JPS6027603A - 超純水の比抵抗調整法 - Google Patents

超純水の比抵抗調整法

Info

Publication number
JPS6027603A
JPS6027603A JP58134480A JP13448083A JPS6027603A JP S6027603 A JPS6027603 A JP S6027603A JP 58134480 A JP58134480 A JP 58134480A JP 13448083 A JP13448083 A JP 13448083A JP S6027603 A JPS6027603 A JP S6027603A
Authority
JP
Japan
Prior art keywords
ultrapure water
resistivity
regulator
carbon dioxide
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58134480A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521841B2 (enrdf_load_stackoverflow
Inventor
Toru Yunoki
徹 柚木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ARUBATSUKU SERVICE KK
Ulvac Inc
Original Assignee
ARUBATSUKU SERVICE KK
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ARUBATSUKU SERVICE KK, Ulvac Inc filed Critical ARUBATSUKU SERVICE KK
Priority to JP58134480A priority Critical patent/JPS6027603A/ja
Publication of JPS6027603A publication Critical patent/JPS6027603A/ja
Publication of JPH0521841B2 publication Critical patent/JPH0521841B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58134480A 1983-07-25 1983-07-25 超純水の比抵抗調整法 Granted JPS6027603A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58134480A JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58134480A JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Publications (2)

Publication Number Publication Date
JPS6027603A true JPS6027603A (ja) 1985-02-12
JPH0521841B2 JPH0521841B2 (enrdf_load_stackoverflow) 1993-03-25

Family

ID=15129309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58134480A Granted JPS6027603A (ja) 1983-07-25 1983-07-25 超純水の比抵抗調整法

Country Status (1)

Country Link
JP (1) JPS6027603A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265809A (ja) * 1985-09-14 1987-03-25 Koyo Kikai Sangyo Kk 二重ベルトコンベア
JPS62198127A (ja) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd 半導体ウエハの洗浄方法
JPH10212105A (ja) * 1997-01-29 1998-08-11 Ngk Insulators Ltd 超純水の比抵抗調整方法および比抵抗調整装置
US6884359B2 (en) 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
WO2018116987A1 (ja) 2016-12-20 2018-06-28 Dic株式会社 比抵抗値調整装置及び比抵抗値調整方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4654526B2 (ja) * 2001-03-30 2011-03-23 栗田工業株式会社 比抵抗調整水製造装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631432A (en) * 1979-08-21 1981-03-30 Ebara Infilco Co Ltd Process for dissolving gas into liquid
JPS5786623U (enrdf_load_stackoverflow) * 1980-11-17 1982-05-28
JPS587831A (ja) * 1981-07-07 1983-01-17 Sumitomo Shoji Kk 高圧水によるウェハの洗浄方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631432A (en) * 1979-08-21 1981-03-30 Ebara Infilco Co Ltd Process for dissolving gas into liquid
JPS5786623U (enrdf_load_stackoverflow) * 1980-11-17 1982-05-28
JPS587831A (ja) * 1981-07-07 1983-01-17 Sumitomo Shoji Kk 高圧水によるウェハの洗浄方法及び装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265809A (ja) * 1985-09-14 1987-03-25 Koyo Kikai Sangyo Kk 二重ベルトコンベア
JPS62198127A (ja) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd 半導体ウエハの洗浄方法
JPH10212105A (ja) * 1997-01-29 1998-08-11 Ngk Insulators Ltd 超純水の比抵抗調整方法および比抵抗調整装置
US6884359B2 (en) 2000-09-27 2005-04-26 Dainippon Ink And Chemicals, Inc. Apparatus and method for controlling resistivity of ultra pure water
WO2018116987A1 (ja) 2016-12-20 2018-06-28 Dic株式会社 比抵抗値調整装置及び比抵抗値調整方法

Also Published As

Publication number Publication date
JPH0521841B2 (enrdf_load_stackoverflow) 1993-03-25

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