JPS5914261U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS5914261U JPS5914261U JP10998682U JP10998682U JPS5914261U JP S5914261 U JPS5914261 U JP S5914261U JP 10998682 U JP10998682 U JP 10998682U JP 10998682 U JP10998682 U JP 10998682U JP S5914261 U JPS5914261 U JP S5914261U
- Authority
- JP
- Japan
- Prior art keywords
- timer
- output signal
- electron microscope
- scanning electron
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示すブロック図、第２図は
第１図の実施例の説明に用いた信号波形図である。
１：撮影手段、２：ＮＡＮＤゲート回路、３：第１のタ
イマー、４：スイッチ制御回路、５：油拡散ポンプ、６
：電源、７：スイッチ、８：第２のタイマー、９：増幅
器、１０：ランプ。FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a signal waveform diagram used to explain the embodiment of FIG. 1: Photographing means, 2: NAND gate circuit, 3: First timer, 4: Switch control circuit, 5: Oil diffusion pump, 6
: power supply, 7: switch, 8: second timer, 9: amplifier, 10: lamp.
Claims (1)
へ交流電力を供給するための電源と、その一方の入力端
子に走査像の撮影開始信号が供給されるＮＡＮＤゲート
回路と、該ＮＡＮＤゲート回路の出力信号が供給される
第１のタイマーと、該第１のタイマーに接続され、その
出力信号が該ＮＡＮＤゲート回路の他方の入力端子に供
給される第２のタイマーとを備え、該第１のタイマーの
出力信号に応じて、該ポンプへの交流電力−の供給、停
止を制御するように構成した走査電子顕微鏡。 ２ 該第２のタイマーの出力信号レベルの変化を示す
表示手段が設けられた実用新案登録請求の範囲第１項記
載の走査電子顕微鏡。[Claims for Utility Model Registration] 1. An oil diffusion pump for evacuating the inside of the mirror body, a power source for supplying AC power to the pump, and a scanning image capturing start signal being supplied to one input terminal of the oil diffusion pump. a NAND gate circuit, a first timer to which an output signal of the NAND gate circuit is supplied, and a second timer connected to the first timer and whose output signal is supplied to the other input terminal of the NAND gate circuit. A scanning electron microscope comprising: a timer; and configured to control supply and stop of alternating current power to the pump in accordance with an output signal of the first timer. 2. The scanning electron microscope according to claim 1, which is provided with display means for indicating changes in the output signal level of the second timer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998682U JPS5914261U (en) | 1982-07-20 | 1982-07-20 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998682U JPS5914261U (en) | 1982-07-20 | 1982-07-20 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5914261U true JPS5914261U (en) | 1984-01-28 |
Family
ID=30255986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998682U Pending JPS5914261U (en) | 1982-07-20 | 1982-07-20 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5914261U (en) |
-
1982
- 1982-07-20 JP JP10998682U patent/JPS5914261U/en active Pending
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