JPS6091528A - 遷移金属化合物からなるフイ−ルド・エミツタ− - Google Patents

遷移金属化合物からなるフイ−ルド・エミツタ−

Info

Publication number
JPS6091528A
JPS6091528A JP58199605A JP19960583A JPS6091528A JP S6091528 A JPS6091528 A JP S6091528A JP 58199605 A JP58199605 A JP 58199605A JP 19960583 A JP19960583 A JP 19960583A JP S6091528 A JPS6091528 A JP S6091528A
Authority
JP
Japan
Prior art keywords
transition metal
metal compounds
emitter
field emitter
field emitters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58199605A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441452B2 (enrdf_load_stackoverflow
Inventor
Yoshio Ishizawa
石沢　芳夫
Chuhei Oshima
忠平 大島
Shigeki Otani
茂樹 大谷
▲そ▼右田　龍太郎
Ryutaro Soda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP58199605A priority Critical patent/JPS6091528A/ja
Publication of JPS6091528A publication Critical patent/JPS6091528A/ja
Publication of JPH0441452B2 publication Critical patent/JPH0441452B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes

Landscapes

  • Cold Cathode And The Manufacture (AREA)
JP58199605A 1983-10-25 1983-10-25 遷移金属化合物からなるフイ−ルド・エミツタ− Granted JPS6091528A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58199605A JPS6091528A (ja) 1983-10-25 1983-10-25 遷移金属化合物からなるフイ−ルド・エミツタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58199605A JPS6091528A (ja) 1983-10-25 1983-10-25 遷移金属化合物からなるフイ−ルド・エミツタ−

Publications (2)

Publication Number Publication Date
JPS6091528A true JPS6091528A (ja) 1985-05-22
JPH0441452B2 JPH0441452B2 (enrdf_load_stackoverflow) 1992-07-08

Family

ID=16410637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58199605A Granted JPS6091528A (ja) 1983-10-25 1983-10-25 遷移金属化合物からなるフイ−ルド・エミツタ−

Country Status (1)

Country Link
JP (1) JPS6091528A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63279535A (ja) * 1987-05-08 1988-11-16 Natl Inst For Res In Inorg Mater 炭窒化ニオブフイ−ルドエミツタ−の製造方法
WO1998044527A1 (en) * 1997-04-02 1998-10-08 E.I. Du Pont De Nemours And Company Metal-oxygen-carbon field emitters
JP2003086127A (ja) * 2001-09-10 2003-03-20 Toshiba Corp 電子線装置及び該装置を用いたデバイス製造方法
JP2019527918A (ja) * 2016-08-08 2019-10-03 エーエスエムエル ネザーランズ ビー．ブイ． 電子エミッタ及びそれを製作する方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63279535A (ja) * 1987-05-08 1988-11-16 Natl Inst For Res In Inorg Mater 炭窒化ニオブフイ−ルドエミツタ−の製造方法
WO1998044527A1 (en) * 1997-04-02 1998-10-08 E.I. Du Pont De Nemours And Company Metal-oxygen-carbon field emitters
JP2001519076A (ja) * 1997-04-02 2001-10-16 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー 金属−酸素−炭素電界エミッタ
US6376973B1 (en) 1997-04-02 2002-04-23 E. I. Du Pont De Nemours And Company Metal-oxygen-carbon field emitters
JP2003086127A (ja) * 2001-09-10 2003-03-20 Toshiba Corp 電子線装置及び該装置を用いたデバイス製造方法
JP2019527918A (ja) * 2016-08-08 2019-10-03 エーエスエムエル ネザーランズ ビー．ブイ． 電子エミッタ及びそれを製作する方法
US11201032B2 (en) 2016-08-08 2021-12-14 Asml Netherlands B.V. Electron emitter and method of fabricating same
US11688579B2 (en) 2016-08-08 2023-06-27 Asml Netherlands B.V. Electron emitter and method of fabricating same

Also Published As

Publication number Publication date
JPH0441452B2 (enrdf_load_stackoverflow) 1992-07-08

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