JPS6490402A - Transmission type diffraction grating - Google Patents
Transmission type diffraction gratingInfo
- Publication number
- JPS6490402A JPS6490402A JP24863487A JP24863487A JPS6490402A JP S6490402 A JPS6490402 A JP S6490402A JP 24863487 A JP24863487 A JP 24863487A JP 24863487 A JP24863487 A JP 24863487A JP S6490402 A JPS6490402 A JP S6490402A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- fluctuation
- temperature variation
- caused
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
PURPOSE:To reduce the fluctuation of an angle of diffraction caused by a temperature variation, and also, to reduce the cost by using a substrate whose thermal expansion coefficient is small by bringing an uneven thin film to patterning onto said substrate so that its thickness becomes 0.1-5mum, and also, both the projecting part and the recessed part adhere closely to the substrate. CONSTITUTION:A substrate 1 whose thermal expansion coefficient is remarkably smaller than plastics such as PMMA, etc., is used, and a thin film 2 having a diffraction grating-like pattern is brought to patterning thereon so that both a recessed part and a projecting part adhere closely to the substrate 1 with such a step difference (usually <=2mum) as has a desired phase difference. Thickness (d) of the thin film 2 is extremely thin such as <=5mum, therefore, the fluctuation of a grating pitch caused by a temperature variation of the periphery and the fluctuation of a grating thin film form are controlled by the substrate 1 whose thermal expansion coefficient, and also, since both the recessed part and the projecting part of the thin film 2 adhere closely to the substrate 1, peeling-off due to temperature variation is not generated either. Accordingly, the fluctuation of an angle of diffraction caused by temperature variation is small, and also, the wave front aberration is also scarcely caused.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24863487A JPS6490402A (en) | 1987-09-30 | 1987-09-30 | Transmission type diffraction grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24863487A JPS6490402A (en) | 1987-09-30 | 1987-09-30 | Transmission type diffraction grating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6490402A true JPS6490402A (en) | 1989-04-06 |
Family
ID=17181031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24863487A Pending JPS6490402A (en) | 1987-09-30 | 1987-09-30 | Transmission type diffraction grating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6490402A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015050037A (en) * | 2013-09-02 | 2015-03-16 | 株式会社ジャパンディスプレイ | Light-emitting element display device and manufacturing method of light-emitting element display device |
| CN111736342A (en) * | 2019-03-25 | 2020-10-02 | 精工爱普生株式会社 | Display device, optical element, and method for manufacturing optical element |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6033503A (en) * | 1983-08-05 | 1985-02-20 | Agency Of Ind Science & Technol | Production of blazed grating |
| JPS60176001A (en) * | 1984-02-22 | 1985-09-10 | Ricoh Co Ltd | Manufacture of hologram diffraction grating |
| JPS60181703A (en) * | 1984-02-29 | 1985-09-17 | Ricoh Co Ltd | Production of halogram diffraction grating |
-
1987
- 1987-09-30 JP JP24863487A patent/JPS6490402A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6033503A (en) * | 1983-08-05 | 1985-02-20 | Agency Of Ind Science & Technol | Production of blazed grating |
| JPS60176001A (en) * | 1984-02-22 | 1985-09-10 | Ricoh Co Ltd | Manufacture of hologram diffraction grating |
| JPS60181703A (en) * | 1984-02-29 | 1985-09-17 | Ricoh Co Ltd | Production of halogram diffraction grating |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015050037A (en) * | 2013-09-02 | 2015-03-16 | 株式会社ジャパンディスプレイ | Light-emitting element display device and manufacturing method of light-emitting element display device |
| CN111736342A (en) * | 2019-03-25 | 2020-10-02 | 精工爱普生株式会社 | Display device, optical element, and method for manufacturing optical element |
| US11656465B2 (en) | 2019-03-25 | 2023-05-23 | Seiko Epson Corporation | Display device, optical element, and method of producing optical element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW363146B (en) | An anti-reflective layer and a method of forming a photoresist pattern | |
| JPS523583A (en) | Crystal film forming process | |
| JPS5260142A (en) | Optical system for copying machine | |
| EP0379358A3 (en) | A method for producing a diffraction grating in optical elements | |
| JPS5240348A (en) | Reflecting mirror formed of metallic film | |
| DE69410872T2 (en) | Process for the production of a phase retardation film | |
| JPS6490402A (en) | Transmission type diffraction grating | |
| EP0206288A3 (en) | Diffraction grating and process for producing the same | |
| JPS53149259A (en) | Production of embossed release film | |
| JPS52115202A (en) | Recording member for information | |
| JPS53120527A (en) | Forming method of positive type radiation sensitive material layer | |
| JPS53125761A (en) | Manufacture for binary compound semiconductor thin film | |
| JPS5320770A (en) | Production of thin film fine patterns | |
| JPS644703A (en) | Diffraction grating and its production | |
| JPS52136234A (en) | Decorative metal plates | |
| JPS52141649A (en) | Production of hologram recorder | |
| JPS53131851A (en) | Optical fiber production | |
| JPS54110857A (en) | Optical production of sawtooth photo-sensitive resin flim | |
| JPS5412689A (en) | Photo coupler | |
| JPS53140338A (en) | Dazzle-proofing coating material | |
| JPS5267647A (en) | Optical film | |
| JPS5292520A (en) | Materials for recording | |
| JPS52129469A (en) | Wristwatch case | |
| JPS53143241A (en) | Production of optical diffusing plate | |
| JPS53143242A (en) | Production of optical diffusing plate |