JPS6095885A - 薄膜ｅｌ素子 - Google Patents
薄膜ｅｌ素子Info
- Publication number
- JPS6095885A JPS6095885A JP58203372A JP20337283A JPS6095885A JP S6095885 A JPS6095885 A JP S6095885A JP 58203372 A JP58203372 A JP 58203372A JP 20337283 A JP20337283 A JP 20337283A JP S6095885 A JPS6095885 A JP S6095885A
- Authority
- JP
- Japan
- Prior art keywords
- transparent electrode
- film
- electrode
- transparent
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 10
- 239000010408 film Substances 0.000 claims description 43
- 238000007740 vapor deposition Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000605 extraction Methods 0.000 description 12
- 230000001681 protective effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 240000005893 Pteridium aquilinum Species 0.000 description 1
- 235000009936 Pteridium aquilinum Nutrition 0.000 description 1
- 244000061456 Solanum tuberosum Species 0.000 description 1
- 235000002595 Solanum tuberosum Nutrition 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203372A JPS6095885A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58203372A JPS6095885A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6095885A true JPS6095885A (ja) | 1985-05-29 |
| JPS64800B2 JPS64800B2 (enrdf_load_stackoverflow) | 1989-01-09 |
Family
ID=16472939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58203372A Granted JPS6095885A (ja) | 1983-10-28 | 1983-10-28 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095885A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03250586A (ja) * | 1990-01-11 | 1991-11-08 | Matsushita Electric Ind Co Ltd | 薄膜ｅｌパネルの電極形成方法 |
-
1983
- 1983-10-28 JP JP58203372A patent/JPS6095885A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03250586A (ja) * | 1990-01-11 | 1991-11-08 | Matsushita Electric Ind Co Ltd | 薄膜ｅｌパネルの電極形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64800B2 (enrdf_load_stackoverflow) | 1989-01-09 |
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