JPS6085358A - 感湿素子とその製造方法 - Google Patents

感湿素子とその製造方法

Info

Publication number
JPS6085358A
JPS6085358A JP59166288A JP16628884A JPS6085358A JP S6085358 A JPS6085358 A JP S6085358A JP 59166288 A JP59166288 A JP 59166288A JP 16628884 A JP16628884 A JP 16628884A JP S6085358 A JPS6085358 A JP S6085358A
Authority
JP
Japan
Prior art keywords
polyvinyl alcohol
sensitive element
layer
moisture
water vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59166288A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240973B2 (en, 2012
Inventor
プライアン・クリストフアー・ウエブ
デレク・ジヨージ・ペドリー
ステイーブン・ジヨン・プロツサー
正也 枅川
古林　久敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMI Group Ltd
Sharp Corp
Original Assignee
Thorn EMI PLC
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorn EMI PLC, Sharp Corp filed Critical Thorn EMI PLC
Publication of JPS6085358A publication Critical patent/JPS6085358A/ja
Publication of JPH0240973B2 publication Critical patent/JPH0240973B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/667—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP59166288A 1983-08-19 1984-08-07 感湿素子とその製造方法 Granted JPS6085358A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB838322418A GB8322418D0 (en) 1983-08-19 1983-08-19 Humidity sensor
GB8322418 1983-08-19

Publications (2)

Publication Number Publication Date
JPS6085358A true JPS6085358A (ja) 1985-05-14
JPH0240973B2 JPH0240973B2 (en, 2012) 1990-09-14

Family

ID=10547590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59166288A Granted JPS6085358A (ja) 1983-08-19 1984-08-07 感湿素子とその製造方法

Country Status (4)

Country Link
US (1) US5004700A (en, 2012)
JP (1) JPS6085358A (en, 2012)
DE (1) DE3429115C2 (en, 2012)
GB (2) GB8322418D0 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339667U (en, 2012) * 1986-09-01 1988-03-15
JPH0210146A (ja) * 1988-06-28 1990-01-12 Nok Corp 感湿素子およびその動作回路

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157847A (ja) * 1984-08-29 1986-03-24 Sharp Corp 電界効果型湿度センサ
US5693545A (en) * 1996-02-28 1997-12-02 Motorola, Inc. Method for forming a semiconductor sensor FET device
DE19828093C2 (de) * 1998-06-24 2003-09-11 Univ Dresden Tech Einrichtung zum Messen physikalischer Größen von ein- oder mehrkomponentigen Flüssigkeiten
US6246118B1 (en) * 1999-02-18 2001-06-12 Advanced Micro Devices, Inc. Low dielectric semiconductor device with rigid, conductively lined interconnection system
DE10036178A1 (de) * 2000-07-25 2002-02-14 Siemens Ag Feuchtesensor und Verwendung
DE10036180A1 (de) * 2000-07-25 2002-02-14 Siemens Ag Potentialgesteuerter Gassensor
US6724612B2 (en) 2002-07-09 2004-04-20 Honeywell International Inc. Relative humidity sensor with integrated signal conditioning
JP3855950B2 (ja) * 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
US7112304B2 (en) * 2003-04-11 2006-09-26 Therm-O-Disc, Incorporated Robust chemiresistor sensor
JP4438049B2 (ja) * 2003-08-11 2010-03-24 キヤノン株式会社 電界効果トランジスタ及びそれを用いたセンサ並びにその製造方法
DE102005008051A1 (de) * 2005-02-22 2006-08-24 Siemens Ag Gassensor und Verfahren zu dessen Betrieb
WO2006097566A1 (en) * 2005-03-18 2006-09-21 Avantone Oy Methods and arrangements for acquiring and utilising enhanced electronic conduction in an organic thin film transistor
KR101322354B1 (ko) * 2011-04-07 2013-10-25 한국과학기술원 습도 센서, 습도 센싱 방법 및 이를 위한 트랜지스터
US8978452B2 (en) 2011-08-11 2015-03-17 3M Innovative Properties Company Wetness sensor using RF circuit with frangible link
US9681996B2 (en) 2011-08-11 2017-06-20 3M Innovative Properties Company Wetness sensors
CN104519846B (zh) * 2012-06-15 2018-03-09 It健康有限公司 利用了导电性纤维状导线的大小便检测传感器及检测装置
GB2516247A (en) 2013-07-16 2015-01-21 Nokia Corp An apparatus and associated methods
GB2521193A (en) * 2013-12-12 2015-06-17 Nokia Technologies Oy Electronic apparatus and associated methods
DE102015206631A1 (de) * 2015-04-14 2016-10-20 Robert Bosch Gmbh Feldeffekttransistor sowie Verfahren und Steuergerät zum Betreiben eines Feldeffekttransistors
EP3217167B1 (en) * 2016-03-11 2018-05-16 Honeywell International Inc. Humidity sensors with transistor structures and piezoelectric layer
EP3244201B1 (en) * 2016-05-13 2021-10-27 Honeywell International Inc. Fet based humidity sensor with barrier layer protecting gate dielectric

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251880A (en) * 1975-10-22 1977-04-26 Matsushita Electric Ind Co Ltd Moisture sensitive element
JPS5298993A (en) * 1976-02-14 1977-08-19 Sony Corp Humidity sensitive element material
JPS53132981A (en) * 1977-04-25 1978-11-20 Massachusetts Inst Technology Charge flow transistor and machine using same
JPS582731A (ja) * 1981-06-30 1983-01-08 Anritsu Corp 感湿素子

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3715702A (en) * 1971-06-23 1973-02-06 Honeywell Inc Relative humidity sensor
GB1464605A (en) * 1973-08-14 1977-02-16 Nippon Sheet Glass Co Ltd Humidity-sensitive sensor
US3916367A (en) * 1974-01-22 1975-10-28 Honeywell Inc Relative humidity sensor
JPS5287381A (en) * 1976-01-17 1977-07-21 Matsushita Electric Ind Co Ltd Humidity sensitive element
US4273636A (en) * 1977-05-26 1981-06-16 Kiyoo Shimada Selective chemical sensitive field effect transistor transducers
JPS5412893A (en) * 1977-06-30 1979-01-30 Sony Corp Dew-sensitive element material
US4302530A (en) * 1977-12-08 1981-11-24 University Of Pennsylvania Method for making substance-sensitive electrical structures by processing substance-sensitive photoresist material
JPS5529774A (en) * 1978-08-24 1980-03-03 Shinei Kk Relative humidity detector
US4263576A (en) * 1978-07-10 1981-04-21 Murata Manufacturing Co., Ltd. Humidity sensitive device
EP0013022B1 (en) * 1978-12-26 1984-03-28 Matsushita Electric Industrial Co., Ltd. Humidity detecting apparatus using a humidity detecting resistor ceramic element
JPS5814043B2 (ja) * 1979-06-07 1983-03-17 秩父セメント株式会社 湿度センサ素子
US4288775A (en) * 1979-11-09 1981-09-08 Bennewitz Paul F Device and method of manufacturing a relative humidity sensor and temperature sensor
GB2064126A (en) * 1979-11-22 1981-06-10 Philips Electronic Associated Method of making humidity sensors
EP0057728B1 (en) * 1980-07-21 1986-05-28 Hitachi, Ltd. Moisture-sensitive element, moisture-sensitive material and manufacturing method for same
DE3173119D1 (en) * 1980-08-08 1986-01-16 Toshiba Kk Moisture sensitive element
US4337658A (en) * 1980-10-14 1982-07-06 Honeywell Inc. Humidity sensor
US4464647A (en) * 1981-02-12 1984-08-07 Marcon Electronics Co. Ltd. Humidity sensor made of metal oxide
US4486292A (en) * 1981-09-23 1984-12-04 Critikon, Inc. Support and anchoring mechanism for membranes in selectively responsive field effect devices
US4514263A (en) * 1982-01-12 1985-04-30 University Of Utah Apparatus and method for measuring the concentration of components in fluids
US4562725A (en) * 1982-07-31 1986-01-07 Shimadzu Corporation Moisture sensor and a process for the production thereof
US4422129A (en) * 1982-08-19 1983-12-20 General Electric Company Humidity sensor
JPS59173743A (ja) * 1983-03-23 1984-10-01 Sharp Corp 感湿素子
US4567221A (en) * 1983-03-31 1986-01-28 Kuraray Co., Ltd. Water resistant compositions
GB2138952B (en) * 1983-04-30 1986-07-30 Sharp Kk Producing electrical moisture sensors
JPS60239657A (ja) * 1984-05-15 1985-11-28 Sharp Corp 感湿素子及びその製造方法
JPS6156952A (ja) * 1984-08-28 1986-03-22 Sharp Corp 感湿抵抗素子
JPS6157847A (ja) * 1984-08-29 1986-03-24 Sharp Corp 電界効果型湿度センサ
US4784936A (en) * 1985-10-24 1988-11-15 General Electric Company Process of forming a resist structure on substrate having topographical features using positive photoresist layer and poly(vinyl pyrrolidone) overlayer
CA1302675C (en) * 1986-05-20 1992-06-09 Masakazu Uekita Thin film and device having the same
US4943471A (en) * 1986-05-20 1990-07-24 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Patterned thin film and process for preparing the same
US4900405A (en) * 1987-07-15 1990-02-13 Sri International Surface type microelectronic gas and vapor sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251880A (en) * 1975-10-22 1977-04-26 Matsushita Electric Ind Co Ltd Moisture sensitive element
JPS5298993A (en) * 1976-02-14 1977-08-19 Sony Corp Humidity sensitive element material
JPS53132981A (en) * 1977-04-25 1978-11-20 Massachusetts Inst Technology Charge flow transistor and machine using same
JPS582731A (ja) * 1981-06-30 1983-01-08 Anritsu Corp 感湿素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6339667U (en, 2012) * 1986-09-01 1988-03-15
JPH0210146A (ja) * 1988-06-28 1990-01-12 Nok Corp 感湿素子およびその動作回路

Also Published As

Publication number Publication date
DE3429115A1 (de) 1985-03-07
GB2145282A (en) 1985-03-20
GB2145282B (en) 1987-05-28
GB8417946D0 (en) 1984-08-15
DE3429115C2 (de) 1996-02-22
JPH0240973B2 (en, 2012) 1990-09-14
US5004700A (en) 1991-04-02
GB8322418D0 (en) 1983-09-21

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