JPS6090836A - 合成石英の製造方法 - Google Patents

合成石英の製造方法

Info

Publication number
JPS6090836A
JPS6090836A JP19826883A JP19826883A JPS6090836A JP S6090836 A JPS6090836 A JP S6090836A JP 19826883 A JP19826883 A JP 19826883A JP 19826883 A JP19826883 A JP 19826883A JP S6090836 A JPS6090836 A JP S6090836A
Authority
JP
Japan
Prior art keywords
synthetic quartz
gas
silica
ester silane
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19826883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420853B2 (enrdf_load_stackoverflow
Inventor
Haruo Okamoto
岡本　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP19826883A priority Critical patent/JPS6090836A/ja
Publication of JPS6090836A publication Critical patent/JPS6090836A/ja
Publication of JPH0420853B2 publication Critical patent/JPH0420853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
JP19826883A 1983-10-25 1983-10-25 合成石英の製造方法 Granted JPS6090836A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19826883A JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19826883A JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Publications (2)

Publication Number Publication Date
JPS6090836A true JPS6090836A (ja) 1985-05-22
JPH0420853B2 JPH0420853B2 (enrdf_load_stackoverflow) 1992-04-07

Family

ID=16388307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19826883A Granted JPS6090836A (ja) 1983-10-25 1983-10-25 合成石英の製造方法

Country Status (1)

Country Link
JP (1) JPS6090836A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138145A (ja) * 1987-08-20 1989-05-31 Shin Etsu Chem Co Ltd 合成石英ガラス部材の製造方法
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
JPH04270130A (ja) * 1990-08-16 1992-09-25 Corning Inc 高純度溶融シリカガラスの非多孔質体を作成する方法
JPH06199532A (ja) * 1991-06-29 1994-07-19 Shinetsu Quartz Prod Co Ltd エキシマレーザー用石英ガラス部材の製造方法
US5470369A (en) * 1991-12-16 1995-11-28 Sumitomo Electric Industries, Ltd. Process for consolidation of porous preform for optical fiber
JPH11116247A (ja) * 1997-10-09 1999-04-27 Nikon Corp 合成石英ガラス製造方法
JP2008050204A (ja) * 2006-08-24 2008-03-06 Sumitomo Electric Ind Ltd 石英ガラス体製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56125232A (en) * 1980-03-04 1981-10-01 Nippon Telegr & Teleph Corp <Ntt> Preparation of multicomponent glass fiber preform rod

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56125232A (en) * 1980-03-04 1981-10-01 Nippon Telegr & Teleph Corp <Ntt> Preparation of multicomponent glass fiber preform rod

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01138145A (ja) * 1987-08-20 1989-05-31 Shin Etsu Chem Co Ltd 合成石英ガラス部材の製造方法
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
JPH04270130A (ja) * 1990-08-16 1992-09-25 Corning Inc 高純度溶融シリカガラスの非多孔質体を作成する方法
USRE39535E1 (en) 1990-08-16 2007-04-03 Corning Incorporated Method of making fused silica by decomposing siloxanes
JPH06199532A (ja) * 1991-06-29 1994-07-19 Shinetsu Quartz Prod Co Ltd エキシマレーザー用石英ガラス部材の製造方法
US5470369A (en) * 1991-12-16 1995-11-28 Sumitomo Electric Industries, Ltd. Process for consolidation of porous preform for optical fiber
JPH11116247A (ja) * 1997-10-09 1999-04-27 Nikon Corp 合成石英ガラス製造方法
JP2008050204A (ja) * 2006-08-24 2008-03-06 Sumitomo Electric Ind Ltd 石英ガラス体製造方法

Also Published As

Publication number Publication date
JPH0420853B2 (enrdf_load_stackoverflow) 1992-04-07

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