JPS6098302A - 光学式変位測定装置 - Google Patents

光学式変位測定装置

Info

Publication number
JPS6098302A
JPS6098302A JP20595683A JP20595683A JPS6098302A JP S6098302 A JPS6098302 A JP S6098302A JP 20595683 A JP20595683 A JP 20595683A JP 20595683 A JP20595683 A JP 20595683A JP S6098302 A JPS6098302 A JP S6098302A
Authority
JP
Japan
Prior art keywords
diffraction grating
diffraction
grating
measuring device
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20595683A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235248B2 (en, 2012
Inventor
Kayoko Taniguchi
佳代子 谷口
Hideki Tsuchiya
土谷　秀樹
Masaaki Toyama
正明 外山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Magnescale Inc
Original Assignee
Sony Magnescale Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Magnescale Inc filed Critical Sony Magnescale Inc
Priority to JP20595683A priority Critical patent/JPS6098302A/ja
Priority to DE88117622T priority patent/DE3486178T2/de
Priority to EP84307484A priority patent/EP0146244B2/en
Priority to EP88117622A priority patent/EP0311144B1/en
Priority to DE8484307484T priority patent/DE3484649D1/de
Priority to US06/668,097 priority patent/US4676645A/en
Publication of JPS6098302A publication Critical patent/JPS6098302A/ja
Publication of JPH0235248B2 publication Critical patent/JPH0235248B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP20595683A 1983-11-04 1983-11-04 光学式変位測定装置 Granted JPS6098302A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP20595683A JPS6098302A (ja) 1983-11-04 1983-11-04 光学式変位測定装置
DE88117622T DE3486178T2 (de) 1983-11-04 1984-10-31 Optisches Instrument zur Messung einer Verschiebung.
EP84307484A EP0146244B2 (en) 1983-11-04 1984-10-31 Optical instrument for measuring displacement
EP88117622A EP0311144B1 (en) 1983-11-04 1984-10-31 Optical instrument for measuring displacement
DE8484307484T DE3484649D1 (de) 1983-11-04 1984-10-31 Optisches instrument zur messung einer verschiebung.
US06/668,097 US4676645A (en) 1983-11-04 1984-11-05 Optical instrument for measuring displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20595683A JPS6098302A (ja) 1983-11-04 1983-11-04 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPS6098302A true JPS6098302A (ja) 1985-06-01
JPH0235248B2 JPH0235248B2 (en, 2012) 1990-08-09

Family

ID=16515482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20595683A Granted JPS6098302A (ja) 1983-11-04 1983-11-04 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPS6098302A (en, 2012)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225212A (ja) * 1985-07-26 1987-02-03 Agency Of Ind Science & Technol 相対変位量測定装置
DE3700906A1 (de) * 1986-01-14 1987-07-16 Canon Kk Verschluessler
DE3700777A1 (de) * 1986-01-14 1987-07-16 Canon Kk Vorrichtung zur ermittlung einer bezugsposition und mit dieser vorrichtung ausgestatteter verschluessler
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01185415A (ja) * 1988-01-21 1989-07-25 Mitsutoyo Corp 格子干渉型変位検出装置
EP1359389A2 (en) 2002-04-26 2003-11-05 Sony Precision Technology Inc. Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
KR100531458B1 (ko) * 1998-08-20 2005-11-25 소니 매뉴펙츄어링 시스템즈 코포레이션 광학식 변위측정장치
US8222594B2 (en) 2007-10-05 2012-07-17 Nikon Corporation Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
DE19930687B4 (de) * 1998-07-02 2017-01-05 Dmg Mori Seiki Co., Ltd. Optisches Verschiebungsmeßsystem

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en, 2012) * 1980-11-05 1982-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5781510U (en, 2012) * 1980-11-05 1982-05-20

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225212A (ja) * 1985-07-26 1987-02-03 Agency Of Ind Science & Technol 相対変位量測定装置
DE3700906A1 (de) * 1986-01-14 1987-07-16 Canon Kk Verschluessler
DE3700777A1 (de) * 1986-01-14 1987-07-16 Canon Kk Vorrichtung zur ermittlung einer bezugsposition und mit dieser vorrichtung ausgestatteter verschluessler
JPS63311121A (ja) * 1987-06-15 1988-12-19 Canon Inc エンコ−ダ−
JPH01185415A (ja) * 1988-01-21 1989-07-25 Mitsutoyo Corp 格子干渉型変位検出装置
DE19930687B4 (de) * 1998-07-02 2017-01-05 Dmg Mori Seiki Co., Ltd. Optisches Verschiebungsmeßsystem
KR100531458B1 (ko) * 1998-08-20 2005-11-25 소니 매뉴펙츄어링 시스템즈 코포레이션 광학식 변위측정장치
DE19938869B4 (de) * 1998-08-20 2015-10-01 Dmg Mori Seiki Co., Ltd. Optisches Verschiebungsmeßsystem
EP1359389A2 (en) 2002-04-26 2003-11-05 Sony Precision Technology Inc. Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
US7187449B2 (en) 2002-04-26 2007-03-06 Sony Precision Technology Inc. Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
US7336367B2 (en) 2002-04-26 2008-02-26 Sony Manufacturing Systems Corporation Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
US8222594B2 (en) 2007-10-05 2012-07-17 Nikon Corporation Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element

Also Published As

Publication number Publication date
JPH0235248B2 (en, 2012) 1990-08-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees