JPS60258729A - 磁気デイスク塗膜の検査方法及びその装置 - Google Patents
磁気デイスク塗膜の検査方法及びその装置Info
- Publication number
- JPS60258729A JPS60258729A JP11296184A JP11296184A JPS60258729A JP S60258729 A JPS60258729 A JP S60258729A JP 11296184 A JP11296184 A JP 11296184A JP 11296184 A JP11296184 A JP 11296184A JP S60258729 A JPS60258729 A JP S60258729A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- disk coating
- coating film
- illumination light
- detection range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296184A JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296184A JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60258729A true JPS60258729A (ja) | 1985-12-20 |
JPH0352649B2 JPH0352649B2 (enrdf_load_stackoverflow) | 1991-08-12 |
Family
ID=14599866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11296184A Granted JPS60258729A (ja) | 1984-06-04 | 1984-06-04 | 磁気デイスク塗膜の検査方法及びその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60258729A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141847U (enrdf_load_stackoverflow) * | 1989-04-28 | 1990-11-29 | ||
KR100944425B1 (ko) | 2008-04-29 | 2010-02-25 | 주식회사 포스코 | 강판 표면의 결함마크 검출 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794636A (en) * | 1980-12-05 | 1982-06-12 | Fujitsu Ltd | Defect detecting device of disk substrate |
JPS6057241A (ja) * | 1983-09-09 | 1985-04-03 | Victor Co Of Japan Ltd | 円盤状情報記録媒体の欠陥検査方法及びその装置 |
-
1984
- 1984-06-04 JP JP11296184A patent/JPS60258729A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5794636A (en) * | 1980-12-05 | 1982-06-12 | Fujitsu Ltd | Defect detecting device of disk substrate |
JPS6057241A (ja) * | 1983-09-09 | 1985-04-03 | Victor Co Of Japan Ltd | 円盤状情報記録媒体の欠陥検査方法及びその装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141847U (enrdf_load_stackoverflow) * | 1989-04-28 | 1990-11-29 | ||
KR100944425B1 (ko) | 2008-04-29 | 2010-02-25 | 주식회사 포스코 | 강판 표면의 결함마크 검출 장치 |
Also Published As
Publication number | Publication date |
---|---|
JPH0352649B2 (enrdf_load_stackoverflow) | 1991-08-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN111203805B (zh) | 全自动修复玻璃划痕的方法 | |
TWI648534B (zh) | 磊晶晶圓之裏面檢查方法、磊晶晶圓裏面檢查裝置、磊晶成長裝置之升降銷管理方法以及磊晶晶圓之製造方法 | |
US5625193A (en) | Optical inspection system and method for detecting flaws on a diffractive surface | |
JPH0718809B2 (ja) | 表面性状測定装置及び方法 | |
JP2003139523A (ja) | 表面欠陥検出方法および表面欠陥検出装置 | |
JPH0776757B2 (ja) | 光学的検査装置 | |
JPH06294749A (ja) | 板ガラスの欠点検査方法 | |
JP2006138830A (ja) | 表面欠陥検査装置 | |
JPS60258729A (ja) | 磁気デイスク塗膜の検査方法及びその装置 | |
JPH0410563B2 (enrdf_load_stackoverflow) | ||
JP2002340811A (ja) | 表面評価装置 | |
JPH07239304A (ja) | 表面層欠陥検出装置 | |
JP3025946B2 (ja) | 物体表面の粗さ測定方法及び装置 | |
JP2712940B2 (ja) | 表面層欠陥検出装置 | |
JPH0868760A (ja) | 表面層欠陥検出装置 | |
JPH06148088A (ja) | ハードディスクの欠陥検出方法 | |
JP2000311925A (ja) | 外観検査装置 | |
JP3293257B2 (ja) | 表面欠陥検査装置 | |
JPH10253547A (ja) | 基板外観検査システム | |
JPS63218847A (ja) | 表面欠陥検査方法 | |
JPH0311403B2 (enrdf_load_stackoverflow) | ||
JP4220304B2 (ja) | 原子力燃料ペレットの検査方法および装置 | |
JP3251477B2 (ja) | 表面に存在する欠陥の検査方法 | |
JPH08122266A (ja) | 表面検査装置 | |
JP2004354226A (ja) | 表面欠陥検査方法及び検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |