JPS6078564U - Exhaust equipment for electron microscopes, etc. - Google Patents

Exhaust equipment for electron microscopes, etc.

Info

Publication number
JPS6078564U
JPS6078564U JP17160783U JP17160783U JPS6078564U JP S6078564 U JPS6078564 U JP S6078564U JP 17160783 U JP17160783 U JP 17160783U JP 17160783 U JP17160783 U JP 17160783U JP S6078564 U JPS6078564 U JP S6078564U
Authority
JP
Japan
Prior art keywords
power source
ion pump
electron microscopes
exhaust equipment
switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17160783U
Other languages
Japanese (ja)
Other versions
JPH0314773Y2 (en
Inventor
健二 小原
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP17160783U priority Critical patent/JPS6078564U/en
Publication of JPS6078564U publication Critical patent/JPS6078564U/en
Application granted granted Critical
Publication of JPH0314773Y2 publication Critical patent/JPH0314773Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来装置を説明するための構成図、第２図は本
考案の一実施例を説明するための構成図である。 １：被排気系、２，６：油回転ポンプ、３゜５．７：弁
、４：油拡散ポンプ、８：イオンポンプ、９：駆動電源
、１０：電流検出手段、１１：ビラ二ケージ、１２：ペ
ニングゲージ、１３：制御回路、１４：低電圧／高電圧
出力切り換え回路。　　　　−FIG. 1 is a block diagram for explaining a conventional device, and FIG. 2 is a block diagram for explaining an embodiment of the present invention. 1: Exhaust system, 2, 6: Oil rotary pump, 3゜5.7: Valve, 4: Oil diffusion pump, 8: Ion pump, 9: Drive power source, 10: Current detection means, 11: Villa cage, 12: Penning gauge, 13: control circuit, 14: low voltage/high voltage output switching circuit. −

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被排気系をイオンポンプを含む複数の真空ポンプ１こよ
り排気する装置において、該イオンポンプを駆動するた
めの駆動電源と、該駆動電源の出力を高電圧出力又は低
電圧出力に切り換えるための切り換え手段と、該駆動電
源よりイオンポンプに供給される電流を検出するための
電流検出手段と、被排気系に設けられた真空計と、該真
空計及び電流検出手段よりの信号によって前記切り換え
手段及び駆動電源を制御する制御手段を備えたことを特
徴とする電子顕微鏡等の排気装置。In an apparatus for evacuating an evacuated system using a plurality of vacuum pumps including an ion pump, a driving power source for driving the ion pump and a switching means for switching the output of the driving power source to a high voltage output or a low voltage output. , a current detection means for detecting the current supplied to the ion pump from the drive power supply, a vacuum gauge provided in the evacuated system, and the switching means and the drive according to signals from the vacuum gauge and the current detection means. An exhaust device for an electron microscope, etc., characterized by comprising a control means for controlling a power source.
JP17160783U 1983-11-05 1983-11-05 Exhaust equipment for electron microscopes, etc. Granted JPS6078564U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17160783U JPS6078564U (en) 1983-11-05 1983-11-05 Exhaust equipment for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17160783U JPS6078564U (en) 1983-11-05 1983-11-05 Exhaust equipment for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS6078564U true JPS6078564U (en) 1985-05-31
JPH0314773Y2 JPH0314773Y2 (en) 1991-04-02

Family

ID=30374307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17160783U Granted JPS6078564U (en) 1983-11-05 1983-11-05 Exhaust equipment for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS6078564U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010086926A (en) * 2008-10-03 2010-04-15 Hitachi High-Technologies Corp Evacuation method and vacuum device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010086926A (en) * 2008-10-03 2010-04-15 Hitachi High-Technologies Corp Evacuation method and vacuum device

Also Published As

Publication number Publication date
JPH0314773Y2 (en) 1991-04-02

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