JPS6073291A - アルミナ基板の製造方法 - Google Patents

アルミナ基板の製造方法

Info

Publication number
JPS6073291A
JPS6073291A JP58182054A JP18205483A JPS6073291A JP S6073291 A JPS6073291 A JP S6073291A JP 58182054 A JP58182054 A JP 58182054A JP 18205483 A JP18205483 A JP 18205483A JP S6073291 A JPS6073291 A JP S6073291A
Authority
JP
Japan
Prior art keywords
frame
alumina substrate
firing
green sheet
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58182054A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318114B2 (enExample
Inventor
安斎　義春
鈴木　敬助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58182054A priority Critical patent/JPS6073291A/ja
Publication of JPS6073291A publication Critical patent/JPS6073291A/ja
Publication of JPS6318114B2 publication Critical patent/JPS6318114B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP58182054A 1983-09-30 1983-09-30 アルミナ基板の製造方法 Granted JPS6073291A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58182054A JPS6073291A (ja) 1983-09-30 1983-09-30 アルミナ基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58182054A JPS6073291A (ja) 1983-09-30 1983-09-30 アルミナ基板の製造方法

Publications (2)

Publication Number Publication Date
JPS6073291A true JPS6073291A (ja) 1985-04-25
JPS6318114B2 JPS6318114B2 (enExample) 1988-04-16

Family

ID=16111531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58182054A Granted JPS6073291A (ja) 1983-09-30 1983-09-30 アルミナ基板の製造方法

Country Status (1)

Country Link
JP (1) JPS6073291A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428259A (en) * 1987-07-23 1989-01-30 Mitsubishi Mining & Cement Co Burning of ceramic plate in continuous form
JPH02302088A (ja) * 1989-05-16 1990-12-14 Fujitsu Ltd 窒化アルミニウム基板の焼成方法
JPH04280875A (ja) * 1991-03-06 1992-10-06 Mitsubishi Materials Corp セラミック基板の製造方法
US6607620B2 (en) * 2001-01-08 2003-08-19 International Business Machines Corporation Greensheet carriers and processing thereof
JP2008105939A (ja) * 2006-10-26 2008-05-08 Samsung Electro-Mechanics Co Ltd 積層セラミック基板焼成用加圧ローダ及びそれを用いた積層セラミック基板の製造方法
JP2009143730A (ja) * 2007-12-11 2009-07-02 Tokuyama Corp 板状セラミックス成形体の焼成方法および板状セラミックス成形体
JP2013208876A (ja) * 2012-03-30 2013-10-10 Nippon Shokubai Co Ltd セラミックシートの製造方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428259A (en) * 1987-07-23 1989-01-30 Mitsubishi Mining & Cement Co Burning of ceramic plate in continuous form
JPH02302088A (ja) * 1989-05-16 1990-12-14 Fujitsu Ltd 窒化アルミニウム基板の焼成方法
JPH04280875A (ja) * 1991-03-06 1992-10-06 Mitsubishi Materials Corp セラミック基板の製造方法
US6607620B2 (en) * 2001-01-08 2003-08-19 International Business Machines Corporation Greensheet carriers and processing thereof
US6790515B2 (en) 2001-01-08 2004-09-14 International Business Machines Corporation Greensheet carriers and processing thereof
JP2008105939A (ja) * 2006-10-26 2008-05-08 Samsung Electro-Mechanics Co Ltd 積層セラミック基板焼成用加圧ローダ及びそれを用いた積層セラミック基板の製造方法
JP2009143730A (ja) * 2007-12-11 2009-07-02 Tokuyama Corp 板状セラミックス成形体の焼成方法および板状セラミックス成形体
JP2013208876A (ja) * 2012-03-30 2013-10-10 Nippon Shokubai Co Ltd セラミックシートの製造方法

Also Published As

Publication number Publication date
JPS6318114B2 (enExample) 1988-04-16

Similar Documents

Publication Publication Date Title
JPS6073291A (ja) アルミナ基板の製造方法
US4489923A (en) Fixture for solder tinning chip carriers
US20020062552A1 (en) Multilayered ceramic substrate and production method therefor
JPH0236094A (ja) セラミック基板の分割方法
JPH1070210A (ja) 半導体基板に凹部を形成する装置および方法
JPH07153816A (ja) 基板移載方法および装置
JPS56126180A (en) Forming method for substrate for heat-sensitive recording head
JPS609192A (ja) 集積回路装置
JPS6117474A (ja) セラミツク基板の製造方法
JP3287049B2 (ja) ガラス切断方法
KR100797668B1 (ko) 인쇄회로기판 및 이의 제조 방법
JP3054452B2 (ja) 半導体製造方法
JPS6017992A (ja) 集積回路用セラミック基板の焼成法
JPS5956747A (ja) セラミツク基板の製造方法
JPH0671559A (ja) ラッピング方法
JPS62124941A (ja) セラミツク積層体の形成方法
JPS60171281A (ja) グレ−ズドセラミツク基板
JPH0738230A (ja) 厚膜集積回路の製造方法
JPS58176168A (ja) セラミツクグリ−ンシ−ト保存法
KR20220086810A (ko) 디스플레이용 초박형 글래스 제조방법
JPS6038353B2 (ja) セラミツク基板の製造方法
JPH04314377A (ja) 電子部品用基板
JPS6158201A (ja) 部分グレ−ズドセラミツク基板の製造方法
JPH04120262A (ja) マスキング材セット用治具
JP2005289458A (ja) スペーサーシート及びそれによる輸送方法