JPH06325355A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH06325355A
JPH06325355A JP5111470A JP11147093A JPH06325355A JP H06325355 A JPH06325355 A JP H06325355A JP 5111470 A JP5111470 A JP 5111470A JP 11147093 A JP11147093 A JP 11147093A JP H06325355 A JPH06325355 A JP H06325355A
Authority
JP
Japan
Prior art keywords
film
magnetic
recording medium
substrate
ferrite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5111470A
Other languages
Japanese (ja)
Inventor
Masamichi Tagami
勝通 田上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5111470A priority Critical patent/JPH06325355A/en
Publication of JPH06325355A publication Critical patent/JPH06325355A/en
Pending legal-status Critical Current

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  • Paints Or Removers (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain such a recording medium having low noise without deterioration in recording characteristics and having same wear-resistant characteristics as a conventional protective film by forming a metal magnetic thin film on a substrate and further forming a gamma-Fe2O3 film containing Co or a Ba ferrite magnetic film having almost save coercive force as that of the metal magnetic thin film. CONSTITUTION:An Al alloy substrate 1 coated with a Ni-P film having mirror surface is used, on which a Cr-base coating film 2 is formed by sputtering in an Ar gas, for example, to 0.1mum thickness. Then a Co-Cr-Pt metal magnetic film 3 is formed to 0.04mum thickness on the Cr-base film by using a Co80-Cr15-Pt10 alloy target. Further, a SiO2 film as a nonmagnetic layer is formed to 0.01mum thickness on the film 3. A magnetic film 4 is formed to 0.02mum thickness on the nonmagnetic layer by using a target essentially comprising Fe2O3 containing Co and Cu in argon gas. This recording medium is annealed in air. The obtd. sample shows 1900 and 2100 Oe coercive force of the Co-Cr-Pt film and the gamma-Fe2O3 film, respectively, and the squareness ratio of the gamma-Fe2O3 film is 0.85.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ディスク装置等に
使用される磁気記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium used in a magnetic disk device or the like.

【0002】[0002]

【従来の技術】磁気ディスク装置に使われている磁気デ
ィスク媒体の記録薄膜には、金属磁性膜およびフェライ
ト媒体が使われている。これらの記録膜には、磁気ヘッ
ドとの接触による摩擦摩耗から記録膜を保護するため
に、図4のごとく基体1上に下地膜2を介して形成され
た金属磁性膜3上に保護膜5が形成されている。保護膜
には、カーボン系、SiO2 などの酸化物系などが使わ
れている。
2. Description of the Related Art Metal magnetic films and ferrite media are used as recording thin films of magnetic disk media used in magnetic disk devices. In order to protect these recording films from frictional wear due to contact with the magnetic head, a protective film 5 is formed on the metal magnetic film 3 formed on the substrate 1 via the underlayer film 2 as shown in FIG. Are formed. The protective film is made of carbon or oxide such as SiO 2 .

【0003】また、特開昭60−239917号公報に
は、耐摩耗性を改善するためCo系垂直磁化膜上に、N
iフェライト、Ni−Znフェライト、Mn−Znフェ
ライトが形成された垂直磁化記録媒体が提案されてい
る。
Further, in Japanese Laid-Open Patent Publication No. 60-239917, in order to improve wear resistance, a Co-based perpendicular magnetization film is coated with N.
Perpendicular magnetization recording media on which i-ferrite, Ni-Zn ferrite, and Mn-Zn ferrite are formed have been proposed.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、保護膜
は記録膜を保護する反面、ヘッドと媒体とのスペーシン
グとなり、高密度記録特性を劣化させる問題点があっ
た。特に高密度特性を達成するためには、カーボン等の
保護膜を薄くしなければならないが、磁気ヘッド等の摺
動に対する耐久性が劣化する問題があった。
However, while the protective film protects the recording film, it causes a spacing between the head and the medium, which causes a problem that the high density recording characteristic is deteriorated. In particular, in order to achieve high density characteristics, it is necessary to thin the protective film of carbon or the like, but there is a problem that durability against sliding of a magnetic head or the like deteriorates.

【0005】また、特開昭60−239917号公報で
は、Co系合金の垂直磁化膜上にNiフェライト、Ni
−Znフェライト、Mn−Znフェライトを形成し、垂
直磁化記録体の耐摩耗性を改善している。しかしなが
ら、Niフェライト、Ni−Znフェライト、Mn−Z
nフェライトは磁気ヘッド材料として使用されているほ
ど保磁力が小さく、このまま記録すると軟磁性のフェラ
イト膜がヘッド磁場の分解能を劣化させ、また記録磁化
として軟磁性フェライト膜では大きなジグザグ磁区が発
生しノイズも増大するという大きな問題があった。
Further, in Japanese Patent Laid-Open No. 60-239917, Ni ferrite and Ni are formed on a perpendicularly magnetized film of Co-based alloy.
-Zn ferrite and Mn-Zn ferrite are formed to improve the wear resistance of the perpendicular magnetization recording material. However, Ni ferrite, Ni-Zn ferrite, Mn-Z
The n-ferrite has a smaller coercive force as it is used as a magnetic head material, and if it is recorded as it is, the soft magnetic ferrite film deteriorates the resolution of the head magnetic field, and a large zigzag magnetic domain is generated in the soft magnetic ferrite film as the recording magnetization to cause noise. There was a big problem that it also increased.

【0006】本発明の目的は、このような問題を解決し
た磁気記録媒体を提供することにある。
An object of the present invention is to provide a magnetic recording medium that solves such problems.

【0007】[0007]

【課題を解決するための手段】本発明の磁気記録媒体
は、基体上に金属磁性薄膜が形成され、前記金属薄膜上
にCo元素およびその他の元素を含有したγ−Fe2
3 膜もしくはBaフェライト磁性膜が形成された構造を
有する。
In the magnetic recording medium of the present invention, a metal magnetic thin film is formed on a substrate, and γ-Fe 2 O containing Co element and other elements is contained on the metal thin film.
It has a structure in which three films or a Ba ferrite magnetic film are formed.

【0008】また、さらに基体上に金属磁性薄膜が形成
され、前記金属磁性薄膜上に非磁性中間層が形成され、
さらに前記非磁性中間層上にCo元素およびその他の元
素を含有したγ−Fe2 3 膜もしくはBaフェライト
磁性膜が形成された構造を有する。
Further, a metal magnetic thin film is further formed on the substrate, and a non-magnetic intermediate layer is formed on the metal magnetic thin film,
Furthermore, it has a structure in which a γ-Fe 2 O 3 film containing a Co element and other elements or a Ba ferrite magnetic film is formed on the non-magnetic intermediate layer.

【0009】[0009]

【実施例】以下に図面を参照して本発明の実施例を説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図1は、本発明の一例の磁気記録媒体の断
面図を示す。基体1上に下地膜2が形成され、さらに金
属磁性膜3上にCo元素を含有したγ−Fe2 3 膜も
しくはBaフェライト磁性膜4が形成されている。
FIG. 1 is a sectional view of a magnetic recording medium according to an example of the present invention. A base film 2 is formed on a substrate 1, and a γ-Fe 2 O 3 film containing a Co element or a Ba ferrite magnetic film 4 is further formed on a metal magnetic film 3.

【0011】本発明に係わる基体1には、Ni−P被覆
アルミ合金、ガラス、カーボン、セラミック等を用いる
ことができる。下地膜2としてCrを主成分とした合金
膜、非磁性酸化物、窒化物を用いることができる。下地
膜2はなくともよい。金属磁性膜3には、Co−Cr−
Ta系、Co−Cr−Pt系、Co−Ni−Cr系強磁
性合金、もしくはこれらに添加物を加えたものを用いる
ことができる。フェライト磁性膜4には、Co含有γ−
Fe2 3 膜、さらにOsなどのその他金属元素を含有
したγ−Fe2 3 膜およびBaフェライト磁性薄膜を
用いることができる。
For the substrate 1 according to the present invention, Ni-P coated aluminum alloy, glass, carbon, ceramics or the like can be used. As the base film 2, an alloy film containing Cr as a main component, a nonmagnetic oxide, or a nitride can be used. The base film 2 may be omitted. The metal magnetic film 3 has Co-Cr-
It is possible to use Ta-based, Co-Cr-Pt-based, Co-Ni-Cr-based ferromagnetic alloys, or those to which additives are added. The ferrite magnetic film 4 contains Co-containing γ-
An Fe 2 O 3 film, a γ-Fe 2 O 3 film containing another metal element such as Os, and a Ba ferrite magnetic thin film can be used.

【0012】図2は、本発明の他の例の磁気記録媒体の
断面図を示す。基体上に下地膜2が形成され、さらに下
地膜2上の金属磁性膜3が形成され、金属磁性膜3上に
非磁性中間層10が形成され、さらに非磁性中間層10
上にγ−Fe2 3 膜もしくはBaフェライト磁性膜4
が形成されている。非磁性中間層10には、金属酸化膜
もしくはシリコン酸化膜、もしくはシリコン窒化膜を用
いることができる。
FIG. 2 is a sectional view of a magnetic recording medium according to another example of the present invention. The base film 2 is formed on the substrate, the metal magnetic film 3 is further formed on the base film 2, the nonmagnetic intermediate layer 10 is formed on the metal magnetic film 3, and the nonmagnetic intermediate layer 10 is further formed.
Γ-Fe 2 O 3 film or Ba ferrite magnetic film 4 on top
Are formed. A metal oxide film, a silicon oxide film, or a silicon nitride film can be used for the nonmagnetic intermediate layer 10.

【0013】また、γ−Fe2 3 膜もしくはBaフェ
ライト磁性膜上には、潤滑性を付与するため液体潤滑剤
もしくは固体潤滑剤を形成することができる。
A liquid lubricant or a solid lubricant can be formed on the γ-Fe 2 O 3 film or the Ba ferrite magnetic film to impart lubricity.

【0014】以下、具体的な実施例と比較例を示す。Specific examples and comparative examples will be described below.

【0015】(実施例1)実施例1として、基体の鏡面
仕上げNi−P被覆アルミ合金の基板を用い、基板上に
アルゴンガス中でのスパッタによりCr下地膜を0.1
μm形成した。Co80−Cr15−Pt10の合金タ
ーゲットを用い、Cr下地膜上にCo−Cr−Pt膜を
0.04μm形成した。さらにCo−Cr−Pt膜上に
Co(2.5wt%)およびCu(2wt%)含有のマ
グネタイト(Fe3 4 )を主成分とするターゲットを
用い、アルゴンガスを用いCo,Cu含有のマグネタイ
ト(Fe3 4 )を主成分とする磁性膜を0.02μm
形成した。この時のCoCrPt膜およびマグネタイト
膜の保磁力は、それぞれ1700Oeおよび300Oe
であった。この媒体を大気中、290℃で1時間アニー
ルを行った。これを試料Aとする。試料AのCo−Cr
−Pt膜およびフェライト膜の保磁力は、それぞれ20
00Oeおよび1800Oeであり、アニールすること
によりそれぞれ保磁力が増大した。γ−Fe2 3 膜の
角形比は0.70であった。
(Example 1) As Example 1, a mirror-finished Ni-P-coated aluminum alloy substrate was used as a substrate, and a Cr underlayer of 0.1 was formed on the substrate by sputtering in argon gas.
μm formed. A Co80-Cr15-Pt10 alloy target was used to form a Co-Cr-Pt film on the Cr underlayer in a thickness of 0.04 [mu] m. Further, a target containing Co (2.5 wt%) and Cu (2 wt%)-containing magnetite (Fe 3 O 4 ) as a main component was used on the Co-Cr-Pt film, and argon and Co-containing Cu and magnetite were used. The magnetic film containing (Fe 3 O 4 ) as the main component is 0.02 μm.
Formed. At this time, the coercive forces of the CoCrPt film and the magnetite film are 1700 Oe and 300 Oe, respectively.
Met. This medium was annealed in air at 290 ° C. for 1 hour. This is designated as Sample A. Co-Cr of sample A
The coercive force of each of the -Pt film and the ferrite film is 20
It was 00 Oe and 1800 Oe, and the coercive force increased by annealing. The squareness ratio of the γ-Fe 2 O 3 film was 0.70.

【0016】(実施例2)実施例2として、実施例1と
同様に、基体に鏡面仕上げNi−P被覆アルミ合金の基
板を用い、基板上にアルゴンガス中でのスパッタにより
Cr下地膜を0.1μm形成した。Co80−Cr15
−Pt10の合金ターゲットを用い、Cr下地膜上にC
o−Cr−Pt膜を0.04μm形成した。さらにCo
−Cr−Pt膜上に非磁性層としてSiO2 膜を0.0
1μm形成した。非磁性層上に、実施例1と同様にCo
(2.5wt%)およびCu(2wt%)含有のマグネ
タイト(Fe3 4 )を主成分とするターゲットを用
い、アルゴンガスを用いCo,Cu含有のマグネタイト
(Fe3 4 )を主成分とする磁性膜を0.02μm形
成した。この時のCo−Cr−Pt膜およびマグネタイ
ト膜の保磁力は、それぞれ1700Oeおよび310O
eであった。この媒体を大気中、290℃で1時間アニ
ールを行った。これを試料Bとする。試料BのCo−C
r−Pt膜およびγ−Fe2 3 膜の保磁力は、それぞ
れ1900Oeおよび2100Oeであり、アニールす
ることによりそれぞれ保磁力が増大した。γ−Fe2
3 膜の角形比は0.85であり、非磁性中間層を形成す
ることによりさらにγ−Fe2 3膜の角形比を向上で
きた。
(Embodiment 2) As Embodiment 2, as in Embodiment 1, a substrate of a mirror-finished Ni-P-coated aluminum alloy is used as a substrate, and a Cr underlayer of 0 is formed on the substrate by sputtering in argon gas. .1 μm was formed. Co80-Cr15
Using a Pt10 alloy target, C on the Cr underlayer
An o-Cr-Pt film was formed with a thickness of 0.04 μm. Further Co
A SiO 2 film as a non-magnetic layer is formed on the —Cr—Pt film by 0.0
1 μm was formed. Co on the non-magnetic layer as in Example 1.
(2.5 wt%) and Cu (2 wt%)-containing magnetite (Fe 3 O 4 ) as a main component, and argon gas is used as a main component of Co and Cu-containing magnetite (Fe 3 O 4 ). To form a magnetic film of 0.02 μm. At this time, the coercive forces of the Co—Cr—Pt film and the magnetite film are 1700 Oe and 310 O, respectively.
It was e. This medium was annealed in air at 290 ° C. for 1 hour. This is designated as Sample B. Sample B Co-C
The coercive forces of the r-Pt film and the γ-Fe 2 O 3 film were 1900 Oe and 2100 Oe, respectively, and the coercive force increased by annealing. γ-Fe 2 O
The squareness ratio of the three films was 0.85, and the squareness ratio of the γ-Fe 2 O 3 film could be further improved by forming the non-magnetic intermediate layer.

【0017】(比較例1)比較例1として、実施例と同
様に基体に鏡面仕上げNi−P被覆アルミ合金の基板を
用い、基板上にアルゴンガス中でのスパッタによりCr
下地膜を0.1μm形成した。Co80−Cr15−P
t10の合金ターゲットを用い、Cr下地膜上にCo−
Cr−Pt膜を0.04μm形成した。さらにCo−C
r−Pt膜上に従来法と同じように、カーボン保護膜を
なるべくスペーシング損失をなくすために、スパッタに
より0.02μm形成した。これを試料Cとする。
(Comparative Example 1) As Comparative Example 1, a mirror-finished Ni-P-coated aluminum alloy substrate was used as a substrate in the same manner as in Example 1, and Cr was sputtered on the substrate in argon gas.
A base film having a thickness of 0.1 μm was formed. Co80-Cr15-P
Using an alloy target of t10, Co-
A Cr-Pt film was formed with a thickness of 0.04 μm. Further Co-C
As in the conventional method, a carbon protective film was formed on the r-Pt film to a thickness of 0.02 μm by sputtering in order to eliminate spacing loss as much as possible. This is designated as Sample C.

【0018】(比較例2)比較例2として、実施例と同
様に基体に鏡面仕上げNi−P被覆アルミ合金の基板を
用い、基板上にアルゴンガス中でのスパッタによりCr
下地膜を0.1μm形成した。Co80−Cr15−P
t10の合金ターゲットを用い、Cr下地膜上にCo−
Cr−Pt膜を0.04μm形成した。さらにCo−C
r−Pt膜上にMn−Znフェライトを、スパッタによ
り0.02μm形成した。これを試料Dとする。
(Comparative Example 2) As Comparative Example 2, a mirror-finished Ni-P-coated aluminum alloy substrate was used as the substrate as in the example, and Cr was sputtered on the substrate in argon gas.
A base film having a thickness of 0.1 μm was formed. Co80-Cr15-P
Using an alloy target of t10, Co-
A Cr-Pt film was formed with a thickness of 0.04 μm. Further Co-C
Mn-Zn ferrite was formed on the r-Pt film to a thickness of 0.02 μm by sputtering. This is designated as Sample D.

【0019】上記の試料A,B,C,Dにそれぞれフッ
素系潤滑剤を塗布し、2レール型薄膜ヘッドナノスライ
ダーでCSS(コンタクト・スタート・ストップ)試験
および記録再生試験を行った。記録再生試験条件は、ヘ
ッド浮上量が0.1μm、ヘッドのギャップ長0.2μ
mのものを用いた。
A fluorine-based lubricant was applied to each of the above samples A, B, C and D, and a CSS (contact start / stop) test and a recording / reproducing test were conducted using a 2-rail type thin film head nanoslider. The recording / reproducing test conditions were that the head flying height was 0.1 μm and the head gap length was 0.2 μm.
m was used.

【0020】図3は、試料A,B,C,Dの記録再生特
性を比較する図である。横軸は記録密度(KFRPI)
を、縦軸は相対出力を示す。また、表1は、試料A,
B,C,DをCSSし、傷が観測されるまでの回数を示
した結果を示す。
FIG. 3 is a diagram comparing the recording / reproducing characteristics of the samples A, B, C, and D. Recording density (KFRPI) on the horizontal axis
And the vertical axis represents relative output. In addition, Table 1 shows sample A,
The results showing the number of times until scratches are observed by CSS of B, C and D are shown.

【0021】[0021]

【表1】 [Table 1]

【0022】図3より、分かるように本発明の記録媒体
は、従来媒体より出力および記録密度とも優れている。
また、表1からも明らかなように耐久性も従来媒体とほ
ぼ同じ耐久性を有する。
As can be seen from FIG. 3, the recording medium of the present invention is superior in output and recording density to the conventional medium.
Further, as is clear from Table 1, the durability is almost the same as that of the conventional medium.

【0023】[0023]

【発明の効果】本発明によれば、基体上に金属磁性薄膜
が形成し、さらに金属磁性薄膜上に金属磁性薄膜と同程
度の保磁力を有するCoを含有したγ−Fe2 3 膜も
しくはBaフェライト磁性膜を形成することにより、低
ノイズで記録特性を劣化させず、耐摩耗性も従来の保護
膜と同等の特性が得られる。
According to the present invention, a metal magnetic thin film is formed on a substrate, and a γ-Fe 2 O 3 film containing Co having a coercive force similar to that of the metal magnetic thin film is formed on the metal magnetic thin film. By forming the Ba ferrite magnetic film, it is possible to obtain the same characteristics as the conventional protective film with low noise and without degrading the recording characteristics.

【0024】また本発明によれば、基体上に金属磁性膜
を形成し、この金属磁性膜上に非磁性中間層を形成する
ことにより、Coを含有したγ−Fe2 3 膜もしくは
Baフェライト磁性膜の熱処理過程において磁気特性を
向上させることができる。
Further, according to the present invention, a γ-Fe 2 O 3 film containing Co or Ba ferrite is formed by forming a metal magnetic film on a substrate and forming a non-magnetic intermediate layer on the metal magnetic film. The magnetic characteristics can be improved in the heat treatment process of the magnetic film.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例の磁気記録媒体の断面図であ
る。
FIG. 1 is a sectional view of a magnetic recording medium according to an embodiment of the present invention.

【図2】本発明の他の実施例の磁気記録媒体の断面図で
ある。
FIG. 2 is a sectional view of a magnetic recording medium of another embodiment of the present invention.

【図3】実施例の試料A,B,Cの記録再生特性を比較
する図である。
FIG. 3 is a diagram comparing recording / reproducing characteristics of samples A, B, and C of an example.

【図4】従来の磁気記録媒体の断面図である。FIG. 4 is a sectional view of a conventional magnetic recording medium.

【符号の説明】[Explanation of symbols]

1 基体 2 下地膜 3 金属磁性膜 4 フェライト磁性膜 5 保護膜 10 非磁性中間層 1 Base 2 Underlayer 3 Metal Magnetic Film 4 Ferrite Magnetic Film 5 Protective Film 10 Non-Magnetic Intermediate Layer

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】基体上に金属磁性薄膜が形成され、前記金
属薄膜上にCo元素およびその他の元素を含有したγ−
Fe2 3 膜もしくはBaフェライト磁性膜が形成され
ていることを特徴とする磁気記録媒体。
1. A γ-containing metal magnetic thin film formed on a substrate and containing Co element and other elements on the metal thin film.
A magnetic recording medium having an Fe 2 O 3 film or a Ba ferrite magnetic film formed thereon.
【請求項2】基体上に金属磁性薄膜が形成され、前記金
属磁性薄膜上に非磁性中間層が形成され、さらに前記非
磁性中間層上にCo元素およびその他の元素を含有した
γ−Fe2 3 膜もしくはBaフェライト磁性膜が形成
されていることを特徴とする磁気記録媒体。
2. A metal magnetic thin film is formed on a substrate, a nonmagnetic intermediate layer is formed on the metal magnetic thin film, and γ-Fe 2 containing Co element and other elements is further formed on the nonmagnetic intermediate layer. A magnetic recording medium having an O 3 film or a Ba ferrite magnetic film formed thereon.
【請求項3】前記非磁性中間層が、金属酸化膜もしくは
シリコン酸化膜、もしくはシリコン窒化膜であることを
特徴とする請求項2記載の磁気記録媒体。
3. The magnetic recording medium according to claim 2, wherein the non-magnetic intermediate layer is a metal oxide film, a silicon oxide film, or a silicon nitride film.
【請求項4】前記金属磁性膜の下地膜としてCrを主成
分とした合金膜を用いていることを特徴とする請求項
1,2または3記載の磁気記録媒体。
4. The magnetic recording medium according to claim 1, wherein an alloy film containing Cr as a main component is used as a base film of the metal magnetic film.
JP5111470A 1993-05-13 1993-05-13 Magnetic recording medium Pending JPH06325355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5111470A JPH06325355A (en) 1993-05-13 1993-05-13 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5111470A JPH06325355A (en) 1993-05-13 1993-05-13 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH06325355A true JPH06325355A (en) 1994-11-25

Family

ID=14562067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5111470A Pending JPH06325355A (en) 1993-05-13 1993-05-13 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH06325355A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5759617A (en) * 1996-05-20 1998-06-02 Fujitsu Limited Production process for a hard disk magnetic recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160028A (en) * 1984-01-31 1985-08-21 Mitsubishi Metal Corp Vertically magnetized recording body

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160028A (en) * 1984-01-31 1985-08-21 Mitsubishi Metal Corp Vertically magnetized recording body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5759617A (en) * 1996-05-20 1998-06-02 Fujitsu Limited Production process for a hard disk magnetic recording medium

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