JPS6045437U - 半導体ウエ−ハホルダ - Google Patents

半導体ウエ−ハホルダ

Info

Publication number
JPS6045437U
JPS6045437U JP13669383U JP13669383U JPS6045437U JP S6045437 U JPS6045437 U JP S6045437U JP 13669383 U JP13669383 U JP 13669383U JP 13669383 U JP13669383 U JP 13669383U JP S6045437 U JPS6045437 U JP S6045437U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
main body
wafer holder
shaped main
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13669383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325736Y2 (enrdf_load_stackoverflow
Inventor
竹崎　幸也
南　正昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP13669383U priority Critical patent/JPS6045437U/ja
Publication of JPS6045437U publication Critical patent/JPS6045437U/ja
Application granted granted Critical
Publication of JPS6325736Y2 publication Critical patent/JPS6325736Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13669383U 1983-09-05 1983-09-05 半導体ウエ−ハホルダ Granted JPS6045437U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13669383U JPS6045437U (ja) 1983-09-05 1983-09-05 半導体ウエ−ハホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13669383U JPS6045437U (ja) 1983-09-05 1983-09-05 半導体ウエ−ハホルダ

Publications (2)

Publication Number Publication Date
JPS6045437U true JPS6045437U (ja) 1985-03-30
JPS6325736Y2 JPS6325736Y2 (enrdf_load_stackoverflow) 1988-07-13

Family

ID=30307269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13669383U Granted JPS6045437U (ja) 1983-09-05 1983-09-05 半導体ウエ−ハホルダ

Country Status (1)

Country Link
JP (1) JPS6045437U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6325736Y2 (enrdf_load_stackoverflow) 1988-07-13

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