117391U
Authority
JP
Japan
Prior art keywords
laser
laser processing
objective lens
processing apparatus
supply port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985000912U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985000912U priority Critical patent/JPS61117391U/ja
Publication of JPS61117391U publication Critical patent/JPS61117391U/ja
Pending legal-status Critical Current

Links

JP1985000912U 1985-01-10 1985-01-10 Pending JPS61117391U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985000912U JPS61117391U (enExample) 1985-01-10 1985-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985000912U JPS61117391U (enExample) 1985-01-10 1985-01-10

Publications (1)

Publication Number Publication Date
JPS61117391U true JPS61117391U (enExample) 1986-07-24

Family

ID=30473176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985000912U Pending JPS61117391U (enExample) 1985-01-10 1985-01-10

Country Status (1)

Country Link
JP (1) JPS61117391U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128391A (en) * 1979-03-28 1980-10-04 Hitachi Ltd Laser working method
JPS56151191A (en) * 1980-04-25 1981-11-24 Hitachi Ltd Method and apparatus for working by laser beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128391A (en) * 1979-03-28 1980-10-04 Hitachi Ltd Laser working method
JPS56151191A (en) * 1980-04-25 1981-11-24 Hitachi Ltd Method and apparatus for working by laser beam

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