JPS54110857A - Optical production of sawtooth photo-sensitive resin flim - Google Patents

Optical production of sawtooth photo-sensitive resin flim

Info

Publication number
JPS54110857A
JPS54110857A JP1779478A JP1779478A JPS54110857A JP S54110857 A JPS54110857 A JP S54110857A JP 1779478 A JP1779478 A JP 1779478A JP 1779478 A JP1779478 A JP 1779478A JP S54110857 A JPS54110857 A JP S54110857A
Authority
JP
Japan
Prior art keywords
photo
thin film
angle
film
resin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1779478A
Other languages
Japanese (ja)
Inventor
Keiichi Kubota
Masakazu Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1779478A priority Critical patent/JPS54110857A/en
Publication of JPS54110857A publication Critical patent/JPS54110857A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE:To obtain resin film easily and in a short time, by radiating parallel beams to a photo-sensitive resin film coated with nontransparent thin film of desired pattern by varying the angle of radiation to harden the resin film. CONSTITUTION:A photo-sensitive resin film 2 of thickness (d) using negative type photo resist, a nontransparent thin film (chrome thin film) 3 of film thickness of about 2000Angstrom , and a photo resist film 4 are laminated on a glass substrate 1. By etching the chrome thin film 3 through a photo resist mask 21 formed by ordinary method, a chrome thin film pattern 22 having the same form as the mask 21 is made. Changing the angle from the substrate vertical direction 23 by angle alpha from the vertical direction up to direction 24, the exit light is used to radiate so as to form sawtooth photo-sensitive region 25. Then, etching the chrome, only the region 25 is left over to obtain a blaze grating 26. Meanwhile, the thickness (d) of the photo- sensitive resin film is determined by the formula d=Ptantheta(P: pitch of diffraction grating, theta: blaze angle), and the angle alpha is alpha=90 degrees - theta.
JP1779478A 1978-02-17 1978-02-17 Optical production of sawtooth photo-sensitive resin flim Pending JPS54110857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1779478A JPS54110857A (en) 1978-02-17 1978-02-17 Optical production of sawtooth photo-sensitive resin flim

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1779478A JPS54110857A (en) 1978-02-17 1978-02-17 Optical production of sawtooth photo-sensitive resin flim

Publications (1)

Publication Number Publication Date
JPS54110857A true JPS54110857A (en) 1979-08-30

Family

ID=11953609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1779478A Pending JPS54110857A (en) 1978-02-17 1978-02-17 Optical production of sawtooth photo-sensitive resin flim

Country Status (1)

Country Link
JP (1) JPS54110857A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0271002A2 (en) * 1986-12-06 1988-06-15 Kuraray Co., Ltd. Transmittance modulation photomask, process for producing the same and process for producing diffraction grating
US5283690A (en) * 1989-04-04 1994-02-01 Sharp Kabushiki Kaisha Optical diffraction grating element
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0271002A2 (en) * 1986-12-06 1988-06-15 Kuraray Co., Ltd. Transmittance modulation photomask, process for producing the same and process for producing diffraction grating
US5283690A (en) * 1989-04-04 1994-02-01 Sharp Kabushiki Kaisha Optical diffraction grating element
US5436764A (en) * 1992-04-21 1995-07-25 Matsushita Electric Industrial Co., Ltd. Die for forming a micro-optical element, manufacturing method therefor, micro-optical element and manufacturing method therefor
US8711482B2 (en) 2009-12-04 2014-04-29 Panasonic Corporation Pressing mold for optical lenses and method for manufacturing glass optical lenses

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