JPS6025060Y2 - 走査型電子顕微鏡 - Google Patents

走査型電子顕微鏡

Info

Publication number
JPS6025060Y2
JPS6025060Y2 JP1978090387U JP9038778U JPS6025060Y2 JP S6025060 Y2 JPS6025060 Y2 JP S6025060Y2 JP 1978090387 U JP1978090387 U JP 1978090387U JP 9038778 U JP9038778 U JP 9038778U JP S6025060 Y2 JPS6025060 Y2 JP S6025060Y2
Authority
JP
Japan
Prior art keywords
electron beam
sample
scanning
camera
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978090387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS556985U (enrdf_load_stackoverflow
Inventor
義弘 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1978090387U priority Critical patent/JPS6025060Y2/ja
Publication of JPS556985U publication Critical patent/JPS556985U/ja
Application granted granted Critical
Publication of JPS6025060Y2 publication Critical patent/JPS6025060Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Control For Cameras (AREA)
  • Projection-Type Copiers In General (AREA)
  • Control Of Exposure In Printing And Copying (AREA)
JP1978090387U 1978-06-30 1978-06-30 走査型電子顕微鏡 Expired JPS6025060Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978090387U JPS6025060Y2 (ja) 1978-06-30 1978-06-30 走査型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978090387U JPS6025060Y2 (ja) 1978-06-30 1978-06-30 走査型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS556985U JPS556985U (enrdf_load_stackoverflow) 1980-01-17
JPS6025060Y2 true JPS6025060Y2 (ja) 1985-07-27

Family

ID=29018679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978090387U Expired JPS6025060Y2 (ja) 1978-06-30 1978-06-30 走査型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6025060Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925368A (enrdf_load_stackoverflow) * 1972-06-30 1974-03-06
JPS5913011B2 (ja) * 1974-06-21 1984-03-27 富士写真フイルム株式会社 写真焼付露光量制御方法
JPS5837531B2 (ja) * 1976-01-19 1983-08-17 工業技術院長 濃淡画像記録装置
JPS5343340U (enrdf_load_stackoverflow) * 1977-08-31 1978-04-13

Also Published As

Publication number Publication date
JPS556985U (enrdf_load_stackoverflow) 1980-01-17

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