JPH0217002B2 - - Google Patents

Info

Publication number
JPH0217002B2
JPH0217002B2 JP14256883A JP14256883A JPH0217002B2 JP H0217002 B2 JPH0217002 B2 JP H0217002B2 JP 14256883 A JP14256883 A JP 14256883A JP 14256883 A JP14256883 A JP 14256883A JP H0217002 B2 JPH0217002 B2 JP H0217002B2
Authority
JP
Japan
Prior art keywords
organic polymer
polymer film
film
ion etching
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14256883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6033504A (ja
Inventor
Juzo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14256883A priority Critical patent/JPS6033504A/ja
Publication of JPS6033504A publication Critical patent/JPS6033504A/ja
Publication of JPH0217002B2 publication Critical patent/JPH0217002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP14256883A 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法 Granted JPS6033504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14256883A JPS6033504A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14256883A JPS6033504A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Publications (2)

Publication Number Publication Date
JPS6033504A JPS6033504A (ja) 1985-02-20
JPH0217002B2 true JPH0217002B2 (enExample) 1990-04-19

Family

ID=15318347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14256883A Granted JPS6033504A (ja) 1983-08-05 1983-08-05 ブレ−ズド格子の製造方法

Country Status (1)

Country Link
JP (1) JPS6033504A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623402U (ja) * 1992-06-30 1994-03-29 なか 新井 万能草取具

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5092951A (en) * 1986-07-30 1992-03-03 Softub, Inc. Method of forming a tub apparatus
US5133818A (en) * 1986-07-30 1992-07-28 Softub, Inc. Method of forming a tub apparatus
US4858254A (en) * 1986-07-30 1989-08-22 Softub, Inc. Tub apparatus
JP3877444B2 (ja) 1998-09-02 2007-02-07 富士通株式会社 回折格子
CN102466980A (zh) * 2010-11-12 2012-05-23 中国科学院微电子研究所 基于电子束光刻和x射线曝光制作多层膜闪耀光栅的方法
CN102360093A (zh) 2011-10-19 2012-02-22 苏州大学 一种全息闪耀光栅制作方法
US11119405B2 (en) * 2018-10-12 2021-09-14 Applied Materials, Inc. Techniques for forming angled structures
FI130664B1 (fi) * 2021-05-17 2024-01-09 Dispelix Oy Menetelmä porrastetun hilan valmistamiseksi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623402U (ja) * 1992-06-30 1994-03-29 なか 新井 万能草取具

Also Published As

Publication number Publication date
JPS6033504A (ja) 1985-02-20

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