JPS6040945A - 半導体ガスセンサ - Google Patents

半導体ガスセンサ

Info

Publication number
JPS6040945A
JPS6040945A JP14948383A JP14948383A JPS6040945A JP S6040945 A JPS6040945 A JP S6040945A JP 14948383 A JP14948383 A JP 14948383A JP 14948383 A JP14948383 A JP 14948383A JP S6040945 A JPS6040945 A JP S6040945A
Authority
JP
Japan
Prior art keywords
electrode
gas
semiconductor
sensor
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14948383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315975B2 (OSRAM
Inventor
Kentaro Ito
伊東　謙太郎
Tetsuya Kubo
久保　哲哉
Yukio Yamauchi
山内　幸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochiki Corp
Original Assignee
Hochiki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochiki Corp filed Critical Hochiki Corp
Priority to JP14948383A priority Critical patent/JPS6040945A/ja
Publication of JPS6040945A publication Critical patent/JPS6040945A/ja
Publication of JPH0315975B2 publication Critical patent/JPH0315975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP14948383A 1983-08-16 1983-08-16 半導体ガスセンサ Granted JPS6040945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14948383A JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14948383A JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Publications (2)

Publication Number Publication Date
JPS6040945A true JPS6040945A (ja) 1985-03-04
JPH0315975B2 JPH0315975B2 (OSRAM) 1991-03-04

Family

ID=15476134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14948383A Granted JPS6040945A (ja) 1983-08-16 1983-08-16 半導体ガスセンサ

Country Status (1)

Country Link
JP (1) JPS6040945A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007529722A (ja) * 2004-03-18 2007-10-25 ミクロナス ゲーエムベーハー ガス又はガス混合気を検出する装置
US8052898B2 (en) 2006-04-04 2011-11-08 Japan Atomic Energy Agency Hydrogen gas detecting material and the coating method
WO2021210453A1 (ja) * 2020-04-16 2021-10-21 ヌヴォトンテクノロジージャパン株式会社 水素センサ、水素検知方法および水素検知装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3707053B2 (ja) * 2002-05-08 2005-10-19 慎司 岡崎 ガスセンサ用の膜の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5774648A (en) * 1980-08-28 1982-05-10 Siemens Ag Selective thin film gas sensor and manufacture thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5774648A (en) * 1980-08-28 1982-05-10 Siemens Ag Selective thin film gas sensor and manufacture thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007529722A (ja) * 2004-03-18 2007-10-25 ミクロナス ゲーエムベーハー ガス又はガス混合気を検出する装置
US8052898B2 (en) 2006-04-04 2011-11-08 Japan Atomic Energy Agency Hydrogen gas detecting material and the coating method
WO2021210453A1 (ja) * 2020-04-16 2021-10-21 ヌヴォトンテクノロジージャパン株式会社 水素センサ、水素検知方法および水素検知装置
JPWO2021210453A1 (OSRAM) * 2020-04-16 2021-10-21

Also Published As

Publication number Publication date
JPH0315975B2 (OSRAM) 1991-03-04

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