JPS6033503A - ブレ−ズド格子の製造方法 - Google Patents

ブレ−ズド格子の製造方法

Info

Publication number
JPS6033503A
JPS6033503A JP14256783A JP14256783A JPS6033503A JP S6033503 A JPS6033503 A JP S6033503A JP 14256783 A JP14256783 A JP 14256783A JP 14256783 A JP14256783 A JP 14256783A JP S6033503 A JPS6033503 A JP S6033503A
Authority
JP
Japan
Prior art keywords
film
photoresist
ion beam
ion
polymer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14256783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217001B2 (enExample
Inventor
Yuzo Ono
小野　雄三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14256783A priority Critical patent/JPS6033503A/ja
Publication of JPS6033503A publication Critical patent/JPS6033503A/ja
Publication of JPH0217001B2 publication Critical patent/JPH0217001B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP14256783A 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法 Granted JPS6033503A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14256783A JPS6033503A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14256783A JPS6033503A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Publications (2)

Publication Number Publication Date
JPS6033503A true JPS6033503A (ja) 1985-02-20
JPH0217001B2 JPH0217001B2 (enExample) 1990-04-19

Family

ID=15318324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14256783A Granted JPS6033503A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Country Status (1)

Country Link
JP (1) JPS6033503A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6490402A (en) * 1987-09-30 1989-04-06 Kuraray Co Transmission type diffraction grating
WO2021031111A1 (zh) * 2019-08-16 2021-02-25 诚瑞光学(常州)股份有限公司 表面浮雕光栅结构的制作方法
JP2024518514A (ja) * 2021-05-17 2024-05-01 ディスペリックス オサケ ユキチュア ブレーズド格子を製造する方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6490402A (en) * 1987-09-30 1989-04-06 Kuraray Co Transmission type diffraction grating
WO2021031111A1 (zh) * 2019-08-16 2021-02-25 诚瑞光学(常州)股份有限公司 表面浮雕光栅结构的制作方法
JP2024518514A (ja) * 2021-05-17 2024-05-01 ディスペリックス オサケ ユキチュア ブレーズド格子を製造する方法

Also Published As

Publication number Publication date
JPH0217001B2 (enExample) 1990-04-19

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