JPS60250168A - 振動制御装置 - Google Patents

振動制御装置

Info

Publication number
JPS60250168A
JPS60250168A JP10625284A JP10625284A JPS60250168A JP S60250168 A JPS60250168 A JP S60250168A JP 10625284 A JP10625284 A JP 10625284A JP 10625284 A JP10625284 A JP 10625284A JP S60250168 A JPS60250168 A JP S60250168A
Authority
JP
Japan
Prior art keywords
feed screw
vibration
control device
drive motor
vibration control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10625284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0214513B2 (enExample
Inventor
和彦 吉田
泰 丸山
秀夫 田代
亀井　信夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10625284A priority Critical patent/JPS60250168A/ja
Publication of JPS60250168A publication Critical patent/JPS60250168A/ja
Publication of JPH0214513B2 publication Critical patent/JPH0214513B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Vibration Prevention Devices (AREA)
JP10625284A 1984-05-25 1984-05-25 振動制御装置 Granted JPS60250168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10625284A JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10625284A JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Publications (2)

Publication Number Publication Date
JPS60250168A true JPS60250168A (ja) 1985-12-10
JPH0214513B2 JPH0214513B2 (enExample) 1990-04-09

Family

ID=14428906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10625284A Granted JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Country Status (1)

Country Link
JP (1) JPS60250168A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0277342U (enExample) * 1988-12-05 1990-06-13
JPH02300478A (ja) * 1989-05-15 1990-12-12 Ohbayashi Corp 構造物の制振装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0277342U (enExample) * 1988-12-05 1990-06-13
JPH02300478A (ja) * 1989-05-15 1990-12-12 Ohbayashi Corp 構造物の制振装置

Also Published As

Publication number Publication date
JPH0214513B2 (enExample) 1990-04-09

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