JPS6096523A - 三塩化ホウ素の精製法 - Google Patents
三塩化ホウ素の精製法Info
- Publication number
- JPS6096523A JPS6096523A JP20059683A JP20059683A JPS6096523A JP S6096523 A JPS6096523 A JP S6096523A JP 20059683 A JP20059683 A JP 20059683A JP 20059683 A JP20059683 A JP 20059683A JP S6096523 A JPS6096523 A JP S6096523A
- Authority
- JP
- Japan
- Prior art keywords
- bcl3
- boron trichloride
- adsorption
- activated carbon
- active carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 238000000746 purification Methods 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 28
- YGYAWVDWMABLBF-UHFFFAOYSA-N Phosgene Chemical compound ClC(Cl)=O YGYAWVDWMABLBF-UHFFFAOYSA-N 0.000 claims abstract description 3
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 claims abstract 2
- 150000003377 silicon compounds Chemical class 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 13
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 abstract description 13
- 239000012535 impurity Substances 0.000 abstract description 9
- 229910015844 BCl3 Inorganic materials 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000003507 refrigerant Substances 0.000 abstract description 3
- 108010063955 thrombin receptor peptide (42-47) Proteins 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 239000003463 adsorbent Substances 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000005260 corrosion Methods 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000004821 distillation Methods 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 229910021536 Zeolite Inorganic materials 0.000 description 4
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000010457 zeolite Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- -1 8iC14 Chemical class 0.000 description 1
- 244000144730 Amygdalus persica Species 0.000 description 1
- 235000015701 Artemisia arbuscula Nutrition 0.000 description 1
- 235000002657 Artemisia tridentata Nutrition 0.000 description 1
- 235000003261 Artemisia vulgaris Nutrition 0.000 description 1
- 240000006891 Artemisia vulgaris Species 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- OWNRRUFOJXFKCU-UHFFFAOYSA-N Bromadiolone Chemical compound C=1C=C(C=2C=CC(Br)=CC=2)C=CC=1C(O)CC(C=1C(OC2=CC=CC=C2C=1O)=O)C1=CC=CC=C1 OWNRRUFOJXFKCU-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 241000207199 Citrus Species 0.000 description 1
- 208000036828 Device occlusion Diseases 0.000 description 1
- 241001482558 Eumetopias jubatus Species 0.000 description 1
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- 244000082204 Phyllostachys viridis Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 241000861914 Plecoglossus altivelis Species 0.000 description 1
- 241001474791 Proboscis Species 0.000 description 1
- 235000006040 Prunus persica var persica Nutrition 0.000 description 1
- 206010040880 Skin irritation Diseases 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 235000020971 citrus fruits Nutrition 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000036556 skin irritation Effects 0.000 description 1
- 231100000475 skin irritation Toxicity 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20059683A JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20059683A JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6096523A true JPS6096523A (ja) | 1985-05-30 |
| JPH0254283B2 JPH0254283B2 (enrdf_load_stackoverflow) | 1990-11-21 |
Family
ID=16426981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20059683A Granted JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6096523A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG87151A1 (en) * | 1999-09-03 | 2002-03-19 | Air Liquide | Processes and systems for purification of boron trichloride |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622626A (en) * | 1979-08-01 | 1981-03-03 | Ppg Industries Inc | Purification of boron trichloride vapor flow |
| JPS56114818A (en) * | 1980-02-13 | 1981-09-09 | Ube Ind Ltd | Preparation of boron trichloride |
-
1983
- 1983-10-26 JP JP20059683A patent/JPS6096523A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622626A (en) * | 1979-08-01 | 1981-03-03 | Ppg Industries Inc | Purification of boron trichloride vapor flow |
| JPS56114818A (en) * | 1980-02-13 | 1981-09-09 | Ube Ind Ltd | Preparation of boron trichloride |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG87151A1 (en) * | 1999-09-03 | 2002-03-19 | Air Liquide | Processes and systems for purification of boron trichloride |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0254283B2 (enrdf_load_stackoverflow) | 1990-11-21 |
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