JPH0254283B2 - - Google Patents
Info
- Publication number
- JPH0254283B2 JPH0254283B2 JP58200596A JP20059683A JPH0254283B2 JP H0254283 B2 JPH0254283 B2 JP H0254283B2 JP 58200596 A JP58200596 A JP 58200596A JP 20059683 A JP20059683 A JP 20059683A JP H0254283 B2 JPH0254283 B2 JP H0254283B2
- Authority
- JP
- Japan
- Prior art keywords
- bcl
- adsorption
- activated carbon
- cocl
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Treating Waste Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20059683A JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20059683A JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6096523A JPS6096523A (ja) | 1985-05-30 |
JPH0254283B2 true JPH0254283B2 (enrdf_load_stackoverflow) | 1990-11-21 |
Family
ID=16426981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20059683A Granted JPS6096523A (ja) | 1983-10-26 | 1983-10-26 | 三塩化ホウ素の精製法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6096523A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6238636B1 (en) * | 1999-09-03 | 2001-05-29 | Air Liquide America Corporation | Process and systems for purification of boron trichloride |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4238465A (en) * | 1979-08-01 | 1980-12-09 | Ppg Industries, Inc. | Removal of phosgene from boron trichloride |
JPS5857368B2 (ja) * | 1980-02-13 | 1983-12-20 | 宇部興産株式会社 | 三塩化ホウ素の製造方法 |
-
1983
- 1983-10-26 JP JP20059683A patent/JPS6096523A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6096523A (ja) | 1985-05-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6238636B1 (en) | Process and systems for purification of boron trichloride | |
JP6433867B2 (ja) | 水素ガス回収システムおよび水素ガスの分離回収方法 | |
TWI670232B (zh) | 氟化合物氣體之純化方法 | |
US3020128A (en) | Method of preparing materials of high purity | |
WO2014185499A1 (ja) | 塩化水素の精製方法 | |
TWI816959B (zh) | 六氟丁二烯之純化方法 | |
KR20070116258A (ko) | 트리플루오르화질소의 정제 | |
US4713230A (en) | Purification of chlorosilanes | |
WO2017138366A1 (ja) | フッ素化合物ガスの精製方法 | |
US3071444A (en) | Preparation of purified semiconductor material | |
JP6698762B2 (ja) | 水素ガス回収システムおよび水素ガスの分離回収方法 | |
JP3549226B2 (ja) | 1,1−ジフルオロエタンの精製法 | |
EP0107784B1 (en) | Purification of chlorosilanes | |
JPH0353017B2 (enrdf_load_stackoverflow) | ||
JPH04292413A (ja) | アンモニアの精製方法 | |
JPH0254283B2 (enrdf_load_stackoverflow) | ||
JPH035307A (ja) | 選択的吸着による弗化スルフリルの精製方法 | |
JP4458044B2 (ja) | 高純度液体塩素の製造方法 | |
JPH072510A (ja) | テトラクロロシランの脱リン法 | |
JPS641405B2 (enrdf_load_stackoverflow) | ||
US6790419B1 (en) | Purification of gaseous inorganic halide | |
JPS61197415A (ja) | ジクロロシランの精製法 | |
JPH01132535A (ja) | アセチレンガス濃縮方法 | |
JPH07330316A (ja) | 三弗化窒素ガスの精製方法 | |
JPH0239295B2 (ja) | Gasunoseiseihoho |