JPS6078564U - 電子顕微鏡等の排気装置 - Google Patents

電子顕微鏡等の排気装置

Info

Publication number
JPS6078564U
JPS6078564U JP17160783U JP17160783U JPS6078564U JP S6078564 U JPS6078564 U JP S6078564U JP 17160783 U JP17160783 U JP 17160783U JP 17160783 U JP17160783 U JP 17160783U JP S6078564 U JPS6078564 U JP S6078564U
Authority
JP
Japan
Prior art keywords
power source
ion pump
electron microscopes
exhaust equipment
switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17160783U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314773Y2 (fr
Inventor
健二 小原
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP17160783U priority Critical patent/JPS6078564U/ja
Publication of JPS6078564U publication Critical patent/JPS6078564U/ja
Application granted granted Critical
Publication of JPH0314773Y2 publication Critical patent/JPH0314773Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP17160783U 1983-11-05 1983-11-05 電子顕微鏡等の排気装置 Granted JPS6078564U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17160783U JPS6078564U (ja) 1983-11-05 1983-11-05 電子顕微鏡等の排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17160783U JPS6078564U (ja) 1983-11-05 1983-11-05 電子顕微鏡等の排気装置

Publications (2)

Publication Number Publication Date
JPS6078564U true JPS6078564U (ja) 1985-05-31
JPH0314773Y2 JPH0314773Y2 (fr) 1991-04-02

Family

ID=30374307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17160783U Granted JPS6078564U (ja) 1983-11-05 1983-11-05 電子顕微鏡等の排気装置

Country Status (1)

Country Link
JP (1) JPS6078564U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010086926A (ja) * 2008-10-03 2010-04-15 Hitachi High-Technologies Corp 真空排気方法、及び真空装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010086926A (ja) * 2008-10-03 2010-04-15 Hitachi High-Technologies Corp 真空排気方法、及び真空装置

Also Published As

Publication number Publication date
JPH0314773Y2 (fr) 1991-04-02

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