JPH03127322A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH03127322A JPH03127322A JP26550989A JP26550989A JPH03127322A JP H03127322 A JPH03127322 A JP H03127322A JP 26550989 A JP26550989 A JP 26550989A JP 26550989 A JP26550989 A JP 26550989A JP H03127322 A JPH03127322 A JP H03127322A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- magnetic recording
- noise
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 17
- 239000000203 mixture Substances 0.000 claims abstract description 13
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 11
- 239000010410 layer Substances 0.000 abstract description 40
- 229910001004 magnetic alloy Inorganic materials 0.000 abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052799 carbon Inorganic materials 0.000 abstract description 7
- 239000011241 protective layer Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 3
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 description 15
- 239000010408 film Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 5
- 239000010952 cobalt-chrome Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 229910052735 hafnium Inorganic materials 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、面内記録型のハードディスクを媒体等に利用
される、特に高保持力を有し、かつ低ノイズで高密度記
録ができることを特徴とする磁気記録体に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is directed to the use of a longitudinal recording type hard disk as a medium, etc., which has a particularly high retention force and is capable of high-density recording with low noise. The present invention relates to a characteristic magnetic recording medium.
（従来の技術）
近年、情報量の増大に伴い、記録密度の高い磁気記録体
の要望が高く、合金磁性薄膜を有する磁気記録体の研究
開発が活発である。磁気記録体には大別して面内方向に
磁気異方性を有する面内記録型と垂直方向に磁気異方性
を有する垂直記録型とがある。しかしながら垂直記録型
は磁気ヘッドの浮上量、Ｃ３Ｓ特性、耐久性などにおい
て現状技術では対応できないため、面内記録型の方が実
用レベルではすぐれている。(Prior Art) In recent years, as the amount of information has increased, there has been a strong demand for magnetic recording bodies with high recording density, and research and development of magnetic recording bodies having alloy magnetic thin films has been active. Magnetic recording media can be roughly divided into in-plane recording types that have magnetic anisotropy in the in-plane direction and perpendicular recording types that have magnetic anisotropy in the perpendicular direction. However, the perpendicular recording type cannot be met with current technology in terms of the flying height of the magnetic head, C3S characteristics, durability, etc., and therefore the longitudinal recording type is superior at a practical level.
この種の面内磁気記録媒体としては非磁性基板上にＣｒ
層を介してＣｏ磁性合金層を形成してなるものが知られ
ており、その合金組成について種々検討され、高保持力
を有するＣｏＣｒＮＬ磁性合金層が提案されている（特
開昭６１−１２０３３０号公報）。This type of longitudinal magnetic recording medium uses Cr on a non-magnetic substrate.
It is known that a Co magnetic alloy layer is formed between layers, and various studies have been conducted on the alloy composition, and a CoCrNL magnetic alloy layer with high coercivity has been proposed (Japanese Patent Laid-Open No. 120330/1989). Public bulletin).
このＣｏ Ｃｒ Ｎｉ系磁性合金の場合、下地Ｃｒ層の
厚さが３０００人でＣｏ Ｃｒ Ｎｉ磁性膜の厚さが５
００人の磁気記録体ではＮｉ１５原子％の含有量で最高
の保持力８００エールステツド（以下、Ｏｅと略す）が
得られている。In the case of this CoCrNi magnetic alloy, the thickness of the underlying Cr layer is 3000mm and the thickness of the CoCrNi magnetic film is 5mm thick.
The highest coercive force of 800 Oe (hereinafter abbreviated as Oe) was obtained in the magnetic recording material of 00 people with a Ni content of 15 atomic %.
（発明が解決しようとする課題）
しかしながら、最近の磁気記録分野では、ますます高密
度記録化が要求され、さらに高保持力を有し、かつ低ノ
イズのものが要求されるようになってきた。しかしなが
ら、上記従来の技術ではその保持力は８００ （Ｏｅ）
程度であり、かつノイズが大きく、これらの要求を満す
ことができない。(Problem to be solved by the invention) However, in recent years in the field of magnetic recording, there has been a demand for higher-density recording, as well as higher coercivity and lower noise. . However, in the above conventional technology, the holding force is 800 (Oe)
However, the noise is large, and these requirements cannot be met.
本発明は上記目的を達成するために、磁気記録体の磁性
合金層の組成について鋭意検討した結果、ＣｏＣｒｔｌ
ｆ、、ＣｏＣｒＺｒ、 ＣｏＣｒＺｒＨｆ組威の磁性合
金層によって、より高性能のものが得られることを見出
し、本発明を完成するに至った。In order to achieve the above object, the present invention has been made as a result of intensive study on the composition of the magnetic alloy layer of the magnetic recording body.
The present inventors have discovered that higher performance can be obtained by using a magnetic alloy layer consisting of CoCrZr, CoCrZrHf, and CoCrZrHf, and have completed the present invention.
（課題を解決するための手段）
すなわち、本発明は以下を要旨とするものである。非磁
性基材面上にＣｒ層を介して磁性金属層を介してなる磁
気記録体において、前記磁性金属層は、Ｘ、Ｙ、Ｗを原
子％としたとき、Ｃｏ 、。。〜（ｘ＊Ｖ＋ｗ） Ｃｒ
、 Ｆｌｆｙ Ｚｒｗで表わされ、５．０≦Ｘ≦１８．
０．０．２≦Ｙ≦３．０．０．２≦Ｗ≦３．０．０．２
≦Ｙ＋Ｗ≦３．０の組成比をもつことを特徴とする磁気
記録体（以下合金の組成含有量は原子％で示す）。(Means for Solving the Problems) That is, the gist of the present invention is as follows. In a magnetic recording body formed of a Cr layer and a magnetic metal layer on a nonmagnetic base material surface, the magnetic metal layer is Co, where X, Y, and W are expressed as atomic %. . ~(x*V+w)Cr
, Flfy Zrw, 5.0≦X≦18.
0.0.2≦Y≦3.0.0.2≦W≦3.0.0.2
A magnetic recording body characterized by having a composition ratio of ≦Y+W≦3.0 (hereinafter, the compositional content of the alloy is expressed in atomic %).
以下、さらに本発明について詳しく説明する。The present invention will be further explained in detail below.
本発明の非磁性基材はアルごニウム合金、ガラス、セラ
ミック等強度と平滑性が出せるものを使用する。The non-magnetic base material used in the present invention is one that provides strength and smoothness, such as argonium alloy, glass, or ceramic.
該基材上に必要により、ニッケル・リンなどからなる硬
質層を設けてもよい。その表面をポリッシングマシンな
どの精密研磨機で研磨し、表面粗さをＲａ３０人程度の
ものとする。次に磁性合金層が異方性配向しやすいよう
に、間怠円状の数１００入程度の溝をつける。この上に
、スパッタリング等によりＣｒ層を作製する。例えばＤ
Ｃマグネトロンスパッタリングの場合、電圧３００〜８
００ Ｖ Ｔ：Ａｒガス圧１０−”−１０−３Ｔｏｒｒ
で実施する。下地Ｃｒ層の膜厚は５００〜４０００Åが
好ましい。５００人未満では保持力が低下し、４０００
人をこえてはスパッタリング時間がかかるので好ましく
ない。If necessary, a hard layer made of nickel, phosphorous, etc. may be provided on the base material. The surface is polished with a precision polishing machine such as a polishing machine to obtain a surface roughness of about 30 Ra. Next, about 100 intermittent circular grooves are formed so that the magnetic alloy layer can be easily anisotropically oriented. A Cr layer is formed thereon by sputtering or the like. For example, D
For C magnetron sputtering, voltage 300~8
00 V T: Ar gas pressure 10-”-10-3Torr
It will be carried out. The thickness of the underlying Cr layer is preferably 500 to 4000 Å. If the number of people is less than 500, the holding power will decrease, and the number of people will be 4000.
Sputtering using more than one person is not preferable because sputtering takes time.
本発明における磁性合金層はスパッタリング法により、
付着させることが好ましい。Ｃｒ、 Ｈｆ、 ＺｒＯ組
成はターゲットの材質を変えることによって変化させる
ことができ、又その膜厚はスパッタリングの時間によっ
て変えることができるが、磁性合金層の組成はＣｏ １
００− ＋ｘ＊ｙ＋ｗ＞ＣｒＸＨｆｙ Ｚｒ、で表わさ
れ、５．０≦Ｘ≦１８．０．０．２≦Ｙ≦３．０．、Ｏ
，，２≦Ｗ≦３．０．０．２≦Ｙ十Ｗ≦３．０であると
きに、８００ （Ｏｓ）以上の高い保持力を有し、かつ
低ノイズの高密度磁気記録体を得ることができる。さら
に好ましくは１０≦Ｘ≦１７．０．４≦Ｙ≦１．５．０
．４≦Ｗ≦１．５．０．４≦Ｙ＋Ｗ≦１．５であり、そ
れによってより高い保持力を有する磁気記録体を得るこ
とができる。The magnetic alloy layer in the present invention is formed by sputtering.
It is preferable to attach it. The composition of Cr, Hf, and ZrO can be changed by changing the material of the target, and the film thickness can be changed by changing the sputtering time, but the composition of the magnetic alloy layer is Co1.
00- +x*y+w>CrXHfy Zr, 5.0≦X≦18.0.0.2≦Y≦3.0. , O
,, Obtaining a high-density magnetic recording body having a high coercive force of 800 (Os) or more and low noise when 2≦W≦3.0.0.2≦Y10W≦3.0 be able to. More preferably 10≦X≦17.0.4≦Y≦1.5.0
．． 4≦W≦1.5.0.4≦Y+W≦1.5, and thereby a magnetic recording medium having higher coercive force can be obtained.
これらの組成範囲外ではいずれも保持力が小さく高密度
記録には適していない。If the composition is outside these ranges, the holding power is low and the composition is not suitable for high-density recording.
又、磁性合金層の膜厚は２００〜３０００人が好ましい
。膜厚２００人未満では磁荷が小さく所定の出力が出な
い。３０００人をこえてはスパッタリング時間が長くか
かるとともに、記録密度が小さくなる。Further, the thickness of the magnetic alloy layer is preferably 200 to 3000 layers. If the film thickness is less than 200 mm, the magnetic charge will be small and the desired output will not be produced. If the number of people exceeds 3000, sputtering time will be longer and the recording density will be lower.
次に磁性合金層の保護層としてカーボン膜をスパッタリ
ングにより被着させる。この保護層の厚さは５０〜５０
０人位が好ましい。Next, a carbon film is deposited by sputtering as a protective layer for the magnetic alloy layer. The thickness of this protective layer is 50-50
Preferably 0 people.
このようにして、第１図に示す構成の磁気記録体が得ら
れる。In this way, a magnetic recording body having the configuration shown in FIG. 1 is obtained.
第１図中、ｌはニッケル・リンメツキ膜などを有するア
ルミニウム合金の非磁性基材であり、２は下地層として
のＣｒ層、３は磁性金属層、４は保護膜としてのカーボ
ン保護層を示す。In Fig. 1, l is a non-magnetic aluminum alloy base material having a nickel plating film, etc., 2 is a Cr layer as an underlayer, 3 is a magnetic metal layer, and 4 is a carbon protective layer as a protective film. .
磁気記録体の保持力は試料振動型磁力計を用いて膜面に
平行及び垂直に磁界を印加し、測定する。The coercive force of a magnetic recording medium is measured by applying a magnetic field parallel and perpendicular to the film surface using a sample vibrating magnetometer.
通常磁気記録体の記録密度（ＢＰｌ、ビット・パー・イ
ンチ）は保持力（Ｈｃ）と残留磁束密度（Ｂｒ）、と磁
性合金層の膜厚（δ）に大きく依各周波数の信号を記録
し、その再生時に生じるノイズスペクトルをスペクトル
アナライザーを用いて測定することができる。ノイズは
Ｈｃ、 Ｂｒ、δによって異なるのでＨｃ及びＢｒ・δ
の値が同じ条件で比較する必要がある。Normally, the recording density (BPl, bits per inch) of a magnetic recording medium largely depends on the coercive force (Hc), residual magnetic flux density (Br), and thickness (δ) of the magnetic alloy layer. , the noise spectrum generated during playback can be measured using a spectrum analyzer. Since noise differs depending on Hc, Br, and δ, Hc and Br・δ
It is necessary to compare the values under the same conditions.
これを第２図に従ってさらに説明すると、第２図は実施
例７と比較例５の磁性合金ｍ戒を有する磁気記録体につ
いて、第３表の測定条件で測定したスペクトルを示す。To further explain this with reference to FIG. 2, FIG. 2 shows spectra measured under the measurement conditions shown in Table 3 for the magnetic recording bodies having the magnetic alloys of Example 7 and Comparative Example 5.
すなわち、曲線ＡはＣｏＣｒ１．５Ｎｉ、。（比較例５
）の磁性合金層を有する磁気記録体のノイズスペクトル
の測定データを示し、曲線ＢはＣｏＣｒ＋＋Ｈｆｚの磁
性合金層を有する磁性記録体のノイズスペクトルの測定
データを示す。曲線Ｃはシステムノイズを示す。従って
、磁気記録体のノイズは磁気記録体のノイズスペクトル
とシステムノイズスペクトルとの間で囲まれた面積が磁
気記録体のノイズであり、その面積が小さい程、ノイズ
レベルが低いことを意味する。That is, curve A is CoCr1.5Ni. (Comparative example 5
Curve B shows the measurement data of the noise spectrum of a magnetic recording body having a magnetic alloy layer of CoCr++Hfz. Curve C shows the system noise. Therefore, the noise of the magnetic recording body is the area surrounded by the noise spectrum of the magnetic recording body and the system noise spectrum, and the smaller the area, the lower the noise level.
〈実施例〉 以下に実施例をあげて、本発明を具体的に説明する。<Example> The present invention will be specifically described below with reference to Examples.
（実施例１〜２４、比較例１〜５）
アルミニウム合金基板（外径９５ｍｍ、肉厚２５帥、厚
さ１．３ｍｍ）の表面に無電解メツキ法により膜厚２０
ａｍのＮ１−Ｐメツキ膜を形威し、その表面をラッピン
グマシンで精密研磨し、非磁性基板を作製した。この非
磁性基板上にＤＣマグネトロンスパッタリング法により
、下地層としてＣｒ層、磁性金属１ＪｃｏｃｒＨｆ又は
ＣｏＣｒＺｒ又はＣｏＣｒＨｆＺｒ、保護膜としてのカ
ーボン層を順次、次の製造条件で形成し、磁気記録体を
作製した。(Examples 1 to 24, Comparative Examples 1 to 5) A film with a thickness of 20 mm was formed by electroless plating on the surface of an aluminum alloy substrate (outer diameter 95 mm, wall thickness 25 mm, thickness 1.3 mm).
A non-magnetic substrate was prepared by molding an am N1-P plating film and precision polishing its surface using a lapping machine. A Cr layer as an underlayer, a magnetic metal 1JcocrHf or CoCrZr or CoCrHfZr, and a carbon layer as a protective film were sequentially formed on this nonmagnetic substrate by DC magnetron sputtering under the following manufacturing conditions to produce a magnetic recording body.
スパッタリングは直径２０ｃｍのターゲット３個を用い
、初期排気の到達真空度７．ＯＸｌ０−’ Ｔｏｒｒ、
Ａｒガス圧５Ｘ１０−’ Ｔｏｒｒ 、基板温度２３０
’Ｃで実施した。Sputtering uses three targets with a diameter of 20 cm, and the ultimate vacuum level of initial exhaust is 7. OXl0-' Torr,
Ar gas pressure 5X10-' Torr, substrate temperature 230
It was carried out in 'C.
磁性金属層の組成を変えるためにペース合金であるＣａ
１ｌ？ Ｃｒ１３のターゲット（直径２０ｃｍ）上に添
加成分であるＨ「のチップ（５ｍｍＸ５ｍｍ ）の個数
を変化させてのせた。Ca is a pace alloy to change the composition of the magnetic metal layer.
1l? The number of chips (5 mm x 5 mm) of H", which is an additive component, was placed on a Cr13 target (diameter 20 cm) with varying numbers.
これによって得られた磁気記録体は、Ｎ１−Ｐメ。The magnetic recording body thus obtained was N1-P.
ツキ膜厚２０μｍのアルミニウム合金の非磁性基材、１
５００大の下地Ｃｒ層、６００人の磁性金属層、３００
人の保護膜としてのカーボン層から構成されていた。Non-magnetic base material of aluminum alloy with a thickness of 20 μm, 1
500mm base Cr layer, 600mm magnetic metal layer, 300mm
It was composed of a carbon layer that served as a protective layer for humans.
また比較のため、ターゲットを変えた以外は実施例１〜
２４と同じ条件で磁気記録体を製造し、比較例１〜４の
Ｈｆ、 Ｚｒ又はＨｆ＋Ｚｒは０．４％のもの及び比較
例５の従来の磁性金属層Ｉｖ、ｃｏｃｒ７．５Ｎｉ ：
ｌ。の磁気記録体を得た。実施例１〜２４、比較例１〜
５の磁気記録体は試料振動型磁力計を用いて、膜面に平
行及び垂直に磁界を印加して、得られた磁気特性を比較
して判断した結果、すべて面内方向に磁気異方性を持っ
ていることを確認するこができた。For comparison, Example 1~ except that the target was changed.
Magnetic recording bodies were manufactured under the same conditions as in No. 24, and Hf, Zr or Hf+Zr was 0.4% in Comparative Examples 1 to 4, and conventional magnetic metal layer Iv, cocr7.5Ni in Comparative Example 5:
l. A magnetic recording medium was obtained. Examples 1-24, Comparative Examples 1-
The magnetic recording material No. 5 was judged by applying a magnetic field parallel and perpendicular to the film surface using a sample vibrating magnetometer and comparing the obtained magnetic properties, and found that all magnetic recording materials had magnetic anisotropy in the in-plane direction. I was able to confirm that I have this.
またこれらの磁気記録体の保持力を測定した結果、ｌｌ
ｆ及びＺｒの含有量と保持力の測定結果を第１表に示す
。In addition, as a result of measuring the holding force of these magnetic recording bodies, ll
Table 1 shows the measurement results of f and Zr contents and holding power.
このとき、残留磁束密度と膜厚の積Ｂｒ・δが５００ガ
ウス・ミクロン（Ｇ・μｍ）となるように膜厚を調整し
た。その結果、０．２≦Ｙ≦３．ＯＳｏ、２≦Ｗ≦３．
０．０．２≦ｙ十ｗ≦３．０（７）範囲で保持力が８０
０ （Ｏｓ）より大きく、特ニ０．４≦Ｙ≦２．０．０
．５≦Ｗ≦１．５．０．２：Ｙ＋Ｗ≦２．０ノ範囲では
１０００（Ｏｅ）以上の高保持力を示した。これに対し
、比較例１〜４のＹ、、Ｗ又はｙ＋ｗが０．４％のもの
は保持力の８００ （Ｏｅ）より低く、高密度記録には
適さないことがわかった。比較例５の従来の磁性金属組
成Ｃ（ＩＣｒ７．ｓ Ｎ１５ｏ（Ｄ磁気記録体の保持力
は８００ （Ｏｅ）であった。At this time, the film thickness was adjusted so that the product Br·δ of residual magnetic flux density and film thickness was 500 Gauss·microns (G·μm). As a result, 0.2≦Y≦3. OSo, 2≦W≦3.
Holding force is 80 in the range of 0.0.2≦y1w≦3.0 (7)
Greater than 0 (Os), especially 20.4≦Y≦2.0.0
．． In the range of 5≦W≦1.5.0.2: Y+W≦2.0, a high holding force of 1000 (Oe) or more was exhibited. On the other hand, Comparative Examples 1 to 4 in which Y, W, or y+w was 0.4% had a coercive force lower than 800 (Oe), and were found to be unsuitable for high-density recording. The coercive force of the conventional magnetic metal composition C (ICr7.s N15o (D) of Comparative Example 5 was 800 (Oe).
それらの磁気記録体のノイズについて、前記した方法に
よってスペクトルアナライザーを用いて第２表に示す条
件で測定した周波数２ＭＨｚ〜ｌ０Ｍ１（ｚの範囲でノ
イズスペクトルを測定し、前記した方法により、磁気記
録体の測定ノイズスペクトルとシステムノイズスペクト
ルで囲まれた面積より磁気記録体のノイズを算出した。Regarding the noise of those magnetic recording bodies, the noise spectrum was measured in the frequency range of 2MHz to 10M1 (z) using a spectrum analyzer under the conditions shown in Table 2. The noise of the magnetic recording medium was calculated from the area surrounded by the measured noise spectrum and the system noise spectrum.
その結果を第３表に示す。The results are shown in Table 3.
この結果から明からなように実施例２．７、ｌ。As is clear from this result, Example 2.7, l.
Ｉ４．１８のものは高い周波数まで、低ノイズを維持す
ることが可能であるのに対し、従来の磁性金属層成であ
る比較例５のものは高いノイズを示した。While the I4.18 one was able to maintain low noise up to high frequencies, the one of Comparative Example 5, which was a conventional magnetic metal layer, showed high noise.
第
１
表
注
磁性合金組成ＣｏＣｒ１．、ＨｆｙＺｒｗ （ｚ ！刀
ｉ子２）。Table 1 Magnetic alloy composition CoCr1. , HfyZrw (z! Katana Iko 2).
但し比較例５はＣｏＣｒ、 ５Ｎｉ３゜第
表
（実施例２５〜２９、比較例６〜７）
実施例１〜２４と同様、ＤＣマグネトロンスパッターを
用い、１５００人の下地Ｃｒ層を形成し、その上にＣｏ
Ｃｒｘ Ｈｆｌ、。となるように、Ｃ，ｌｌｆ合金のタ
ーゲットの上にＣｒのチップをのせて、Ｃｒの含有量を
変えて、６００大の磁性金属層を作製し、さら４こ３０
０人のカーボン層を作製した。However, in Comparative Example 5, CoCr, 5Ni3° Table (Examples 25 to 29, Comparative Examples 6 to 7) Similar to Examples 1 to 24, a 1500-layer base Cr layer was formed using DC magnetron sputtering, and then Co
Crx Hfl,. A Cr chip was placed on a C,llf alloy target, and a 600-sized magnetic metal layer was fabricated by varying the Cr content so that
A carbon layer of 0 people was produced.
また比較のため、実施例２５〜２９と同じ条件で磁気記
録体を製造し第２表比較例６〜７のＣｒ含有量０．２０
％のものを得た。For comparison, magnetic recording bodies were manufactured under the same conditions as Examples 25 to 29, and the Cr content of Comparative Examples 6 to 7 in Table 2 was 0.20.
I got %.
これらの磁気記録体の保持力を測定した結果を第４表に
示す。Ｃｒの含有量が約１３％で保持力は最大となり、
Ｃｒ含有量が５．０≦Ｘ≦１８．０の範囲で保持力８０
０ （Ｏｅ）より高いものが得られた。Table 4 shows the results of measuring the holding forces of these magnetic recording bodies. When the Cr content is approximately 13%, the holding power is maximum,
Retention force 80 when Cr content is in the range of 5.0≦X≦18.0
A value higher than 0 (Oe) was obtained.
第
表
注、磁性合金組成ＣｏＣｒ、Ｈｆ＋、。（％は原子％）
。Table Note: Magnetic alloy composition CoCr, Hf+. (% is atomic%)
.
（発明の効果）
本願発明による磁気記録体は面内方向で高い保持力を有
し、かつノイズの低減をはかることが可能であり、高密
度記録に好適であることが判明した。(Effects of the Invention) It has been found that the magnetic recording body according to the present invention has a high coercive force in the in-plane direction, can reduce noise, and is suitable for high-density recording.
第１図は本発明の磁気記録体の断面図。
ｌは非磁性基材、２はＣｒ層、３は磁性金属層、４はカ
ーボン保護層。
第２図はスペクトルアナライザーによるノイズスペクト
ルの測定例である。
曲線ＡはＣｏＣｒ？、５ Ｎ１５ｏの磁性金属を有する
磁気記録体のノイズスペクトル。
曲線ＢはＣｏＣｒ＋Ｊｆｚ、。の磁性金属を有する磁気
記録体のノイズスペクトル。
曲線Ｃはシステムノイズスペクトル。FIG. 1 is a sectional view of the magnetic recording medium of the present invention. 1 is a non-magnetic base material, 2 is a Cr layer, 3 is a magnetic metal layer, and 4 is a carbon protective layer. FIG. 2 is an example of noise spectrum measurement by a spectrum analyzer. Is curve A CoCr? , 5 Noise spectrum of a magnetic recording medium having N15o magnetic metal. Curve B is CoCr+Jfz. Noise spectrum of a magnetic recording medium containing magnetic metal. Curve C is the system noise spectrum.
Claims (1)
してなる磁気記録体において、前記磁性金属層は、Ｘ、
Ｙ、Ｗを原子％としたとき、Ｃｏ＿１＿０＿０＿−＿（
＿ｘ＿＋＿ｙ＿＋＿ｗ）Ｃｒ＿ＸＨｆ＿ＹＺｒ＿Ｗで表
わされ、５．０≦Ｘ≦１８．０、０．２≦Ｙ≦３．０、
０．２≦Ｗ≦３．０、０．２≦Ｙ＋Ｗ≦３．０の組成比
をもつことを特徴とする磁気記録体。1. In a magnetic recording body formed by forming a magnetic metal layer on a non-magnetic base material surface via a Cr layer, the magnetic metal layer comprises X,
When Y and W are expressed as atomic percent, Co_1_0_0_-_(
_x_+_y_+_w) Cr_XHf_YZr_W, 5.0≦X≦18.0, 0.2≦Y≦3.0,
A magnetic recording body characterized by having a composition ratio of 0.2≦W≦3.0 and 0.2≦Y+W≦3.0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26550989A JP2906480B2 (en) | 1989-10-12 | 1989-10-12 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26550989A JP2906480B2 (en) | 1989-10-12 | 1989-10-12 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03127322A true JPH03127322A (en) | 1991-05-30 |
| JP2906480B2 JP2906480B2 (en) | 1999-06-21 |
Family
ID=17418150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26550989A Expired - Fee Related JP2906480B2 (en) | 1989-10-12 | 1989-10-12 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2906480B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06196323A (en) * | 1992-10-30 | 1994-07-15 | Nec Corp | Magnetic recording medium |
-
1989
- 1989-10-12 JP JP26550989A patent/JP2906480B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06196323A (en) * | 1992-10-30 | 1994-07-15 | Nec Corp | Magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2906480B2 (en) | 1999-06-21 |
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