JPS61110301A - Magnetic recording system - Google Patents

Magnetic recording system

Info

Publication number
JPS61110301A
JPS61110301A JP59230074A JP23007484A JPS61110301A JP S61110301 A JPS61110301 A JP S61110301A JP 59230074 A JP59230074 A JP 59230074A JP 23007484 A JP23007484 A JP 23007484A JP S61110301 A JPS61110301 A JP S61110301A
Authority
JP
Japan
Prior art keywords
magnetic recording
thin film
layer
recording medium
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59230074A
Other languages
Japanese (ja)
Inventor
Michio Yamaura
山浦 道雄
Toshiaki Yatabe
俊明 谷田部
Hiroshi Matsuzawa
松沢 博志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP59230074A priority Critical patent/JPS61110301A/en
Publication of JPS61110301A publication Critical patent/JPS61110301A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Recording Or Reproducing By Magnetic Means (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain superior durability by combining a thin film type magnetic recording medium which is provided with a CoO protective film with a magnetic recording head made of Al2O3.TiC. CONSTITUTION:A vertical magnetic recording medium 10 is formed as a floppy disk by laminating a metallic thin-film layer 12 having high magnetic permeability 12 and a vertical magnetic recording layer 13 made of an alloy thin film of Co.Cr successively on both surfaces of a base 11, and furhter laminating a protective layer 14 of CoO thereupon. A vertical magnetic recording head 20, on the other hand, has a main magnetic pole 21 of a 'Permalloy(R)' thin film supported in a ferrite core 22 and also wound with an exciting coil 23, and is further provided with a slider part 24 made of high-hardness fine Al2 O3.TiC on a surface where the medium 10 slides. Those medium 10 and heat 20 are used in combination to realize a magnetic recording and reproducing system for the thin-film type durable magnetic recording medium.

Description

【発明の詳細な説明】 [利用分野] 本発明は強磁性金属を主成分とする金属薄膜よりなる記
録層を有する薄膜型の磁気記録媒体に磁気記録再生を記
録再生する方式に関したものであり、更に評しくは長期
使用にわたって安定した磁気記録再生を可能とした新し
い磁気記録再生方式%式% ] 近年高密度記録への要求はますます高くなり、従来のバ
インダーを用いた塗布型に替わるものとして、磁気記録
層として強磁性金aSSを用いたもの、更には特公昭5
8−91号公報等の如く垂直磁気異方性を有するコバル
ト系合金IIIを用いたもの等金属Illを記録層とし
た薄膜型の磁気記録媒体が提案されている。しかし磁気
記録層としてかかる金属薄膜を用いた場合には、磁気記
録ヘッドとの摩擦抵抗が大きいために摩耗や員傷を受け
やすく耐久性に欠けるという難点がある。
[Detailed Description of the Invention] [Field of Application] The present invention relates to a method for recording and reproducing magnetic recording on a thin film type magnetic recording medium having a recording layer made of a metal thin film containing a ferromagnetic metal as a main component. , and more importantly, a new magnetic recording and reproducing method that enables stable magnetic recording and reproducing over long periods of use.] In recent years, the demand for high-density recording has become higher and higher, and there is an alternative to the conventional coating type that uses binders. , those using ferromagnetic gold aSS as the magnetic recording layer, and furthermore,
A thin film type magnetic recording medium having a recording layer made of a metal Ill, such as one using a cobalt-based alloy III having perpendicular magnetic anisotropy, has been proposed as in Japanese Patent No. 8-91. However, when such a metal thin film is used as the magnetic recording layer, there is a drawback that the frictional resistance with the magnetic recording head is large, making it susceptible to wear and tear and lacking in durability.

このため従来より強磁性金fluW!A上に更に保護層
として有!Ia分子、高硬度金属、セラミックス等を設
けたものが種々提案されている。
For this reason, ferromagnetic gold fluW! There is an additional protective layer on top of A! Various materials have been proposed that include Ia molecules, high-hardness metals, ceramics, and the like.

しかしこれら薄膜型の磁気記録媒体の耐摩耗性、即ち磁
気ヘッド上を繰返し走行させた時の磁気記録媒体の寿命
は従来の塗布型の磁気記録媒体にくらべて劣り、実用上
未だ充分ではない状態で、ある。
However, the wear resistance of these thin-film magnetic recording media, that is, the lifespan of the magnetic recording media when repeatedly run on a magnetic head, is inferior to that of conventional coating-type magnetic recording media, and is still insufficient for practical use. So, there it is.

また、磁気記録ヘッドとしては、従来の塗布型の磁気記
録媒体用として、記録媒体と摺動する面をチタン酸バリ
ウム等で構成したものが知られているが、これらは記録
再生の摺動において、媒体に傷を付けず、ヘッド摺動面
自体も摩耗しないもので、耐久性に優れたものが使われ
ている。
Furthermore, magnetic recording heads for conventional coating-type magnetic recording media are known in which the surface that slides on the recording medium is made of barium titanate, etc., but these , which do not damage the media, do not wear out the head sliding surface itself, and are highly durable.

しかし、前記の薄膜型の磁気記録媒体は、潤滑剤等をし
み込ませて耐久性を上げている前述の塗布型媒体とは異
って記録層が潤滑剤がしみ込まない薄膜金msからなる
ので、磁気記録ヘッドは記録媒体との摺動により、損傷
を受けやすく、またこの損傷により逆に記録媒体にも傷
が発生しゃすく耐久性に乏しいという欠点があった。
However, unlike the above-mentioned coated media, which is impregnated with lubricant to improve durability, the thin film type magnetic recording medium has a recording layer made of a thin film of gold that cannot be impregnated with lubricant. The magnetic recording head is easily damaged by sliding with the recording medium, and this damage is also likely to cause scratches on the recording medium, resulting in poor durability.

[発明の目的] 本発明はかかる現状に鑑みなされたもので、耐久性に優
れた強磁性金属を主成分とする金属薄膜よりなる記録層
を有する薄膜型の磁気記録媒体に情報を記録再生する磁
気記録再生方式を目的としたものである。
[Object of the Invention] The present invention was made in view of the current situation, and is a method for recording and reproducing information on a thin-film magnetic recording medium having a recording layer made of a metal thin film whose main component is a highly durable ferromagnetic metal. It is intended for magnetic recording and reproducing methods.

[発明の構成9作用] すなわち本発明は磁気記録媒体としては基体上に鉄、コ
バルト、ニッケル等の金属あるいはこれらの合金からな
る強磁性金属薄膜層を、垂直磁気異方性を有するコバル
ト系合金薄膜等からなる垂直記録用の金nHII!層を
、または鉄、パーマロイ。
[Structure 9 of the Invention] That is, the present invention provides a magnetic recording medium having a ferromagnetic metal thin film layer made of metals such as iron, cobalt, nickel, or alloys thereof on a substrate, and a cobalt-based alloy having perpendicular magnetic anisotropy. Gold nHII for perpendicular recording made of thin film, etc.! layers, or iron, permalloy.

コバルト・ニオブ・ジルコン合金等の高透磁率を有する
金属層に続けてその上にIyJ述の垂直記録用の金R薄
膜層を順次形成したもの等の薄膜型の磁気記録媒体にお
いて、該金属薄膜層上にCoOよりなるコバルト酸化物
像IIIを設けたものを用いる。
In a thin film type magnetic recording medium such as one in which a gold R thin film layer for perpendicular recording as described in IyJ is sequentially formed on a metal layer having high magnetic permeability such as a cobalt-niobium-zircon alloy, the metal thin film A layer on which a cobalt oxide image III made of CoO is provided is used.

ここで、CoOよりなるコバルト酸化物像vJWIとし
ては、好ましくは透明!ill、更に好ましくは磁性層
に(111)面配向している場合Cある。
Here, the cobalt oxide image vJWI made of CoO is preferably transparent! more preferably, the magnetic layer has (111) plane orientation.

コバルト酸化物のCoOはコバルト金属をターゲット、
蒸発源として酸化性ガス雰囲気下でスパッタリング法、
真空蒸着法等により形成される。
CoO of cobalt oxide targets cobalt metal,
Sputtering method under oxidizing gas atmosphere as evaporation source,
It is formed by a vacuum evaporation method or the like.

コバルト酸化物であるCoOの分析はオージェ電子分光
法(AES)、X線回折法(DX)が用いられた。
Auger electron spectroscopy (AES) and X-ray diffraction (DX) were used to analyze CoO, which is a cobalt oxide.

そして、磁気記録ヘッドとしては磁気記録媒体との摺動
面をなすスライダ一部を高硬度(ビッカース硬度190
0〜2300) 、緻密なチタンカーバイド含有アルミ
ナセラミックス(AlI30s  ・TiC:アルミナ
・チタンカーバイド)で構成したものを用い、前述のC
oOのコバルト酸化物保護層を設けた18I型の磁気記
録媒体と組合せて記録再生するものである。
As a magnetic recording head, a part of the slider that forms the sliding surface with the magnetic recording medium is made of high hardness (Vickers hardness 190).
0 to 2300), made of dense titanium carbide-containing alumina ceramics (AlI30s TiC: alumina titanium carbide), and
Recording and reproduction are performed in combination with an 18I type magnetic recording medium provided with an oO cobalt oxide protective layer.

本発明は、強磁性の金属薄膜よりなる磁気記録層の上に
CoOのコバルト酸化物保護層を設けた磁気記録媒体と
、アルミナチタンカーバイトで磁橿を挾んだ磁気記録ヘ
ッドとの組合せではじめて非常に耐久性のある薄膜型の
磁気記録媒体の磁気記録再生方式を実現したものである
The present invention combines a magnetic recording medium in which a CoO cobalt oxide protective layer is provided on a magnetic recording layer made of a ferromagnetic metal thin film, and a magnetic recording head in which a magnetic rod is sandwiched between alumina titanium carbide. This was the first to realize a highly durable magnetic recording and reproducing system for thin-film magnetic recording media.

以下に本発明の実施例を示す。Examples of the present invention are shown below.

第1図は本発明の垂直記録方式での一構成例を示すもの
で、10はフロッピーディスク用のフレキシブル両面型
の垂直磁気記録媒体、20は公知の主磁極励磁型の垂直
磁気記録ヘッドである。垂直磁気記録媒体10は、厚さ
50μTnのポリエチレンテレフタレートフィルムを基
体11とし、その両面に0.4μ風のニッケル鉄合金よ
りなる高透磁率金属111層12と、0.4μ711の
コバルト・クロム(クロム: 20wt%)の合金薄膜
よりなる垂直磁気記録層13とを特開昭57−1006
27号公報と同様の対向ターゲット式スパッタ法で順次
積層し、更にその上にコバルト金属をターゲットとし酸
化性ガス雰囲気下の公知の反応性スパッタリング法で3
00人のコバルト酸化物CoOの保護層14を積層した
ものを、直径5.25インチに打ち抜いてフロッピーデ
ィスクとしたものである。
FIG. 1 shows an example of the configuration of the perpendicular recording system of the present invention, in which 10 is a flexible double-sided perpendicular magnetic recording medium for a floppy disk, and 20 is a known main pole excitation type perpendicular magnetic recording head. . The perpendicular magnetic recording medium 10 has a base 11 made of a polyethylene terephthalate film with a thickness of 50μTn, and on both sides thereof a high magnetic permeability metal 111 layer 12 made of a 0.4μ nickel iron alloy and a cobalt chromium (chromium) with a thickness of 0.4μ711. : 20wt%) perpendicular magnetic recording layer 13 made of an alloy thin film according to Japanese Patent Application Laid-Open No. 57-1006.
The layers were sequentially laminated using the same facing target sputtering method as in Publication No. 27, and then 3 layers were further layered using the known reactive sputtering method in an oxidizing gas atmosphere using cobalt metal as a target.
A floppy disk was made by punching out a protective layer 14 made of cobalt oxide (CoO) to a diameter of 5.25 inches.

一方!l!直磁気記録ヘッド20は、幅300μ風、厚
さ1μmのパーマロイにニッケル・鉄)薄膜の主磁極2
1をマンガン・ジンクフェライトコア22で支持すると
共に、励磁コイル23で巻き、更に主磁極21の先端部
を挾んで媒体と摺動する面にアルミナ・チタンカーバイ
トからなるスライダ一部24を設けている(実施例)。
on the other hand! l! The direct magnetic recording head 20 has a main magnetic pole 2 made of a thin film of permalloy (nickel/iron) with a width of 300 μm and a thickness of 1 μm.
1 is supported by a manganese-zinc ferrite core 22 and wound with an excitation coil 23, and furthermore, a slider part 24 made of alumina-titanium carbide is provided on the surface that grips the tip of the main magnetic pole 21 and slides on the medium. (Example)

またスライダ一部24の表面は50mRの曲率に研磨さ
れている。
Further, the surface of the slider portion 24 is polished to a curvature of 50 mR.

比較例としてf!直磁気記録媒体として実施例と同じ構
成で保護層のみないもの、ヘッドとして実施例と同じ構
成でスライダ一部24の材質にオプチカルガラス(BK
7)、チタン酸バリウムを用いたものを作成し、実施例
と共に耐久性評価を行なった。
As a comparative example, f! The direct magnetic recording medium has the same configuration as in the example, but only without the protective layer, and the head has the same configuration as in the example, but the slider part 24 is made of optical glass (BK).
7) A product using barium titanate was prepared and its durability was evaluated along with the examples.

耐久性評価は、評価するヘッドをセットしたディスクド
ライブに評価する媒体をセットし、300rp+++で
1000万バス回転させる摺動テストの前後の媒体及び
ヘッドの表面の粗れ具合で行なった。具体的には媒体に
ついては摺動テスト前後の表面性を表面粗さ計(SUR
FCOM、東京精密■製)を用いて中心線平均粗さくC
LA)として求め、溜動俊のCLA値を囮動面のCLA
値で除算した相対的表面粗さにより、一方ヘッドについ
ては摺動テスト後のスライダ一部の表面を前記表面粗さ
計を用いて測定しその最大摩耗深さを求めて行った。得
られた結果を次頁の表に示す。
Durability evaluation was performed by checking the roughness of the surface of the medium and head before and after a sliding test in which the medium to be evaluated was set in a disk drive with the head to be evaluated and rotated 10 million times at 300 rpm +++. Specifically, the surface roughness of the media before and after the sliding test was measured using a surface roughness meter (SUR).
Center line average roughness C using FCOM, manufactured by Tokyo Seimitsu ■
LA), and the CLA value of Tameishun is calculated as the CLA of the decoy surface.
On the other hand, for the head, the surface of a portion of the slider after the sliding test was measured using the surface roughness meter, and the maximum wear depth was determined using the relative surface roughness divided by the value. The results obtained are shown in the table on the next page.

表から明らかの様に、本発明のコバルト酸化物CoOに
よる媒体の保護層とヘッドのスライダ一部にアルミナ・
チタンカーバイトを用いた組合せが媒体の表面粗さの変
化がなく、ヘッドのスライダ一部にも傷がなく、100
0万パスの摺動テストでは殆んど劣化がなく、比較例の
いづれに比しても最良の結果であり、高い耐久性を示し
た。
As is clear from the table, the protective layer of the medium made of cobalt oxide CoO of the present invention and the part of the slider of the head are covered with alumina.
The combination using titanium carbide does not change the surface roughness of the media, there is no scratch on the slider part of the head, and it is 100%
There was almost no deterioration in the 00,000-pass sliding test, which was the best result compared to any of the comparative examples, and showed high durability.

尚、本発明はその趣旨からいって、実施例に示したフロ
ッピーディスク及び垂直磁気記録媒体。
Incidentally, the present invention covers the floppy disk and perpendicular magnetic recording medium shown in the examples.

垂直ヘッドを用いた垂直磁気記録方式に何等限定される
ものではなぐ、アルミナ酸化処理をしたアルミディスク
等所謂ハードディスク、l!1気テープへの適用、鉄、
コバルト、ニッケル等強磁性金属薄膜層よりなる面内磁
気記録用媒体とリングヘッドとを組み合せた面内磁気記
録方式にも適用出来る事は云うまでもない。
It is not limited to the perpendicular magnetic recording method using a perpendicular head, and so-called hard disks such as aluminum disks treated with alumina oxidation, l! Application to 1-ki tape, iron,
Needless to say, the present invention can also be applied to a longitudinal magnetic recording system that combines a ring head with a longitudinal magnetic recording medium made of a thin film layer of a ferromagnetic metal such as cobalt or nickel.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一つの構成例の説明図である。 10:フレキシブル垂直磁気ディスク、20:垂直磁気
記録ヘッド、 11 : 1体、12:高透磁率金属薄
層、 13:コバルト・クロム金11層、 14:CoOの保護層、21:主磁極、22:コ ア、
  23:励磁コイル、24ニスライダ一部
FIG. 1 is an explanatory diagram of one configuration example of the present invention. 10: Flexible perpendicular magnetic disk, 20: Perpendicular magnetic recording head, 11: 1 body, 12: High magnetic permeability metal thin layer, 13: Cobalt-chromium gold 11 layer, 14: CoO protective layer, 21: Main pole, 22 : core,
23: Excitation coil, part of 24 Nislider

Claims (1)

【特許請求の範囲】 1)基体上に強磁性金属薄膜よりなる記録層を形成し、
該記録層上にCoOよりなるコバルト酸化物保護層を設
けた磁気記録媒体と、摺動する面がチタンカーバイド含
有アルミナセラミックスで構成された磁気記録ヘッドを
用いて、磁気記録再生を行う事を特徴とする磁気記録方
式。 2)前記記録層が垂直磁気記録層である特許請求の範囲
第1項記載の磁気記録方式。 3)前記垂直磁気記録層がコバルト−クロムを主成分と
する合金薄膜よりなる特許請求の範囲第2項記載の磁気
記録方式。
[Claims] 1) forming a recording layer made of a ferromagnetic metal thin film on a substrate;
It is characterized by performing magnetic recording and reproducing using a magnetic recording medium having a cobalt oxide protective layer made of CoO on the recording layer and a magnetic recording head whose sliding surface is made of alumina ceramics containing titanium carbide. A magnetic recording method. 2) The magnetic recording system according to claim 1, wherein the recording layer is a perpendicular magnetic recording layer. 3) The magnetic recording system according to claim 2, wherein the perpendicular magnetic recording layer is made of an alloy thin film containing cobalt-chromium as a main component.
JP59230074A 1984-11-02 1984-11-02 Magnetic recording system Pending JPS61110301A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59230074A JPS61110301A (en) 1984-11-02 1984-11-02 Magnetic recording system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59230074A JPS61110301A (en) 1984-11-02 1984-11-02 Magnetic recording system

Publications (1)

Publication Number Publication Date
JPS61110301A true JPS61110301A (en) 1986-05-28

Family

ID=16902134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59230074A Pending JPS61110301A (en) 1984-11-02 1984-11-02 Magnetic recording system

Country Status (1)

Country Link
JP (1) JPS61110301A (en)

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