JPS6031234A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS6031234A
JPS6031234A JP58140833A JP14083383A JPS6031234A JP S6031234 A JPS6031234 A JP S6031234A JP 58140833 A JP58140833 A JP 58140833A JP 14083383 A JP14083383 A JP 14083383A JP S6031234 A JPS6031234 A JP S6031234A
Authority
JP
Japan
Prior art keywords
substrate
pellet
hole
sheet
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58140833A
Other languages
English (en)
Inventor
Fumio Sakurai
桜井　文雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58140833A priority Critical patent/JPS6031234A/ja
Publication of JPS6031234A publication Critical patent/JPS6031234A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73267—Layer and HDI connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06—Polymers
    • H01L2924/078—Adhesive characteristics other than chemical
    • H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Die Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 本発明は絶縁回路基板上に半纏体ベレットを直接搭載し
て作られる電子時計用等の半導体装置に関するものであ
る。
一般に、半導体ベレットを直接絶縁回路基板に搭載する
場合、ベレットヲ樹脂ペースト等により基板に固定した
ｆｉ、Ａｕ線やＭ線のワイヤーポンディングによりベレ
ットの電極と基板の回路部と全接続していた。しかし、
製品の機能が２雑化するにつれ、ボンディングするワイ
ヤーの本数も非常に多くなり、製造工数の増加１品質面
での不安定性等が顕著になってきた。
不発明の目的は、この様な機能の多様化に対応し、より
闇単に品質の良い製品を作るためのベレ、計電極と基板
回路の結合構造を提供するものである。
不発明では片面に熱硬化性接着剤をコーティングした樹
脂シート（ポリエステル、ポリイミド等）あるいは金属
シート（ステンレス等）の所定の位置に載置された半導
体ベレットと、片面あるいは両面に所定の配線パターン
とベレット全収納できる孔と、こり孔の周辺から欠き出
した基板配線の一部にベレットとの結合部全持ち、結合
部には導体ペーストが塗布されている絶縁回路基板とを
有し、ベレットの電極と基板の結合部とが合致する様に
ベレットの載っているシートを基板に貼ル合わせ、これ
葡１５０℃前後に加熱処理して、半導体ベレットと絶縁
回路基板と全強固に固定すると同時に、基板の配線と電
気的な接続をしたことを特徴とする。
本発明では１反の処理で多数の電気的接続と品質良く実
現することができると同時に、製品ｔ−エク薄型化する
上でも効果がある。
以下に本発明の実施例について１図面を参照にして詳細
に説明する。従来の装置ＩＬ構構造上第１図に示す。絶
縁回路基板２の所定の位置に半導体ペレット１を樹脂ペ
ースト４を用いて載置し熱硬化等により固定した後、Ａ
ｕ線やＭ線等のボンディングワイヤー５ｖｃより基板上
の回路配線３と電気的に接続する。回路配線３は通常鋼
材で構成された上に、ワイヤーボンティングがしやすい
様に５μｍ前後のＮｉメ、キと薄いＡｕメッキが施され
ている。ワイヤーボンディング彼は半導体ペレットの周
囲に樹脂枠７を貼り合わせ、この枠同全液状や粉体の樹
脂６で封止して装置全製造する。
筐た第２図も従来の構造例で、装置全より薄型化するた
めに絶縁基板２に孔を設け、樹脂または金属シート８上
にコーティングされた熱硬化性接着剤９（主にエポキシ
樹脂系等）により、シート８と基板２とｔ砧り合わせる
と共に、基板２の孔部の接着剤の上に半導体ペレットｌ
を載置し、熱硬化により固着させたものもある。ペレッ
ト１を固着した彼は第１図の例と同様にして装置が作ら
れる。
しかしながら、ＩＲ品の機能が複雑多様化するに至って
、ボンディングワイヤー５の本数が５０〜７０本と非常
に多くなり、高速のボンダーを使用しても作業工数が大
幅に増加してきた。また数１０μｍ径の細いワイヤーを
使用するため、ポンディング性そのものが、品質に与え
る悪影響も顕著になってきｊ（ｅワイヤーポンディング
に↓らない方法として、金属の突起會突き当てて接合す
るバンプ法やビームリード法等があるが、いずれも高温
にさらす必要性や、おまり献極数が増すと精度に欠ける
などの問題を抱えているため、採用されているものは少
いのが現状である。
不発明はより簡単な製法で品質のすぐれた超薄型のパッ
ケージが得られる構造全提供することである。第３図に
不実施例の部分拡大図、第４図にその断面図を示す、先
ず、絶縁回路基板２にペレット収納用の孔部を形成し２
回路配線３を形成する時に、この収納孔に半導体ペレッ
ト１の電極と結合するため配線の一部を笑き出して結合
部を設ける・この結合部に、導体ペースト１０　（Ａｕ
ペース）、Ａｇペースト等）全塗布する。一方、熱硬化
性接着剤９ｔ−片面にコーティングした樹脂または金楓
シート８の所定の位置に半導体ペレット１を載直し、そ
の後ペレットｌ（Ｄ電極と基板２の孔部の配線突き出し
部とが良く合致する様にシート８と基板２奮貼り合わせ
る。これ全１５０℃程度で熱硬化させることによル半導
体ペレッ）１は絶縁回路基板２に固定されると同時に、
ペレット１の電極と基板２０回路配線との接続もその時
完了する。導体ペーストの塗布はペレット電極上に形成
しても同様のことが可能である。ペレット固着後は樹脂
６で空隙を封止することにより、所望の半導体装置を得
ることができる。
以上詳細に述べた様に、不発明によれば装置の製法を非
常に簡単化できると同時に、高品員で超薄型の半導体装
置全提供することが可能となる・
【図面の簡単な説明】
第１図および第２図は従来の半導体装置の半導体ベレッ
ト搭載部の部分断面図１−ボ丁。第３図は不発明による
半導体装ｆｋのベレット電極と基板配線の接合状況を示
す部分拡大図、第４図はそのＸ−人′方向断面図を示す
。 １・・・・・・半導体ペレット、２・・・・・絶縁基板
、３・・・・・・回路配線、４・・・・・・樹脂ペース
）、５−・・・ボンディングワイヤー、６・・・・・・
封止樹脂、７　・・・樹脂枠。 ８・・・・・樹脂シートあるい社金属シート、９・・・
・・熱硬化性接着剤、１０・・・・・・導体ペースト。 第　／　図 あＺ　図 乙 感３　図 嘉４圀

Claims (1)

  1. 【特許請求の範囲】 接着剤が片面にコーティングされた樹脂あるいは金属の
    シート上に搭載された半導体ベレットを。 所定り配線回路を有する絶縁回路基板の孔部に収納すべ
    く前記基板と前記シートとを貼り合わせたことを特徴と
    する半導体装置。
JP58140833A 1983-08-01 1983-08-01 半導体装置 Pending JPS6031234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58140833A JPS6031234A (ja) 1983-08-01 1983-08-01 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58140833A JPS6031234A (ja) 1983-08-01 1983-08-01 半導体装置

Publications (1)

Publication Number Publication Date
JPS6031234A true JPS6031234A (ja) 1985-02-18

Family

ID=15277770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58140833A Pending JPS6031234A (ja) 1983-08-01 1983-08-01 半導体装置

Country Status (1)

Country Link
JP (1) JPS6031234A (ja)

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