JPS6077470A - ダイアフラム型半導体圧力センサ - Google Patents

ダイアフラム型半導体圧力センサ

Info

Publication number
JPS6077470A
JPS6077470A JP58185403A JP18540383A JPS6077470A JP S6077470 A JPS6077470 A JP S6077470A JP 58185403 A JP58185403 A JP 58185403A JP 18540383 A JP18540383 A JP 18540383A JP S6077470 A JPS6077470 A JP S6077470A
Authority
JP
Japan
Prior art keywords
pressure
resistors
pressure sensitive
diaphragm
sensitive resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58185403A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473304B2 (enrdf_load_stackoverflow
Inventor
Masaki Hirata
平田　雅規
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58185403A priority Critical patent/JPS6077470A/ja
Publication of JPS6077470A publication Critical patent/JPS6077470A/ja
Publication of JPH0473304B2 publication Critical patent/JPH0473304B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP58185403A 1983-10-04 1983-10-04 ダイアフラム型半導体圧力センサ Granted JPS6077470A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58185403A JPS6077470A (ja) 1983-10-04 1983-10-04 ダイアフラム型半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58185403A JPS6077470A (ja) 1983-10-04 1983-10-04 ダイアフラム型半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS6077470A true JPS6077470A (ja) 1985-05-02
JPH0473304B2 JPH0473304B2 (enrdf_load_stackoverflow) 1992-11-20

Family

ID=16170178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58185403A Granted JPS6077470A (ja) 1983-10-04 1983-10-04 ダイアフラム型半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS6077470A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1110067A4 (en) * 1998-08-21 2001-10-24 Motorola Inc PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF
US6424014B2 (en) 2000-02-25 2002-07-23 Oki Electric Industry Co,Ltd. Semiconductor element with electric field reducing device mounted therein for increasing dielectric strength
FR2820201A1 (fr) * 2001-01-31 2002-08-02 Denso Corp Capteur de quantite dynamique a semiconducteur
JP2009300197A (ja) * 2008-06-12 2009-12-24 Alps Electric Co Ltd 半導体圧力センサ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169177A (ja) * 2017-03-29 2018-11-01 パナソニックＩｐマネジメント株式会社 圧力センサ素子と、これを用いた圧力センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162492A (en) * 1978-06-13 1979-12-24 Mitsubishi Electric Corp Semiconductor pressure transducer
JPS5524273A (en) * 1978-08-11 1980-02-21 Mitsubishi Heavy Ind Ltd Check valve

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162492A (en) * 1978-06-13 1979-12-24 Mitsubishi Electric Corp Semiconductor pressure transducer
JPS5524273A (en) * 1978-08-11 1980-02-21 Mitsubishi Heavy Ind Ltd Check valve

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1110067A4 (en) * 1998-08-21 2001-10-24 Motorola Inc PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF
US6424014B2 (en) 2000-02-25 2002-07-23 Oki Electric Industry Co,Ltd. Semiconductor element with electric field reducing device mounted therein for increasing dielectric strength
FR2820201A1 (fr) * 2001-01-31 2002-08-02 Denso Corp Capteur de quantite dynamique a semiconducteur
JP2002373991A (ja) * 2001-01-31 2002-12-26 Denso Corp 半導体力学量センサ
DE10203631B4 (de) * 2001-01-31 2009-11-19 DENSO CORPORATION, Kariya-shi Halbleitersensor für eine dynamische Grösse
JP2009300197A (ja) * 2008-06-12 2009-12-24 Alps Electric Co Ltd 半導体圧力センサ

Also Published As

Publication number Publication date
JPH0473304B2 (enrdf_load_stackoverflow) 1992-11-20

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