JPS6092475A - 光化学的薄膜製造方法および装置 - Google Patents

光化学的薄膜製造方法および装置

Info

Publication number
JPS6092475A
JPS6092475A JP19969783A JP19969783A JPS6092475A JP S6092475 A JPS6092475 A JP S6092475A JP 19969783 A JP19969783 A JP 19969783A JP 19969783 A JP19969783 A JP 19969783A JP S6092475 A JPS6092475 A JP S6092475A
Authority
JP
Japan
Prior art keywords
substrate
necessary
reaction chamber
gas
photochemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19969783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0380871B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Atsushi Sekiguchi
敦 関口
Takashi Hiraga
隆 平賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp, Anelva Corp filed Critical Canon Anelva Corp
Priority to JP19969783A priority Critical patent/JPS6092475A/ja
Publication of JPS6092475A publication Critical patent/JPS6092475A/ja
Publication of JPH0380871B2 publication Critical patent/JPH0380871B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP19969783A 1983-10-25 1983-10-25 光化学的薄膜製造方法および装置 Granted JPS6092475A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19969783A JPS6092475A (ja) 1983-10-25 1983-10-25 光化学的薄膜製造方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19969783A JPS6092475A (ja) 1983-10-25 1983-10-25 光化学的薄膜製造方法および装置

Publications (2)

Publication Number Publication Date
JPS6092475A true JPS6092475A (ja) 1985-05-24
JPH0380871B2 JPH0380871B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-26

Family

ID=16412105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19969783A Granted JPS6092475A (ja) 1983-10-25 1983-10-25 光化学的薄膜製造方法および装置

Country Status (1)

Country Link
JP (1) JPS6092475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345371A (ja) * 1986-03-31 1988-02-26 Canon Inc 堆積膜形成法
JP2014131036A (ja) * 2007-08-17 2014-07-10 Semiconductor Energy Lab Co Ltd 成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345371A (ja) * 1986-03-31 1988-02-26 Canon Inc 堆積膜形成法
JP2014131036A (ja) * 2007-08-17 2014-07-10 Semiconductor Energy Lab Co Ltd 成膜装置

Also Published As

Publication number Publication date
JPH0380871B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-26

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