JPS6056208A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS6056208A
JPS6056208A JP16406983A JP16406983A JPS6056208A JP S6056208 A JPS6056208 A JP S6056208A JP 16406983 A JP16406983 A JP 16406983A JP 16406983 A JP16406983 A JP 16406983A JP S6056208 A JPS6056208 A JP S6056208A
Authority
JP
Japan
Prior art keywords
turntable
data
inspected
section
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16406983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517482B2 (en:Method
Inventor
Shigeru Ogawa
茂 小川
Masaaki Kano
加納　正明
Hiroshi Yamaji
山地　廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP16406983A priority Critical patent/JPS6056208A/ja
Publication of JPS6056208A publication Critical patent/JPS6056208A/ja
Publication of JPH0517482B2 publication Critical patent/JPH0517482B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16406983A 1983-09-08 1983-09-08 表面検査装置 Granted JPS6056208A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16406983A JPS6056208A (ja) 1983-09-08 1983-09-08 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16406983A JPS6056208A (ja) 1983-09-08 1983-09-08 表面検査装置

Publications (2)

Publication Number Publication Date
JPS6056208A true JPS6056208A (ja) 1985-04-01
JPH0517482B2 JPH0517482B2 (en:Method) 1993-03-09

Family

ID=15786188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16406983A Granted JPS6056208A (ja) 1983-09-08 1983-09-08 表面検査装置

Country Status (1)

Country Link
JP (1) JPS6056208A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240144A (ja) * 1985-04-18 1986-10-25 Toshiba Corp 表面検査装置
JPS61283852A (ja) * 1985-06-11 1986-12-13 Toshiba Corp 表面検査装置
US4954722A (en) * 1989-07-21 1990-09-04 The United States Of America As Represented By The Secretary Of Commerce Scanning scattering microscope with hemispherical mirror and microfocused beam

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126747A (en) * 1980-03-12 1981-10-05 Hitachi Ltd Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240144A (ja) * 1985-04-18 1986-10-25 Toshiba Corp 表面検査装置
JPS61283852A (ja) * 1985-06-11 1986-12-13 Toshiba Corp 表面検査装置
US4954722A (en) * 1989-07-21 1990-09-04 The United States Of America As Represented By The Secretary Of Commerce Scanning scattering microscope with hemispherical mirror and microfocused beam

Also Published As

Publication number Publication date
JPH0517482B2 (en:Method) 1993-03-09

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