JPS6061648A - パタ−ン検出装置 - Google Patents

パタ−ン検出装置

Info

Publication number
JPS6061648A
JPS6061648A JP58169176A JP16917683A JPS6061648A JP S6061648 A JPS6061648 A JP S6061648A JP 58169176 A JP58169176 A JP 58169176A JP 16917683 A JP16917683 A JP 16917683A JP S6061648 A JPS6061648 A JP S6061648A
Authority
JP
Japan
Prior art keywords
light
detector
wiring pattern
pattern
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58169176A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436336B2 (enrdf_load_stackoverflow
Inventor
Yasuhiko Hara
靖彦 原
Koichi Tsukazaki
柄崎　晃一
Noriaki Ujiie
氏家　典明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58169176A priority Critical patent/JPS6061648A/ja
Publication of JPS6061648A publication Critical patent/JPS6061648A/ja
Publication of JPH0436336B2 publication Critical patent/JPH0436336B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP58169176A 1983-09-16 1983-09-16 パタ−ン検出装置 Granted JPS6061648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58169176A JPS6061648A (ja) 1983-09-16 1983-09-16 パタ−ン検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58169176A JPS6061648A (ja) 1983-09-16 1983-09-16 パタ−ン検出装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3305920A Division JP2519363B2 (ja) 1991-11-21 1991-11-21 プリント基板における配線パタ―ンの欠陥検査方法

Publications (2)

Publication Number Publication Date
JPS6061648A true JPS6061648A (ja) 1985-04-09
JPH0436336B2 JPH0436336B2 (enrdf_load_stackoverflow) 1992-06-15

Family

ID=15881651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58169176A Granted JPS6061648A (ja) 1983-09-16 1983-09-16 パタ−ン検出装置

Country Status (1)

Country Link
JP (1) JPS6061648A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62133341A (ja) * 1985-12-06 1987-06-16 Hitachi Ltd はんだ付部検査装置
JPS62138987A (ja) * 1985-12-12 1987-06-22 Nec Corp スル−ホ−ル画像のパタ−ン認識方法
JPS6332304A (ja) * 1986-07-28 1988-02-12 Hitachi Ltd 位置決め組付装置
JPH06204307A (ja) * 1992-10-30 1994-07-22 Internatl Business Mach Corp <Ibm> 光学的検査方法および装置
WO1999001749A1 (en) * 1997-07-03 1999-01-14 Smith & Nephew, Inc. Fluorescence imaging system
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62133341A (ja) * 1985-12-06 1987-06-16 Hitachi Ltd はんだ付部検査装置
JPS62138987A (ja) * 1985-12-12 1987-06-22 Nec Corp スル−ホ−ル画像のパタ−ン認識方法
JPS6332304A (ja) * 1986-07-28 1988-02-12 Hitachi Ltd 位置決め組付装置
USRE37740E1 (en) 1988-02-19 2002-06-11 Kla-Tencor Corporation Method and apparatus for optical inspection of substrates
JPH06204307A (ja) * 1992-10-30 1994-07-22 Internatl Business Mach Corp <Ibm> 光学的検査方法および装置
WO1999001749A1 (en) * 1997-07-03 1999-01-14 Smith & Nephew, Inc. Fluorescence imaging system
US5986271A (en) * 1997-07-03 1999-11-16 Lazarev; Victor Fluorescence imaging system

Also Published As

Publication number Publication date
JPH0436336B2 (enrdf_load_stackoverflow) 1992-06-15

Similar Documents

Publication Publication Date Title
US4816686A (en) Method and apparatus for detecting wiring patterns
US4692690A (en) Pattern detecting apparatus
JPS6061648A (ja) パタ−ン検出装置
JPH08247736A (ja) 実装基板検査装置
JPS6319855B2 (enrdf_load_stackoverflow)
JP2519363B2 (ja) プリント基板における配線パタ―ンの欠陥検査方法
JPH07270325A (ja) 欠陥検査装置
JPS608705A (ja) パタ−ン検出装置
JPH0943097A (ja) カラーフィルター欠陥検査装置
JPS6355445A (ja) 外観検査方式
JPH10246617A (ja) 平坦度判定方法および平坦度判定装置
JPH0448250A (ja) ヒューズ配列検査装置
JPH037881B2 (enrdf_load_stackoverflow)
JPH0238885B2 (ja) Kibanjonohaisenpataankenshutsuhohooyobisonosochi
JPH0723873B2 (ja) プリント基板における配線パターンの欠陥検出方法
JPS63153412A (ja) 実装部品検査装置
JPS63124939A (ja) パターン検査方法およびその装置
JPS603507A (ja) 配線パタ−ン検出装置
JPH0414281B2 (enrdf_load_stackoverflow)
JPS60135805A (ja) パタ−ン検出方法及びその装置
JPH03239954A (ja) パターン部材の検査方法および検査装置
JPS59218937A (ja) パタ−ン検出装置
JPH02190750A (ja) はんだ付け検査装置
JPS59200908A (ja) ウエハの照明方法およびその装置
JPH0772099A (ja) 不透明フィルムの欠点検査方法