JPS60167192U - Exhaust system using turbo molecular pump - Google Patents

Exhaust system using turbo molecular pump

Info

Publication number
JPS60167192U
JPS60167192U JP5640684U JP5640684U JPS60167192U JP S60167192 U JPS60167192 U JP S60167192U JP 5640684 U JP5640684 U JP 5640684U JP 5640684 U JP5640684 U JP 5640684U JP S60167192 U JPS60167192 U JP S60167192U
Authority
JP
Japan
Prior art keywords
molecular pump
turbo
driving
exhaust system
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5640684U
Other languages
Japanese (ja)
Other versions
JPH018713Y2 (en
Inventor
健二 小原
平野　治男
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP5640684U priority Critical patent/JPS60167192U/en
Publication of JPS60167192U publication Critical patent/JPS60167192U/en
Application granted granted Critical
Publication of JPH018713Y2 publication Critical patent/JPH018713Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の構成図、第２図は他の実施
例の構成図である。 １：真空容器、２：ターボ分子ポンプ、３：油回転ポン
プ、４：駆動電源、５：回転検出手段、６：制御回路、
７：バルブ駆動回路、８：第１リークバルブ、９：第２
リークバルウ゛、１０：真空計、１１：タイマー。FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a block diagram of another embodiment. 1: Vacuum container, 2: Turbo molecular pump, 3: Oil rotary pump, 4: Drive power source, 5: Rotation detection means, 6: Control circuit,
7: Valve drive circuit, 8: First leak valve, 9: Second
Leak valve, 10: Vacuum gauge, 11: Timer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器に接続されたターボ分子ポンプと、該ターボ分
子ポンプを駆動する駆動電源と、該真空容器に取付けら
れたコンダクタンス可変のリーク手段と、該リーク手段
を駆動するバルブ駆動手段と、前記ターボ分子ポンプの
回転速度に対応した信号を発生する信号発生手段と、該
信号発生手段よりの信号と前記駆動電源への停止信号に
基づいて、前記リーク手段のコンダクタンスを順次増大
させるように前記バルブ駆動手段を制御する制御手段と
を設けたことを特徴とするターボ分子ポンプを用いた排
気系。a turbo-molecular pump connected to a vacuum container, a driving power source for driving the turbo-molecular pump, a leak means with variable conductance attached to the vacuum container, a valve driving means for driving the leak means, and the turbo-molecular pump. a signal generating means for generating a signal corresponding to the rotational speed of the pump; and a valve driving means for sequentially increasing the conductance of the leak means based on the signal from the signal generating means and a stop signal to the driving power source. An exhaust system using a turbo-molecular pump, characterized in that it is provided with a control means for controlling.
JP5640684U 1984-04-17 1984-04-17 Exhaust system using turbo molecular pump Granted JPS60167192U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5640684U JPS60167192U (en) 1984-04-17 1984-04-17 Exhaust system using turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5640684U JPS60167192U (en) 1984-04-17 1984-04-17 Exhaust system using turbo molecular pump

Publications (2)

Publication Number Publication Date
JPS60167192U true JPS60167192U (en) 1985-11-06
JPH018713Y2 JPH018713Y2 (en) 1989-03-08

Family

ID=30579968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5640684U Granted JPS60167192U (en) 1984-04-17 1984-04-17 Exhaust system using turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS60167192U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101686A (en) * 1984-10-24 1986-05-20 Hitachi Ltd Evacuating device
JP2009103124A (en) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh Device including vacuum pump and its operating method
JP2016008612A (en) * 2014-06-26 2016-01-18 プファイファー・ヴァキューム・ゲーエムベーハー Method and apparatus for feeding gas into vacuum chamber
EP4033516A1 (en) * 2021-01-26 2022-07-27 Jeol Ltd. Ion beam processing apparatus and method for controlling operation thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61101686A (en) * 1984-10-24 1986-05-20 Hitachi Ltd Evacuating device
JP2009103124A (en) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh Device including vacuum pump and its operating method
JP2016008612A (en) * 2014-06-26 2016-01-18 プファイファー・ヴァキューム・ゲーエムベーハー Method and apparatus for feeding gas into vacuum chamber
EP4033516A1 (en) * 2021-01-26 2022-07-27 Jeol Ltd. Ion beam processing apparatus and method for controlling operation thereof
US11929238B2 (en) 2021-01-26 2024-03-12 Jeol Ltd. Ion beam processing apparatus and method for controlling operation thereof

Also Published As

Publication number Publication date
JPH018713Y2 (en) 1989-03-08

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