JPS60310A - 表面構造、特に、荒さの測定装置 - Google Patents

表面構造、特に、荒さの測定装置

Info

Publication number
JPS60310A
JPS60310A JP59010917A JP1091784A JPS60310A JP S60310 A JPS60310 A JP S60310A JP 59010917 A JP59010917 A JP 59010917A JP 1091784 A JP1091784 A JP 1091784A JP S60310 A JPS60310 A JP S60310A
Authority
JP
Japan
Prior art keywords
light
analyzer
array
focal length
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59010917A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038686B2 (en:Method
Inventor
オスカル・ゲルストルフア−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optische Werke G Rodenstock
Original Assignee
Optische Werke G Rodenstock
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optische Werke G Rodenstock filed Critical Optische Werke G Rodenstock
Publication of JPS60310A publication Critical patent/JPS60310A/ja
Publication of JPH038686B2 publication Critical patent/JPH038686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59010917A 1983-02-11 1984-01-24 表面構造、特に、荒さの測定装置 Granted JPS60310A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19833304780 DE3304780A1 (de) 1983-02-11 1983-02-11 Vorrichtung zur ermittlung einer oberflaechenstruktur, insbesondere der rauheit
DE8303856U DE8303856U1 (de) 1983-02-11 1983-02-11 Vorrichtung zur Ermittlung einer Oberflächenstruktur, insbesondere der Rauheit
DE3304780.4 1983-02-11

Publications (2)

Publication Number Publication Date
JPS60310A true JPS60310A (ja) 1985-01-05
JPH038686B2 JPH038686B2 (en:Method) 1991-02-06

Family

ID=37808180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010917A Granted JPS60310A (ja) 1983-02-11 1984-01-24 表面構造、特に、荒さの測定装置

Country Status (6)

Country Link
US (1) US4728196A (en:Method)
JP (1) JPS60310A (en:Method)
CH (1) CH664438A5 (en:Method)
DE (2) DE3304780A1 (en:Method)
FR (1) FR2540988B1 (en:Method)
GB (1) GB2135772B (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018523838A (ja) * 2015-08-25 2018-08-23 ブロードマン テクノロジーズ ゲーエムベーハー ウェーハの表面性状を非接触検査するための方法及び装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3428435A1 (de) * 1984-08-01 1986-02-06 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Rauheitssonde
DE3503858A1 (de) * 1985-02-05 1986-08-21 Daimler-Benz Ag, 7000 Stuttgart Vorrichtung zur ermittlung von gestaltsfehlern niedriger ordnung
FR2581753B1 (fr) * 1985-05-07 1993-09-03 Roulements Soc Nouvelle Appareil de controle de rugosite par voie optique
DE3732934A1 (de) * 1987-09-30 1989-04-20 Heidelberger Druckmasch Ag Sensoreinrichtung
DE3924290A1 (de) * 1989-07-22 1991-01-31 Fraunhofer Ges Forschung Vorrichtung zur optischen abstandsmessung
US5220360A (en) * 1990-10-24 1993-06-15 Ophthalmic Imaging Systems, Inc. Apparatus and method for topographical analysis of the retina
CH682698A5 (de) * 1990-11-01 1993-10-29 Fisba Optik Ag Bystronic Laser Verfahren, bei dem mehrere, in einer oder mehreren Reihen angeordnete Strahlungsquellen abgebildet werden und Vorrichtung hierzu.
JP3323537B2 (ja) * 1991-07-09 2002-09-09 キヤノン株式会社 微細構造評価装置及び微細構造評価法
DE4321042C1 (de) * 1993-06-25 1994-09-15 Univ Schiller Jena Defekt-Klassifizierungs-Gerät
EP0710817B1 (en) * 1993-06-29 2003-04-09 Omron Corporation Object discriminator ( road surface )
BE1014442A3 (nl) * 2001-10-30 2003-10-07 Lens Diamond Ind Nv Werkwijze om de ruwheid van een edelsteen te bepalen en opstelling die zulke werkwijze toepast.
AU2003284613A1 (en) * 2002-11-26 2004-06-23 Arkray, Inc. Light sensor, and detecting mechanism and light-measuring mechanism in analyzing device
TW568772B (en) * 2002-12-31 2004-01-01 Veutron Corp Apparatus with a combination of a point light source and a single lens
GB2407156B (en) * 2003-10-16 2007-01-03 Abington Consultants Non-contact optical monitor providing measurement insensitive to distance between sample and device
EP2657686B1 (de) * 2012-04-26 2019-08-14 Brodmann Technologies GmbH Vorrichtung zum Erfassen von Streulicht mit rotierendem Prisma
CN115930850B (zh) * 2023-02-06 2023-05-30 宜科(天津)电子有限公司 一种检测物体表面粗糙度的数据处理系统
EP4636353A1 (de) * 2024-04-19 2025-10-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur charakterisierung einer oberfläche einer probe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960782A (en:Method) * 1972-10-11 1974-06-12
JPS4984462A (en:Method) * 1972-11-24 1974-08-14
JPS5318387A (en) * 1976-08-04 1978-02-20 Fujitsu Ltd Pattern inspection system
JPS6450844A (en) * 1987-08-21 1989-02-27 Asahi Glass Co Ltd Novel fluorine-containing compound and use thereof

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3016464A (en) * 1959-06-10 1962-01-09 Daystrom Inc Apparatus for determining the location and thickness of a reflecting object
US3647961A (en) * 1970-04-09 1972-03-07 Western Electric Co T.v. -aided flaw detection using rotating image techniques
DE2032314A1 (de) * 1970-06-30 1972-01-05 Ibm Deutschland Verfahren zum berührungslosen optischen Prüfen und Messen von Oberflächen und Vorrichtungen zum Durchführen dieses Verfahrens
DE2101689A1 (de) * 1971-01-15 1972-07-20 Ibm Deutschland Anordnung zur Durchführung eines Verfahrens zum berühungslosen optischen Prüfen und Messen von Oberflächen
US3790287A (en) * 1972-03-31 1974-02-05 Western Electric Co Surface inspection with scanned focused light beams
DE2256736C3 (de) * 1972-11-18 1979-01-25 Ibm Deutschland Gmbh, 7000 Stuttgart Meßanordnung zur automatischen Prüfung der Oberflächenbeschaffenheit und Ebenheit einer Werkstückoberfläche
US3857637A (en) * 1973-01-10 1974-12-31 Ppg Industries Inc Surface distortion analyzer
US3850526A (en) * 1973-03-16 1974-11-26 Atomic Energy Commission Optical method and system for measuring surface finish
FR2222917A5 (en) * 1973-03-20 1974-10-18 Cometa Optical head with lamp and photocell - separate half lenses with one for source one for cell
GB1592511A (en) * 1977-05-18 1981-07-08 Ferranti Ltd Surface inspection apparatus
US4180830A (en) * 1977-06-28 1979-12-25 Rca Corporation Depth estimation system using diffractive effects of the grooves and signal elements in the grooves
JPS5483854A (en) * 1977-12-16 1979-07-04 Canon Inc Measuring device
US4226541A (en) * 1978-08-11 1980-10-07 Tisue James G Method and apparatus for suppressing the effects of surface light scatter in optical reflective scanning system
US4204772A (en) * 1978-09-25 1980-05-27 Recognition Systems, Inc. Optical measuring system
US4283146A (en) * 1978-11-30 1981-08-11 Lasag S.A. Optical detector
JPS6049841B2 (ja) * 1980-07-16 1985-11-05 室蘭工業大学長 光学式非接触型検出装置
JPS5737742A (en) * 1980-08-19 1982-03-02 Olympus Optical Co Ltd Method and device for optical information recording
DE3037622C2 (de) * 1980-10-04 1987-02-26 Theodor Prof. Dr.-Ing. 1000 Berlin Gast Einrichtung zur Bestimmung der Oberflächengüte
JPS57131039A (en) * 1981-02-07 1982-08-13 Olympus Optical Co Ltd Defect detector
SU1095036A1 (ru) * 1983-03-31 1984-05-30 Предприятие П/Я А-1705 Однообъективный растровый микроскоп дл измерени шероховатости поверхности

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960782A (en:Method) * 1972-10-11 1974-06-12
JPS4984462A (en:Method) * 1972-11-24 1974-08-14
JPS5318387A (en) * 1976-08-04 1978-02-20 Fujitsu Ltd Pattern inspection system
JPS6450844A (en) * 1987-08-21 1989-02-27 Asahi Glass Co Ltd Novel fluorine-containing compound and use thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018523838A (ja) * 2015-08-25 2018-08-23 ブロードマン テクノロジーズ ゲーエムベーハー ウェーハの表面性状を非接触検査するための方法及び装置

Also Published As

Publication number Publication date
DE3304780C2 (en:Method) 1989-09-14
US4728196A (en) 1988-03-01
GB2135772B (en) 1986-03-19
DE8303856U1 (de) 1985-11-14
GB8402953D0 (en) 1984-03-07
FR2540988A1 (fr) 1984-08-17
CH664438A5 (de) 1988-02-29
GB2135772A (en) 1984-09-05
DE3304780A1 (de) 1984-08-30
FR2540988B1 (fr) 1989-01-13
JPH038686B2 (en:Method) 1991-02-06

Similar Documents

Publication Publication Date Title
US5159412A (en) Optical measurement device with enhanced sensitivity
JP3140664B2 (ja) 異物検査方法及び装置
JPH038686B2 (en:Method)
JPS61247944A (ja) 反射率測定装置
JP2009145141A (ja) 欠陥検査装置及び欠陥検査プログラム
JPS62112034A (ja) 粒子解析装置
JP2001512821A (ja) マイクロ偏光計
JPS61167838A (ja) 粒子解析装置
JPH0277636A (ja) 粒子測定装置
JPH11101739A (ja) エリプソメトリ装置
JPH0541407Y2 (en:Method)
JPH11142241A (ja) 分光透過率測定装置
JP3220252B2 (ja) Ｅｏプローブ
JP2003148939A (ja) 顕微鏡を備えたオートコリメータ、これを用いた形状測定装置
JP2003097924A (ja) 形状測定装置および測定方法
JP2565274B2 (ja) 高さ測定装置
JPH04506413A (ja) 半透明要素の光学的伝達ファクタ又は密度を測定するのに使用する装置及び方法
CN114754671A (zh) 光束调节模块、光学测量系统以及光学测量方法
JP3258890B2 (ja) 散乱式粒度分布測定装置
JPH09236408A (ja) 焦点位置検出装置
JPH0262181B2 (en:Method)
JPH01240839A (ja) 粒子解析装置
JP2828559B2 (ja) 位置ずれ検出装置
JPS61235707A (ja) 膜厚測定装置
JPH10267638A (ja) 物体の表面における平坦度を測定する方法および装置