JPS61267911A - Magnetic recording and reproducing system - Google Patents

Magnetic recording and reproducing system

Info

Publication number
JPS61267911A
JPS61267911A JP10925585A JP10925585A JPS61267911A JP S61267911 A JPS61267911 A JP S61267911A JP 10925585 A JP10925585 A JP 10925585A JP 10925585 A JP10925585 A JP 10925585A JP S61267911 A JPS61267911 A JP S61267911A
Authority
JP
Japan
Prior art keywords
magnetic recording
film
thin film
recording medium
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10925585A
Other languages
Japanese (ja)
Inventor
Michio Yamaura
山浦 道雄
Hiroshi Matsuzawa
松沢 博志
Toshiaki Yatabe
俊明 谷田部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP10925585A priority Critical patent/JPS61267911A/en
Publication of JPS61267911A publication Critical patent/JPS61267911A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3186Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes parallel to the gap plane, e.g. "vertical head structure"

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To obtain a durable magnetic recording and reproducing device by combining a recording medium of a ferromagnetic metallic thin film on a substrate with a magnetic recording head formed with a ceramic polycrystalline sintered body contg. Si and having a sliding surface of 1,000-2,000 Vickers hardness. CONSTITUTION:A high-permeability thin film 12 of an Ni-Fe alloy having about 0.4mum thickness and a vertical magnetic recording layer 13 of a Cr alloy contg. 20wt% Co are successively deposited by sputtering on both surfaces of a film 11 of an org. resin and a Co3O4 film 14 is further laminated by reactive sputtering in an oxidizing gas with Co as the target. Besides, a vertical magnetic recording head 20 is formed by supporting a main pole 21 of 'Permalloy(R)' film with an Mn.Zn ferrite core 22, winding an exciting coil 23 and providing a slider 24 of SiC.ErO2, etc., of 1,500-2,000 Vickers hardness on the sliding surface with the medium with the tip of the main pole 21 in between. Magnetic recording and reproduction can be stably carried out by this constitution for a long period.

Description

【発明の詳細な説明】 〔利用分野〕 本発明は強磁性金属を主成分とする金鋼薄膜よりなる記
録層を有する薄膜型の磁気記録媒体Km気記録情報を記
録再生する方式KI$Ilしたものであり、更に詳しく
は長期便用にわたって安定した磁気記録再生な可能とし
た新しい磁気記録再生方式に関するものである。
[Detailed Description of the Invention] [Field of Application] The present invention relates to a method for recording and reproducing recorded information on a thin-film magnetic recording medium having a recording layer made of a thin film of gold steel whose main component is a ferromagnetic metal. More specifically, the present invention relates to a new magnetic recording and reproducing method that enables stable magnetic recording and reproducing over a long period of use.

〔従来技術〕[Prior art]

近年高密度記録への要求はますます高くなり、従来のバ
インダーを用いた塗布盤に替わるものとして、磁気記録
層として強磁性金属薄膜を用いたもの、“更゛には特公
昭5g=91号公報等の如(垂直磁気異方性を有するフ
バルト系合金薄膜を用いたもの等金属薄膜な記録層とし
た薄膜型の磁気記録媒体が提案されている。しかし磁気
記録層としてかかる金属薄膜を用いた場合には、磁気記
録ヘッドとの摩擦抵抗が大きいために摩耗や損傷を受け
やすく耐久性に欠けるという難点がある。
In recent years, the demand for high-density recording has become higher and higher, and as an alternative to the conventional coater using a binder, a method using a ferromagnetic metal thin film as the magnetic recording layer was introduced, ``For further improvement'', Japanese Patent Publication No. 5g = 91 was published. Thin-film magnetic recording media with a thin metal recording layer, such as those using a Huvard alloy thin film having perpendicular magnetic anisotropy, have been proposed, as shown in publications. If it is, the frictional resistance with the magnetic recording head is large, making it susceptible to wear and damage and lacking in durability.

このため従来より強磁性金属薄膜上に更に保護層として
有機高分子、高硬度金属、セラミックス等を設けたもの
が種々提案されている。
For this reason, various proposals have been made in the past in which organic polymers, high-hardness metals, ceramics, etc. are further provided as protective layers on ferromagnetic metal thin films.

しかしこれら薄膜型の磁気記録媒体の耐摩耗性、即ち磁
気ヘッド上を繰返し走行させた時の磁気記録媒体の寿命
は従来の塗布型の磁気記録媒体にくらべて劣り、実用上
未だ充分ではない状態である。
However, the wear resistance of these thin-film magnetic recording media, that is, the lifespan of the magnetic recording media when repeatedly run on a magnetic head, is inferior to that of conventional coating-type magnetic recording media, and is still insufficient for practical use. It is.

また、磁気記録ヘッドとしては、従来の塗布型の磁気記
録媒体用として、記録媒体と摺動する面をチタン酸バリ
ウム等で構成したものが知られているが、これらは記録
再生の摺動において、媒体に傷を付けず、ヘッド摺動面
自体も摩耗しないもので、耐久性1nだものが使われて
いる。しかし、前記の薄膜型の磁気記録媒体は、潤滑剤
等をしみ込ませて耐久性を上げている的述の塗布型媒体
とは異って記録層が勾滑剤がしみ込まない薄膜金槁層か
らなるので、磁気記録ヘッドは記録媒体との摺動により
、損傷を受けやすく、またこの損傷により逆に記録媒体
にも傷が発生しやすく耐久性に乏しいという欠点があっ
た。
Furthermore, magnetic recording heads for conventional coating-type magnetic recording media are known in which the surface that slides on the recording medium is made of barium titanate, etc., but these , those that do not damage the medium, do not wear out the head sliding surface itself, and have a durability of 1n are used. However, unlike the above-mentioned coated media, which is impregnated with a lubricant or the like to improve durability, the thin film magnetic recording medium has a recording layer made of a thin film layer that does not absorb lubricants. Therefore, the magnetic recording head is easily damaged by sliding with the recording medium, and this damage also tends to cause scratches on the recording medium, resulting in poor durability.

〔発明の目的〕[Purpose of the invention]

本発明はかかる現状に鑑みなされたもので、耐久性に優
れた強磁性金属を主成分とする金lA薄膜よりなる記録
層を有する薄yit、mの磁気記録媒体に情報を記録再
生する磁気記録再生方式を目的としたものである。
The present invention has been made in view of the current situation, and is a magnetic recording medium for recording and reproducing information on a thin magnetic recording medium having a recording layer made of a gold lA thin film mainly composed of a highly durable ferromagnetic metal. It is intended as a playback method.

〔発明の構成・作用〕[Structure and operation of the invention]

すなわち、本発明は基体上に強磁性金属薄膜よりなる記
録層を形成した磁気記録媒体を組合せて、a気ヘッドと
しては、磁気記録媒体との摺動面をなすスライダ一部を
ビッカース硬度が1500〜2000の硅素(Si)を
含む多結晶焼結体のセラミックスで構成されたものを用
い、#磁気記録媒体に記録再生することを特徴とするi
n磁気記録再生方式ある。
That is, the present invention combines a magnetic recording medium in which a recording layer made of a ferromagnetic metal thin film is formed on a substrate, and as an a-air head, a part of the slider that forms the sliding surface with the magnetic recording medium has a Vickers hardness of 1500. #I is characterized in that it is made of a polycrystalline sintered ceramic containing ~2000 silicon (Si) and is used to record and reproduce information on a magnetic recording medium.
There is a magnetic recording and reproducing method.

上述の条件を満足するSiを含む多結晶焼結体のセラミ
ックスとしては具体的にはSi3N4+SiC・8i+
 5IC−ErO,等が掲げられる。
Specifically, Si3N4+SiC・8i+ is a polycrystalline sintered ceramic containing Si that satisfies the above conditions.
5IC-ErO, etc. are listed.

本発明の磁気ヘッドは媒体と摺動する面を上述のセラミ
ックスで構成する以外は伺ら限定されず、通常のリング
ヘッド、後述の実施例に示すような垂直ヘッド、あるい
は薄膜屋ヘッド等全ての磁気ヘッドが適用できる。
The magnetic head of the present invention is not limited in any way other than that the surface that slides on the medium is made of the above-mentioned ceramics, and can be any type of head, such as a normal ring head, a vertical head as shown in the embodiments described later, or a thin-film head. A magnetic head can be applied.

又1本発明の磁気記録媒体としては、強磁性金属薄膜を
記録r−とした薄I!x型磁気記録媒体であれば何ら限
定されないことはその作用から明らかで、面内及び垂直
磁気記録用として公知のもの全てが適用できる。代表的
には基体上に鉄、コバルト、ニッケル等の金属あるいは
これらの合金からなる強磁性金属薄膜層を、垂直磁気異
方性を有するコバルト系合金薄膜等からなる垂直記録用
の金属薄14層をまたは鉄 、(−マロイヤコバルト・
ニオブ・ジルコン合金等の高透磁率を有する金属層に続
けてその上に前述の垂直記録用の金属薄膜層を順次形成
したもの等の淋l11iI型の磁気記録媒体等が挙げら
れる。
In addition, as a magnetic recording medium of the present invention, a thin I! recording layer is made of a ferromagnetic metal thin film. It is clear from its operation that there are no limitations as long as it is an x-type magnetic recording medium, and all known media for longitudinal and perpendicular magnetic recording can be applied. Typically, a ferromagnetic metal thin film layer made of metals such as iron, cobalt, nickel, or alloys thereof is placed on a substrate, and 14 thin metal layers for perpendicular recording made of a cobalt-based alloy thin film having perpendicular magnetic anisotropy are used. or iron, (-maloiya cobalt,
Examples include a magnetic recording medium having a metal layer having high magnetic permeability, such as a niobium-zircon alloy, and then the above-mentioned metal thin film layer for perpendicular recording formed thereon.

なお、好ましくは該金属薄膜層上に保護層を設ける。該
保護層は有機高分子、高硬度金属及び/又はセラミック
ス等よりなり、I!#開昭60−50622号公報等に
記載されている如き従来から種々提案されているものが
含まれる。これらの内好ましいものは金属酸化物であり
、更に好ましいものはコバルト酸化物である。更に一層
好ましくはCGn o、  を主成分とするコバルト酸
化物である。
Note that preferably a protective layer is provided on the metal thin film layer. The protective layer is made of organic polymer, high hardness metal, and/or ceramics, etc., and I! This includes various proposals that have been made in the past, such as those described in JP-A-60-50622 and the like. Among these, metal oxides are preferred, and cobalt oxides are more preferred. Even more preferred is a cobalt oxide whose main component is CGno.

以上の本発明は強磁性の金属薄膜よりなる磁気記録媒体
と摺動する面がSiを含む多結晶焼結体のセラミックス
で構成された磁気ヘッドとの組合せくよりはじめて非常
に耐摩耗性のある薄a凰の磁気記録媒体の磁気記録再生
方式を実現したものである。
The present invention described above can achieve extremely high wear resistance only by combining a magnetic recording medium made of a ferromagnetic metal thin film and a magnetic head whose sliding surface is made of polycrystalline sintered ceramics containing Si. This is a realization of a magnetic recording and reproducing method for a thin a-orange magnetic recording medium.

以下に本発明の実施例を示す。Examples of the present invention are shown below.

第1図は本発明の垂直記録方式での一構成例を示すもの
で、10はフロラビーティスフ用のフレキシブル両面型
の垂直磁気記録媒体。
FIG. 1 shows an example of the configuration of the perpendicular recording system of the present invention, in which numeral 10 denotes a flexible double-sided perpendicular magnetic recording medium for Flora Beatisf.

20は公知の主a1極励a1戯の垂直磁気記録へラドで
ある。垂直磁気記録媒体10は、厚さ50μmのポリエ
チレンテレフタレートフィルムを基体11とし、その両
面KO04μmのニッケル鉄合金よりなる高透a率金属
薄編層12と、I O,4μ、のコバルト・クロム(ク
ロム:20 wtに)の合金薄膜よりなる垂直磁気記録
層13とを特開昭57−100627号公報と同様の対
向ターゲット式スパッタ法で順次積層し、更にその上に
コバルト金属をターゲラの保農層14を積層したものを
、直径5.25インチに打ち抜いてフロッピーディスク
としたものである。
Reference numeral 20 denotes a known perpendicular magnetic recording head with main a1 pole excitation and a1 axis. The perpendicular magnetic recording medium 10 has a base 11 made of a polyethylene terephthalate film with a thickness of 50 μm, and has a thin metal layer 12 of high permeability made of a nickel-iron alloy with a KO of 04 μm on both sides, and a cobalt chromium (chromium) film with an I O of 4 μm. A perpendicular magnetic recording layer 13 consisting of an alloy thin film of 20 wt. 14 was laminated and punched out to a diameter of 5.25 inches to form a floppy disk.

−1垂直磁気記録ヘッド20は1幅300μml厚さ1
μmのパーマロイにッケル、鉄)〜 N′ 薄膜の主磁極21をマンガン・ジンクフエライトフ72
2で支持すると共に、励磁コイル23を巻いたもので、
主磁極21の先端部を挾んで媒体と摺動する面にビッカ
ース硬度が1500〜2000の各種のSiを含む多結
晶体のセラミックス、具体的にはSiC・ErO,(実
施例1 ) * SiC・8i (実施例2 ) + 
5iaN* (実施例3)からなる各種のスライダ一部
24を設けたものを作成し、評価した。なお、スライダ
一部24の表面は50 a+Hの曲率に研磨されている
。又、実施例に用いた5IC−KrO,+ SiC・8
1+Si、N4 の気孔率は全て0.2%以下であった
-1 perpendicular magnetic recording head 20 has a width of 300 μml and a thickness of 1
μm permalloy (nickel, iron) ~ N' Thin film main magnetic pole 21 is made of manganese zinc ferrite 72
2 and around which an excitation coil 23 is wound.
A polycrystalline ceramic containing various kinds of Si having a Vickers hardness of 1500 to 2000, specifically SiC/ErO, (Example 1) *SiC/ 8i (Example 2) +
Various types of slider portions 24 made of 5iaN* (Example 3) were prepared and evaluated. Note that the surface of the slider portion 24 is polished to a curvature of 50 a+H. In addition, 5IC-KrO, + SiC・8 used in the example
The porosity of 1+Si and N4 was all 0.2% or less.

比較例として、ヘッドとして実施例と同じ構成でスライ
ダ一部24の材質にチタン駿バリウム(比較例1)、ガ
ラス(BK7)(比較例2)を用いたものを作成し、実
り例と共に耐久性評価を行なった。
As a comparative example, a head with the same configuration as in the example was created using titanium barium (comparative example 1) and glass (BK7) (comparative example 2) as the material of the slider part 24. We conducted an evaluation.

耐久性評価は、評価するヘッドをセットしたディスクド
ライブに評価する媒体をセットし、300 rpmで3
00万パス回転させる摺動テストの前後の媒体及びヘッ
ドの表面の粗れ具合で行なった。具体的には媒体につい
ては摺動テスト前後の表面性を表面粗さ計(SURFC
OM、東京精密■製)を用いて中心線平均粗さくCLA
)として求め、摺動後のCLA稙を摺動前のCLA値で
除算した柘対的表面粗さKより、一方ヘッド忙ついては
摺動テスト後のスライダ一部の表面を前記表面粗さ計を
用いて測定しその最大摩耗深さを京めて行った。その結
果を次うの表に示す。
For durability evaluation, set the media to be evaluated in the disk drive with the head to be evaluated, and run the media at 300 rpm for 3 seconds.
The roughness of the surface of the medium and head before and after a sliding test of 1,000,000 rotations was conducted. Specifically, the surface roughness of the media before and after the sliding test was measured using a surface roughness meter (SURFC).
OM, manufactured by Tokyo Seimitsu ■) to obtain center line average roughness CLA
), and from the relative surface roughness K obtained by dividing the CLA value after sliding by the CLA value before sliding, on the other hand, when the head is busy, the surface of a part of the slider after the sliding test is measured using the surface roughness meter. The maximum wear depth was determined by measuring the maximum wear depth. The results are shown in the table below.

表 表から明らかの様に、本発明のヘッドスライダ一部KS
iを含む多結晶焼結体のセラミックスを用いた組合せが
媒体の表面粗さの変化が少な(、ヘッドのスライダ一部
にも傷が少な(,3007Fパスの摺動テストでは劣化
が少なく、比較例のいづれに比しても良好な結果であり
、高い耐久性を示した。
As is clear from the table, part of the head slider of the present invention KS
The combination of polycrystalline sintered ceramics including The results were better than any of the examples and showed high durability.

尚1本発明はその趣旨からいって、実施例に示したフロ
ッピーディスク及び垂直磁気記録媒体、垂直ヘッドを用
いた垂直磁気記録層式に何部限定されるものではなく、
アルミナ酸化処理をしたアルミティスフ等所謂ハードデ
ィスクI磁気テープへの適用、鉄、コバルト、ニッケル
等強磁性金輿薄膜層よりなる面内磁気記録用媒体とリン
グヘッドとを組み合せた面内磁気記録方式にも適用出来
る事は云うまでもない@
Note that the present invention is not limited to the floppy disk, perpendicular magnetic recording medium, and perpendicular magnetic recording layer type using a perpendicular head shown in the embodiments.
Applicable to so-called hard disk I magnetic tapes such as aluminum oxide treated with alumina oxidation, and also to longitudinal magnetic recording systems that combine a ring head with a longitudinal magnetic recording medium made of a thin film layer of ferromagnetic metal such as iron, cobalt, or nickel. It goes without saying that it can be applied @

【図面の簡単な説明】[Brief explanation of drawings]

111図は本発明の一つの構底例σ説明図である。 10:フレキシブル垂直磁気ディスク、20:垂直磁気
記録ヘッド、  11:&体。 ]2:高透磁率金属薄層、 13:コバルト・クロム金属薄層、 l4:コバルト酸化物の保護層、
FIG. 111 is an explanatory diagram of one example of the bottom structure σ of the present invention. 10: flexible perpendicular magnetic disk, 20: perpendicular magnetic recording head, 11: & body. ]2: High magnetic permeability metal thin layer, 13: Cobalt-chromium metal thin layer, l4: Cobalt oxide protective layer,

Claims (1)

【特許請求の範囲】 1)基体上に強磁性金属薄膜よりなる記録層を形成した
磁気記録媒体と、該磁気記録媒体と摺動する面がビッカ
ース硬度1500〜2000の硅素(Si)を含む多結
晶焼結体であるセラミックスで構成された磁気記録ヘッ
ドを用いて磁気記録再生を行う事を特徴とする磁気記録
再生方式。 2)前記Siを含む多結晶焼結体のセラミックスがSi
_3N_4、SiC・Si若しくはSiC・ErO_2
である特許請求範囲第1項記載の磁気記録方式。 3)前記磁気記録媒体が記録層上に保護層を設けた記録
媒体である特許請求の範囲第1項若しくは第2項記載の
磁気記録再生方式。 4)前記保護層が金属酸化物よりなる特許請求の範囲第
3項記載の磁気記録方式。
[Scope of Claims] 1) A magnetic recording medium in which a recording layer made of a ferromagnetic metal thin film is formed on a substrate, and a surface that slides on the magnetic recording medium contains silicon (Si) with a Vickers hardness of 1500 to 2000. A magnetic recording and reproducing method that performs magnetic recording and reproducing using a magnetic recording head made of ceramic, which is a crystalline sintered body. 2) The ceramic of the polycrystalline sintered body containing Si is
_3N_4, SiC/Si or SiC/ErO_2
A magnetic recording system according to claim 1. 3) The magnetic recording and reproducing system according to claim 1 or 2, wherein the magnetic recording medium is a recording medium in which a protective layer is provided on a recording layer. 4) The magnetic recording system according to claim 3, wherein the protective layer is made of a metal oxide.
JP10925585A 1985-05-23 1985-05-23 Magnetic recording and reproducing system Pending JPS61267911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10925585A JPS61267911A (en) 1985-05-23 1985-05-23 Magnetic recording and reproducing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10925585A JPS61267911A (en) 1985-05-23 1985-05-23 Magnetic recording and reproducing system

Publications (1)

Publication Number Publication Date
JPS61267911A true JPS61267911A (en) 1986-11-27

Family

ID=14505540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10925585A Pending JPS61267911A (en) 1985-05-23 1985-05-23 Magnetic recording and reproducing system

Country Status (1)

Country Link
JP (1) JPS61267911A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58139323A (en) * 1982-02-12 1983-08-18 Matsushita Electric Ind Co Ltd Vertically magnetizing recording head
JPS58182119A (en) * 1982-04-20 1983-10-25 Matsushita Electric Ind Co Ltd Magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58139323A (en) * 1982-02-12 1983-08-18 Matsushita Electric Ind Co Ltd Vertically magnetizing recording head
JPS58182119A (en) * 1982-04-20 1983-10-25 Matsushita Electric Ind Co Ltd Magnetic head

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