JPS61106781A - エツチング処理液の再生方法 - Google Patents
エツチング処理液の再生方法Info
- Publication number
- JPS61106781A JPS61106781A JP22915684A JP22915684A JPS61106781A JP S61106781 A JPS61106781 A JP S61106781A JP 22915684 A JP22915684 A JP 22915684A JP 22915684 A JP22915684 A JP 22915684A JP S61106781 A JPS61106781 A JP S61106781A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- regeneration
- etching solution
- etching
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000001172 regenerating effect Effects 0.000 title claims description 10
- 230000008929 regeneration Effects 0.000 claims abstract description 21
- 238000011069 regeneration method Methods 0.000 claims abstract description 21
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 20
- 230000001590 oxidative effect Effects 0.000 claims abstract description 10
- 239000000945 filler Substances 0.000 claims abstract description 6
- 238000003756 stirring Methods 0.000 claims abstract description 3
- 239000007788 liquid Substances 0.000 claims description 27
- 239000000243 solution Substances 0.000 claims description 21
- 230000001737 promoting effect Effects 0.000 claims description 4
- 239000011259 mixed solution Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 12
- 238000007664 blowing Methods 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 239000001301 oxygen Substances 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001448 ferrous ion Inorganic materials 0.000 abstract description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 235000011149 sulphuric acid Nutrition 0.000 description 2
- ZKQDCIXGCQPQNV-UHFFFAOYSA-N Calcium hypochlorite Chemical compound [Ca+2].Cl[O-].Cl[O-] ZKQDCIXGCQPQNV-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910021577 Iron(II) chloride Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000007844 bleaching agent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22915684A JPS61106781A (ja) | 1984-10-30 | 1984-10-30 | エツチング処理液の再生方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22915684A JPS61106781A (ja) | 1984-10-30 | 1984-10-30 | エツチング処理液の再生方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61106781A true JPS61106781A (ja) | 1986-05-24 |
| JPS6360833B2 JPS6360833B2 (enExample) | 1988-11-25 |
Family
ID=16887655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22915684A Granted JPS61106781A (ja) | 1984-10-30 | 1984-10-30 | エツチング処理液の再生方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61106781A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6462483A (en) * | 1987-08-28 | 1989-03-08 | Ibm | Regeneration of metal-containing acidic solution |
| US5227010A (en) * | 1991-04-03 | 1993-07-13 | International Business Machines Corporation | Regeneration of ferric chloride etchants |
| JPH08269747A (ja) * | 1995-03-31 | 1996-10-15 | Nippon Aqua Kk | エッチング液の再生方法およびエッチング液 |
| US6450177B1 (en) | 1999-03-12 | 2002-09-17 | Avon Products, Inc. | Applicator brush |
| GB2561098A (en) * | 2015-12-25 | 2018-10-03 | Mitsubishi Electric Corp | Heat exchanger, air conditioner equipped with same, and manufacturing method for flattened u-bend pipes |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL2808074T3 (pl) * | 2013-05-22 | 2018-08-31 | Tessenderlo Group Nv | Sposób usuwania chlorowodoru z użyciem związków żelaza |
-
1984
- 1984-10-30 JP JP22915684A patent/JPS61106781A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6462483A (en) * | 1987-08-28 | 1989-03-08 | Ibm | Regeneration of metal-containing acidic solution |
| US5013395A (en) * | 1987-08-28 | 1991-05-07 | International Business Machines Corporation | Continuous regeneration of acid solution |
| US5227010A (en) * | 1991-04-03 | 1993-07-13 | International Business Machines Corporation | Regeneration of ferric chloride etchants |
| JPH08269747A (ja) * | 1995-03-31 | 1996-10-15 | Nippon Aqua Kk | エッチング液の再生方法およびエッチング液 |
| US6450177B1 (en) | 1999-03-12 | 2002-09-17 | Avon Products, Inc. | Applicator brush |
| GB2561098A (en) * | 2015-12-25 | 2018-10-03 | Mitsubishi Electric Corp | Heat exchanger, air conditioner equipped with same, and manufacturing method for flattened u-bend pipes |
| GB2561098B (en) * | 2015-12-25 | 2021-08-04 | Mitsubishi Electric Corp | Heat exchanger, air-conditioning apparatus including the same, and method of producing flat-tube u-bend |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6360833B2 (enExample) | 1988-11-25 |
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