JPS6052568B2 - 薄膜コンデンサの容量調節方法 - Google Patents
薄膜コンデンサの容量調節方法Info
- Publication number
- JPS6052568B2 JPS6052568B2 JP50034690A JP3469075A JPS6052568B2 JP S6052568 B2 JPS6052568 B2 JP S6052568B2 JP 50034690 A JP50034690 A JP 50034690A JP 3469075 A JP3469075 A JP 3469075A JP S6052568 B2 JPS6052568 B2 JP S6052568B2
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- thin film
- capacitance value
- capacitance
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 title claims description 60
- 239000010409 thin film Substances 0.000 title claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 239000010408 film Substances 0.000 claims 9
- 238000000605 extraction Methods 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052715 tantalum Inorganic materials 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- -1 gold Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50034690A JPS6052568B2 (ja) | 1975-03-20 | 1975-03-20 | 薄膜コンデンサの容量調節方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50034690A JPS6052568B2 (ja) | 1975-03-20 | 1975-03-20 | 薄膜コンデンサの容量調節方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51109462A JPS51109462A (enrdf_load_stackoverflow) | 1976-09-28 |
| JPS6052568B2 true JPS6052568B2 (ja) | 1985-11-20 |
Family
ID=12421370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50034690A Expired JPS6052568B2 (ja) | 1975-03-20 | 1975-03-20 | 薄膜コンデンサの容量調節方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6052568B2 (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6082329U (ja) * | 1983-11-14 | 1985-06-07 | 横河メディカルシステム株式会社 | 記憶装置の補助電源回路 |
| JPS62259154A (ja) * | 1986-05-02 | 1987-11-11 | Hitachi Ltd | セキユリテイ・メモリ |
| JPS63234340A (ja) * | 1987-03-23 | 1988-09-29 | Omron Tateisi Electronics Co | デ−タ盗難防止機能を有する電子機器 |
| JPH0191947U (enrdf_load_stackoverflow) * | 1987-12-10 | 1989-06-16 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645016A (en) * | 1979-09-19 | 1981-04-24 | Hitachi Ltd | Capactance adjustment of capacitor |
| JPS6016412A (ja) * | 1983-07-08 | 1985-01-28 | 株式会社村田製作所 | 積層型ステップチップトリマコンデンサ |
| JPS6016413A (ja) * | 1983-07-08 | 1985-01-28 | 株式会社村田製作所 | 積層型ステップチップトリマコンデンサ |
-
1975
- 1975-03-20 JP JP50034690A patent/JPS6052568B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6082329U (ja) * | 1983-11-14 | 1985-06-07 | 横河メディカルシステム株式会社 | 記憶装置の補助電源回路 |
| JPS62259154A (ja) * | 1986-05-02 | 1987-11-11 | Hitachi Ltd | セキユリテイ・メモリ |
| JPS63234340A (ja) * | 1987-03-23 | 1988-09-29 | Omron Tateisi Electronics Co | デ−タ盗難防止機能を有する電子機器 |
| JPH0191947U (enrdf_load_stackoverflow) * | 1987-12-10 | 1989-06-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51109462A (enrdf_load_stackoverflow) | 1976-09-28 |
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